Temperature dependence of the mechanical properties of ALD TiO2 from TiCl4 and H2O on silicon

Oili Ylivaara (Corresponding author), Xuwen Liu, Lauri Kilpi, Dieter Schneider, Mikko Laitinen, Jaakko Julin, Saima Ali, Sakari Sintonen, Eero Haimi, Timo Sajavaara, Harri Lipsanen, Helena Ronkainen, Simo-Pekka Hannula, Riikka L. Puurunen

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationBALD2014 Abstract book
    Publication statusPublished - 2014
    Event12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014 - Helsinki, Finland
    Duration: 12 May 201413 May 2014
    Conference number: 12
    http://www.aldcoe.fi/bald2014/program.pdf (Program)
    http://www.aldcoe.fi/bald2014/posters.pdf (Posters)

    Conference

    Conference12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014
    Abbreviated titleBaltic ALD 2014
    CountryFinland
    CityHelsinki
    Period12/05/1413/05/14
    OtherAbstracts reviewed and published.
    Internet address

    Cite this

    Ylivaara, O., Liu, X., Kilpi, L., Schneider, D., Laitinen, M., Julin, J., Ali, S., Sintonen, S., Haimi, E., Sajavaara, T., Lipsanen, H., Ronkainen, H., Hannula, S-P., & Puurunen, R. L. (2014). Temperature dependence of the mechanical properties of ALD TiO2 from TiCl4 and H2O on silicon. In BALD2014 Abstract book