Systematic design approach for capacitively coupled microelectromechanical filters

Ari T. Alastalo, Ville Kaajakari

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)


A design procedure for microelectromechanical (MEMS) band-pass filters is formulated that takes into account specifications set for carrier-to-interference ratio (C/I) and insertion loss. Since suppressing intermodulation distortion to maximize C/I in MEMS filter design typically leads to increased loss and vice versa, it is necessary to aim at a feasible compromise in filter performance that meets all of the requirements. In order to meet specifications that are typical for a handheld communication terminal, an integrated receiver architecture, where filter input and output impedances other than 50 Omega can be used, is found to be more feasible than resistively terminating the front-end filter at source and load to 50 Omega
Original languageEnglish
Pages (from-to)1662-1670
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Issue number9
Publication statusPublished - 2006
MoE publication typeA1 Journal article-refereed


  • MEMS
  • MEMS devices
  • MEMS filters
  • microelectromechanical devices
  • microelectromechanical filters


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