Systematic design approach for capacitively coupled microelectromechanical filters

A.T. Alastalo, V. Kaajakari

    Research output: Contribution to journalArticleScientificpeer-review

    5 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1662-1670
    Number of pages9
    JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
    Volume53
    Issue number9
    DOIs
    Publication statusPublished - 2006
    MoE publication typeA1 Journal article-refereed

    Keywords

    • MEMS
    • MEMS devices
    • MEMS filters
    • microelectromechanical devices
    • microelectromechanical filters

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