Temperature compensated resonance modes of degenerately n-doped silicon MEMS resonators

Antti Jaakkola, Mika Prunnila, Tuomas Pensala

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    16 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Temperature compensated resonance modes of degenerately n-doped silicon MEMS resonators'. Together they form a unique fingerprint.

    Engineering

    Physics

    Biochemistry, Genetics and Molecular Biology

    Chemistry

    Material Science