Systematic design approach for capacitively coupled microelectromechanical filters

A.T. Alastalo, V. Kaajakari

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)1662-1670
Number of pages9
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume53
Issue number9
DOIs
Publication statusPublished - 2006
MoE publication typeA1 Journal article-refereed

Keywords

  • MEMS
  • MEMS devices
  • MEMS filters
  • microelectromechanical devices
  • microelectromechanical filters

Cite this

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title = "Systematic design approach for capacitively coupled microelectromechanical filters",
keywords = "MEMS, MEMS devices, MEMS filters, microelectromechanical devices, microelectromechanical filters",
author = "A.T. Alastalo and V. Kaajakari",
note = "Cited By :5 Export Date: 16 May 2018",
year = "2006",
doi = "10.1109/TUFFC.2006.1678194",
language = "English",
volume = "53",
pages = "1662--1670",
journal = "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control",
issn = "0885-3010",
publisher = "Institute of Electrical and Electronic Engineers IEEE",
number = "9",

}

Systematic design approach for capacitively coupled microelectromechanical filters. / Alastalo, A.T.; Kaajakari, V.

In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 53, No. 9, 2006, p. 1662-1670.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Systematic design approach for capacitively coupled microelectromechanical filters

AU - Alastalo, A.T.

AU - Kaajakari, V.

N1 - Cited By :5 Export Date: 16 May 2018

PY - 2006

Y1 - 2006

KW - MEMS

KW - MEMS devices

KW - MEMS filters

KW - microelectromechanical devices

KW - microelectromechanical filters

U2 - 10.1109/TUFFC.2006.1678194

DO - 10.1109/TUFFC.2006.1678194

M3 - Article

VL - 53

SP - 1662

EP - 1670

JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

SN - 0885-3010

IS - 9

ER -