System integration and customized packaging of MOEMS

Harri Kopola, Martti Blomberg, Pentti Karioja, Kari Kautio, Juha Rantala, Outi Rusanen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    Original languageEnglish
    Title of host publicationProceedings of 3rd International Conference on Micro Opto Electro Mechanical Systems
    Pages194-205
    Publication statusPublished - 1999
    MoE publication typeB3 Non-refereed article in conference proceedings
    Event3rd International Conference on Micro Opto Electro Mechanical Systems - Mainz, Germany
    Duration: 30 Aug 19991 Sep 1999

    Conference

    Conference3rd International Conference on Micro Opto Electro Mechanical Systems
    CountryGermany
    CityMainz
    Period30/08/991/09/99

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