Technology of nanoimprint stamps with sub-100 nm features

I. Maximov; P. Carlberg; M. Beck; E.L. Sarwe; L. Montelius; J. Seekamp; S. Zankovych; H.C. Scheer; C.M. Sotomayor Torres; Ch. Cardinaud; K. Pfeiffer; F. Reuther; M. Fink; G. Grueztner; Tomi Haatainen; Jorma Salmi; Jouni Ahopelto

Technology of nanoimprint stamps with sub-100 nm features

I. Maximov
, P. Carlberg
, M. Beck
, E.L. Sarwe
, L. Montelius
, J. Seekamp
, S. Zankovych
, H.C. Scheer
, C.M. Sotomayor Torres
, Ch. Cardinaud
, K. Pfeiffer
, F. Reuther
, M. Fink
, G. Grueztner
, Tomi Haatainen
, Jorma Salmi
, Jouni Ahopelto

VTT (former employee or external)
Lund University
University of Wuppertal
University of Nantes
Microresist Technology GmbH

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	Proceedings of the First International Conference on Nanoimprint Nanoprint Technology
Place of Publication	San Francisco
Publisher	Naval Research Laboratory
Pages	87-88
Publication status	Published - 2002
MoE publication type	Not Eligible
Event	1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 - San Francisco, United States Duration: 11 Dec 2002 → 13 Dec 2002 http://www.nntconf.org/pdf/2002ProgramSchedule.pdf (Conference Programme)

Conference

Conference	1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02
Abbreviated title	NNT 2002
Country/Territory	United States
City	San Francisco
Period	11/12/02 → 13/12/02
Internet address	http://www.nntconf.org/pdf/2002ProgramSchedule.pdf (Conference Programme)

Keywords

Nanoimprint Lithography

Cite this

Maximov, I., Carlberg, P., Beck, M., Sarwe, E. L., Montelius, L., Seekamp, J., Zankovych, S., Scheer, H. C., Sotomayor Torres, C. M., Cardinaud, C., Pfeiffer, K., Reuther, F., Fink, M., Grueztner, G., Haatainen, T., Salmi, J., & Ahopelto, J. (2002). Technology of nanoimprint stamps with sub-100 nm features. In Proceedings of the First International Conference on Nanoimprint Nanoprint Technology (pp. 87-88). Naval Research Laboratory.

@inbook{271f9176af7846b285cf7d6076732d9f,

title = "Technology of nanoimprint stamps with sub-100 nm features",

keywords = "Nanoimprint Lithography",

author = "I. Maximov and P. Carlberg and M. Beck and E.L. Sarwe and L. Montelius and J. Seekamp and S. Zankovych and H.C. Scheer and \{Sotomayor Torres\}, C.M. and Ch. Cardinaud and K. Pfeiffer and F. Reuther and M. Fink and G. Grueztner and Tomi Haatainen and Jorma Salmi and Jouni Ahopelto",

year = "2002",

language = "English",

pages = "87--88",

booktitle = "Proceedings of the First International Conference on Nanoimprint Nanoprint Technology",

publisher = "Naval Research Laboratory",

address = "United States",

note = "1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 , NNT 2002 ; Conference date: 11-12-2002 Through 13-12-2002",

url = "http://www.nntconf.org/pdf/2002ProgramSchedule.pdf",

}

Maximov, I, Carlberg, P, Beck, M, Sarwe, EL, Montelius, L, Seekamp, J, Zankovych, S, Scheer, HC, Sotomayor Torres, CM, Cardinaud, C, Pfeiffer, K, Reuther, F, Fink, M, Grueztner, G, Haatainen, T, Salmi, J & Ahopelto, J 2002, Technology of nanoimprint stamps with sub-100 nm features. in Proceedings of the First International Conference on Nanoimprint Nanoprint Technology. Naval Research Laboratory, San Francisco, pp. 87-88, 1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 , San Francisco, United States, 11/12/02.

TY - CHAP

T1 - Technology of nanoimprint stamps with sub-100 nm features

AU - Maximov, I.

AU - Carlberg, P.

AU - Beck, M.

AU - Sarwe, E.L.

AU - Montelius, L.

AU - Seekamp, J.

AU - Zankovych, S.

AU - Scheer, H.C.

AU - Sotomayor Torres, C.M.

AU - Cardinaud, Ch.

AU - Pfeiffer, K.

AU - Reuther, F.

AU - Fink, M.

AU - Grueztner, G.

AU - Haatainen, Tomi

AU - Salmi, Jorma

AU - Ahopelto, Jouni

PY - 2002

Y1 - 2002

KW - Nanoimprint Lithography

M3 - Conference abstract in proceedings

SP - 87

EP - 88

BT - Proceedings of the First International Conference on Nanoimprint Nanoprint Technology

PB - Naval Research Laboratory

CY - San Francisco

T2 - 1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02

Y2 - 11 December 2002 through 13 December 2002

ER -