System integration and customized packaging of MOEMS

Harri Kopola, Martti Blomberg, Pentti Karioja, Kari Kautio, Juha Rantala, Outi Rusanen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

Original language	English
Title of host publication	Proceedings of 3rd International Conference on Micro Opto Electro Mechanical Systems
Pages	194-205
Publication status	Published - 1999
MoE publication type	B3 Non-refereed article in conference proceedings
Event	3rd International Conference on Micro Opto Electro Mechanical Systems - Mainz, Germany Duration: 30 Aug 1999 → 1 Sept 1999

Conference	3rd International Conference on Micro Opto Electro Mechanical Systems
Country/Territory	Germany
City	Mainz
Period	30/08/99 → 1/09/99

Cite this

@inproceedings{78e16557e7c04174b4e6f799f75d7c5e,

title = "System integration and customized packaging of MOEMS",

author = "Harri Kopola and Martti Blomberg and Pentti Karioja and Kari Kautio and Juha Rantala and Outi Rusanen",

year = "1999",

language = "English",

pages = "194--205",

booktitle = "Proceedings of 3rd International Conference on Micro Opto Electro Mechanical Systems",

note = "3rd International Conference on Micro Opto Electro Mechanical Systems ; Conference date: 30-08-1999 Through 01-09-1999",

}

TY - GEN

T1 - System integration and customized packaging of MOEMS

AU - Kopola, Harri

AU - Blomberg, Martti

AU - Karioja, Pentti

AU - Kautio, Kari

AU - Rantala, Juha

AU - Rusanen, Outi

PY - 1999

Y1 - 1999

M3 - Conference article in proceedings

SP - 194

EP - 205

BT - Proceedings of 3rd International Conference on Micro Opto Electro Mechanical Systems

T2 - 3rd International Conference on Micro Opto Electro Mechanical Systems

Y2 - 30 August 1999 through 1 September 1999

ER -