System integration and customized packaging of MOEMS

Harri Kopola, Martti Blomberg, Pentti Karioja, Kari Kautio, Juha Rantala, Outi Rusanen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Original languageEnglish
Title of host publicationProceedings of 3rd International Conference on Micro Opto Electro Mechanical Systems
Pages194-205
Publication statusPublished - 1999
MoE publication typeB3 Non-refereed article in conference proceedings
Event3rd International Conference on Micro Opto Electro Mechanical Systems - Mainz, Germany
Duration: 30 Aug 19991 Sep 1999

Conference

Conference3rd International Conference on Micro Opto Electro Mechanical Systems
CountryGermany
CityMainz
Period30/08/991/09/99

Cite this

Kopola, H., Blomberg, M., Karioja, P., Kautio, K., Rantala, J., & Rusanen, O. (1999). System integration and customized packaging of MOEMS. In Proceedings of 3rd International Conference on Micro Opto Electro Mechanical Systems (pp. 194-205)
Kopola, Harri ; Blomberg, Martti ; Karioja, Pentti ; Kautio, Kari ; Rantala, Juha ; Rusanen, Outi. / System integration and customized packaging of MOEMS. Proceedings of 3rd International Conference on Micro Opto Electro Mechanical Systems. 1999. pp. 194-205
@inproceedings{78e16557e7c04174b4e6f799f75d7c5e,
title = "System integration and customized packaging of MOEMS",
author = "Harri Kopola and Martti Blomberg and Pentti Karioja and Kari Kautio and Juha Rantala and Outi Rusanen",
year = "1999",
language = "English",
pages = "194--205",
booktitle = "Proceedings of 3rd International Conference on Micro Opto Electro Mechanical Systems",

}

Kopola, H, Blomberg, M, Karioja, P, Kautio, K, Rantala, J & Rusanen, O 1999, System integration and customized packaging of MOEMS. in Proceedings of 3rd International Conference on Micro Opto Electro Mechanical Systems. pp. 194-205, 3rd International Conference on Micro Opto Electro Mechanical Systems, Mainz, Germany, 30/08/99.

System integration and customized packaging of MOEMS. / Kopola, Harri; Blomberg, Martti; Karioja, Pentti; Kautio, Kari; Rantala, Juha; Rusanen, Outi.

Proceedings of 3rd International Conference on Micro Opto Electro Mechanical Systems. 1999. p. 194-205.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

TY - GEN

T1 - System integration and customized packaging of MOEMS

AU - Kopola, Harri

AU - Blomberg, Martti

AU - Karioja, Pentti

AU - Kautio, Kari

AU - Rantala, Juha

AU - Rusanen, Outi

PY - 1999

Y1 - 1999

M3 - Conference article in proceedings

SP - 194

EP - 205

BT - Proceedings of 3rd International Conference on Micro Opto Electro Mechanical Systems

ER -

Kopola H, Blomberg M, Karioja P, Kautio K, Rantala J, Rusanen O. System integration and customized packaging of MOEMS. In Proceedings of 3rd International Conference on Micro Opto Electro Mechanical Systems. 1999. p. 194-205