Skip to main navigation
Skip to search
Skip to main content
VTT's Research Information Portal Home
Search content at VTT's Research Information Portal
Home
Profiles
Research output
Projects
Datasets
Research units
Research Infrastructures
Activities
Prizes
Press/Media
Impacts
Temperature compensated beam resonator
Antti Jaakkola (Inventor)
,
Panu Pekko
(Inventor)
, Mika Prunnila (Inventor)
,
Tuomas Pensala
(Inventor)
Research output
:
Patent
›
Patent
Overview
Fingerprint
Fingerprint
Dive into the research topics of 'Temperature compensated beam resonator'. Together they form a unique fingerprint.
Sort by
Weight
Alphabetically
Keyphrases
Resonator
100%
Beam Resonators
100%
Temperature Compensated
100%
Support Structure
66%
Patent Family
66%
Doping Concentration
66%
Resonant Mode
66%
Actuation
33%
Flexural Resonances
33%
Flexural-torsional
33%
Temperature-stable
33%
Micromechanical Resonator
33%
Doping Agents
33%
Semiconductor Wafer
33%
Stable Resonator
33%
Torsional Mode
33%
Cm(III)
33%
N-type Doping
33%
INIS
beams
100%
resonators
100%
concentration
33%
patents
33%
resonance
33%
devices
16%
doped materials
16%
length
16%
semiconductor materials
16%
inventions
16%
Material Science
Resonator
100%
Doping Concentration
33%