System integration and customized packaging of MOEMS

Harri Kopola, Martti Blomberg, Pentti Karioja, Kari Kautio, Juha Rantala, Outi Rusanen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Original languageEnglish
Title of host publicationProceedings of 3rd International Conference on Micro Opto Electro Mechanical Systems
Pages194-205
Publication statusPublished - 1999
MoE publication typeB3 Non-refereed article in conference proceedings
Event3rd International Conference on Micro Opto Electro Mechanical Systems - Mainz, Germany
Duration: 30 Aug 19991 Sep 1999

Conference

Conference3rd International Conference on Micro Opto Electro Mechanical Systems
CountryGermany
CityMainz
Period30/08/991/09/99

Cite this

Kopola, H., Blomberg, M., Karioja, P., Kautio, K., Rantala, J., & Rusanen, O. (1999). System integration and customized packaging of MOEMS. In Proceedings of 3rd International Conference on Micro Opto Electro Mechanical Systems (pp. 194-205)