Systematic design approach for capacitively coupled microelectromechanical filters

Ari T. Alastalo; Ville Kaajakari

doi:10.1109/TUFFC.2006.1678194

Systematic design approach for capacitively coupled microelectromechanical filters

Ari T. Alastalo
, Ville Kaajakari

Research output: Contribution to journal › Article › Scientific › peer-review

7 Citations (Scopus)

Abstract

A design procedure for microelectromechanical (MEMS) band-pass filters is formulated that takes into account specifications set for carrier-to-interference ratio (C/I) and insertion loss. Since suppressing intermodulation distortion to maximize C/I in MEMS filter design typically leads to increased loss and vice versa, it is necessary to aim at a feasible compromise in filter performance that meets all of the requirements. In order to meet specifications that are typical for a handheld communication terminal, an integrated receiver architecture, where filter input and output impedances other than 50 Omega can be used, is found to be more feasible than resistively terminating the front-end filter at source and load to 50 Omega

Original language	English
Pages (from-to)	1662-1670
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	53
Issue number	9
DOIs	https://doi.org/10.1109/TUFFC.2006.1678194
Publication status	Published - 2006
MoE publication type	A1 Journal article-refereed

Keywords

MEMS
MEMS devices
MEMS filters
microelectromechanical devices
microelectromechanical filters

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10.1109/TUFFC.2006.1678194

https://www.scopus.com/inward/record.uri?eid=2-s2.0-33748343407&doi=10.1109%2fTUFFC.2006.1678194&partnerID=40&md5=18d3ecd4d9b51e58f24b2495b97096db

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title = "Systematic design approach for capacitively coupled microelectromechanical filters",

abstract = "A design procedure for microelectromechanical (MEMS) band-pass filters is formulated that takes into account specifications set for carrier-to-interference ratio (C/I) and insertion loss. Since suppressing intermodulation distortion to maximize C/I in MEMS filter design typically leads to increased loss and vice versa, it is necessary to aim at a feasible compromise in filter performance that meets all of the requirements. In order to meet specifications that are typical for a handheld communication terminal, an integrated receiver architecture, where filter input and output impedances other than 50 Omega can be used, is found to be more feasible than resistively terminating the front-end filter at source and load to 50 Omega",

keywords = "MEMS, MEMS devices, MEMS filters, microelectromechanical devices, microelectromechanical filters",

author = "Alastalo, \{Ari T.\} and Ville Kaajakari",

note = "Cited By :5 Export Date: 16 May 2018",

year = "2006",

doi = "10.1109/TUFFC.2006.1678194",

language = "English",

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pages = "1662--1670",

journal = "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control",

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publisher = "IEEE Institute of Electrical and Electronic Engineers",

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T1 - Systematic design approach for capacitively coupled microelectromechanical filters

AU - Alastalo, Ari T.

AU - Kaajakari, Ville

N1 - Cited By :5 Export Date: 16 May 2018

PY - 2006

Y1 - 2006

N2 - A design procedure for microelectromechanical (MEMS) band-pass filters is formulated that takes into account specifications set for carrier-to-interference ratio (C/I) and insertion loss. Since suppressing intermodulation distortion to maximize C/I in MEMS filter design typically leads to increased loss and vice versa, it is necessary to aim at a feasible compromise in filter performance that meets all of the requirements. In order to meet specifications that are typical for a handheld communication terminal, an integrated receiver architecture, where filter input and output impedances other than 50 Omega can be used, is found to be more feasible than resistively terminating the front-end filter at source and load to 50 Omega

AB - A design procedure for microelectromechanical (MEMS) band-pass filters is formulated that takes into account specifications set for carrier-to-interference ratio (C/I) and insertion loss. Since suppressing intermodulation distortion to maximize C/I in MEMS filter design typically leads to increased loss and vice versa, it is necessary to aim at a feasible compromise in filter performance that meets all of the requirements. In order to meet specifications that are typical for a handheld communication terminal, an integrated receiver architecture, where filter input and output impedances other than 50 Omega can be used, is found to be more feasible than resistively terminating the front-end filter at source and load to 50 Omega

KW - MEMS

KW - MEMS devices

KW - MEMS filters

KW - microelectromechanical devices

KW - microelectromechanical filters

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DO - 10.1109/TUFFC.2006.1678194

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JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

IS - 9

ER -

Systematic design approach for capacitively coupled microelectromechanical filters

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Keywords

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