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Temperature compensated plate resonator
Antti Jaakkola (Inventor)
,
Panu Pekko
(Inventor)
, Mika Prunnila (Inventor)
,
Tuomas Pensala
(Inventor)
Research output
:
Patent
›
Patent
Overview
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Keyphrases
Resonator
100%
Plate Resonator
100%
Temperature Compensated
100%
Doping Concentration
75%
Resonant Mode
75%
Support Structure
50%
Patent Family
50%
Actuator
25%
Semiconductors
25%
Practical Implementation
25%
Temperature Coefficient of Frequency
25%
Doping Agents
25%
TCF2
25%
Cm(III)
25%
Microelectromechanical Resonators
25%
INIS
plates
100%
resonators
100%
width
50%
concentration
50%
resonance
50%
doped materials
33%
patents
33%
inventions
33%
implementation
16%
devices
16%
shape
16%
actuators
16%
semiconductor materials
16%
temperature coefficient
16%
anchors
16%
Material Science
Resonator
100%
Actuator
16%