Abstract
The invention concerns microelectromechanical resonators. In particular, the invention provides a resonator comprising a support structure, a doped semiconductor resonator suspended to the support structure by at least one anchor, and actuator for exciting resonance into the resonator. According to the invention, the resonator comprises a base portion and at least one protrusion extending outward from the base portion and is excitable by said actuator into a compound resonance mode having temperature coefficient of frequency (TCF) characteristics, which are contributed by both the base portion and the at least one protrusion. The invention enables simple resonators, which are very well temperature compensated over a wide temperature range.
Patent family as of 18.11.2021
CN107408933 A 20171128 CN201580064158 20151002
CN107408933 B 20201120 CN201580064158 20151002
DE602015052324 D1 20200528 DE201560052324T 20151002
EP3202034 A1 20170809 EP20150780912 20151002
EP3202034 B1 20200506 EP20150780912 20151002
JP2017531947 T2 20171026 JP20170517780T 20151002
JP6615191 B2 20191204 JP20170517780T 20151002
US2016099702 AA 20160407 US20150874514 20151005
US9991869 BB 20180605 US20150874514 20151005
WO16051023 A1 20160407 WO2015FI50658 20151002
Patent family as of 18.11.2021
CN107408933 A 20171128 CN201580064158 20151002
CN107408933 B 20201120 CN201580064158 20151002
DE602015052324 D1 20200528 DE201560052324T 20151002
EP3202034 A1 20170809 EP20150780912 20151002
EP3202034 B1 20200506 EP20150780912 20151002
JP2017531947 T2 20171026 JP20170517780T 20151002
JP6615191 B2 20191204 JP20170517780T 20151002
US2016099702 AA 20160407 US20150874514 20151005
US9991869 BB 20180605 US20150874514 20151005
WO16051023 A1 20160407 WO2015FI50658 20151002
Link to current patent family on right
| Original language | English |
|---|---|
| Patent number | EP3202034 |
| IPC | H03H 9/ 02 A I |
| Priority date | 2/10/15 |
| Publication status | Published - 9 Aug 2017 |
| MoE publication type | H1 Granted patent |