Systematic design approach for capacitively coupled microelectromechanical filters

A.T. Alastalo, V. Kaajakari

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)1662-1670
Number of pages9
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume53
Issue number9
DOIs
Publication statusPublished - 2006
MoE publication typeA1 Journal article-refereed

Keywords

  • MEMS
  • MEMS devices
  • MEMS filters
  • microelectromechanical devices
  • microelectromechanical filters

Cite this