Temperature dependence of the mechanical properties of ALD TiO2 from TiCl4 and H2O on silicon

Oili Ylivaara (Corresponding author), Xuwen Liu, Lauri Kilpi, Dieter Schneider, Mikko Laitinen, Jaakko Julin, Saima Ali, Sakari Sintonen, Eero Haimi, Timo Sajavaara, Harri Lipsanen, Helena Ronkainen, Simo-Pekka Hannula, Riikka L. Puurunen

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationBALD2014 Abstract book
    Publication statusPublished - 2014
    Event12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014 - Helsinki, Finland
    Duration: 12 May 201413 May 2014
    Conference number: 12
    http://www.aldcoe.fi/bald2014/program.pdf (Program)
    http://www.aldcoe.fi/bald2014/posters.pdf (Posters)

    Conference

    Conference12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014
    Abbreviated titleBaltic ALD 2014
    CountryFinland
    CityHelsinki
    Period12/05/1413/05/14
    OtherAbstracts reviewed and published.
    Internet address

    Cite this

    Ylivaara, O., Liu, X., Kilpi, L., Schneider, D., Laitinen, M., Julin, J., ... Puurunen, R. L. (2014). Temperature dependence of the mechanical properties of ALD TiO2 from TiCl4 and H2O on silicon. In BALD2014 Abstract book
    Ylivaara, Oili ; Liu, Xuwen ; Kilpi, Lauri ; Schneider, Dieter ; Laitinen, Mikko ; Julin, Jaakko ; Ali, Saima ; Sintonen, Sakari ; Haimi, Eero ; Sajavaara, Timo ; Lipsanen, Harri ; Ronkainen, Helena ; Hannula, Simo-Pekka ; Puurunen, Riikka L. / Temperature dependence of the mechanical properties of ALD TiO2 from TiCl4 and H2O on silicon. BALD2014 Abstract book. 2014.
    @inbook{3aacea1277f242b784ea533d2da23c40,
    title = "Temperature dependence of the mechanical properties of ALD TiO2 from TiCl4 and H2O on silicon",
    author = "Oili Ylivaara and Xuwen Liu and Lauri Kilpi and Dieter Schneider and Mikko Laitinen and Jaakko Julin and Saima Ali and Sakari Sintonen and Eero Haimi and Timo Sajavaara and Harri Lipsanen and Helena Ronkainen and Simo-Pekka Hannula and Puurunen, {Riikka L.}",
    note = "Published abstract of a oral presentation Project 74717 MECHALD",
    year = "2014",
    language = "English",
    booktitle = "BALD2014 Abstract book",

    }

    Ylivaara, O, Liu, X, Kilpi, L, Schneider, D, Laitinen, M, Julin, J, Ali, S, Sintonen, S, Haimi, E, Sajavaara, T, Lipsanen, H, Ronkainen, H, Hannula, S-P & Puurunen, RL 2014, Temperature dependence of the mechanical properties of ALD TiO2 from TiCl4 and H2O on silicon. in BALD2014 Abstract book. 12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014, Helsinki, Finland, 12/05/14.

    Temperature dependence of the mechanical properties of ALD TiO2 from TiCl4 and H2O on silicon. / Ylivaara, Oili (Corresponding author); Liu, Xuwen; Kilpi, Lauri; Schneider, Dieter; Laitinen, Mikko; Julin, Jaakko; Ali, Saima; Sintonen, Sakari; Haimi, Eero; Sajavaara, Timo; Lipsanen, Harri; Ronkainen, Helena; Hannula, Simo-Pekka; Puurunen, Riikka L.

    BALD2014 Abstract book. 2014.

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    TY - CHAP

    T1 - Temperature dependence of the mechanical properties of ALD TiO2 from TiCl4 and H2O on silicon

    AU - Ylivaara, Oili

    AU - Liu, Xuwen

    AU - Kilpi, Lauri

    AU - Schneider, Dieter

    AU - Laitinen, Mikko

    AU - Julin, Jaakko

    AU - Ali, Saima

    AU - Sintonen, Sakari

    AU - Haimi, Eero

    AU - Sajavaara, Timo

    AU - Lipsanen, Harri

    AU - Ronkainen, Helena

    AU - Hannula, Simo-Pekka

    AU - Puurunen, Riikka L.

    N1 - Published abstract of a oral presentation Project 74717 MECHALD

    PY - 2014

    Y1 - 2014

    M3 - Conference abstract in proceedings

    BT - BALD2014 Abstract book

    ER -

    Ylivaara O, Liu X, Kilpi L, Schneider D, Laitinen M, Julin J et al. Temperature dependence of the mechanical properties of ALD TiO2 from TiCl4 and H2O on silicon. In BALD2014 Abstract book. 2014