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Temperature compensated compound resonator
Antti Jaakkola (Inventor)
,
Panu Pekko
(Inventor)
,
Mika Prunnila
(Inventor)
,
Tuomas Pensala
(Inventor)
Research output
:
Patent
›
Patent
Overview
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Keyphrases
Actuator
33%
Doped Semiconductor
16%
Frequency Characteristics
16%
Microelectromechanical Resonators
16%
Patent Family
33%
Protrusion
33%
Resonant Mode
16%
Resonator
100%
Support Structure
33%
Temperature Coefficient of Frequency
16%
Temperature Compensated
100%
Well Temperature
16%
Wide Temperature Range
16%
INIS
actuators
28%
anchors
14%
doped materials
14%
inventions
57%
patents
28%
resonance
28%
resonators
100%
semiconductor materials
14%
temperature coefficient
14%
temperature range
14%
well temperature
14%
Material Science
Actuator
28%
Resonator
100%