Temperature dependence of the mechanical properties of ALD TiO2 from TiCl4 and H2O on silicon

Oili Ylivaara (Corresponding author), Xuwen Liu, Lauri Kilpi, Dieter Schneider, Mikko Laitinen, Jaakko Julin, Saima Ali, Sakari Sintonen, Eero Haimi, Timo Sajavaara, Harri Lipsanen, Helena Ronkainen, Simo-Pekka Hannula, Riikka L. Puurunen

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Original languageEnglish
Title of host publicationBALD2014 Abstract book
Publication statusPublished - 2014
Event12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014 - Helsinki, Finland
Duration: 12 May 201413 May 2014
Conference number: 12
http://www.aldcoe.fi/bald2014/program.pdf (Program)
http://www.aldcoe.fi/bald2014/posters.pdf (Posters)

Conference

Conference12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014
Abbreviated titleBaltic ALD 2014
CountryFinland
CityHelsinki
Period12/05/1413/05/14
OtherAbstracts reviewed and published.
Internet address

Cite this

Ylivaara, O., Liu, X., Kilpi, L., Schneider, D., Laitinen, M., Julin, J., ... Puurunen, R. L. (2014). Temperature dependence of the mechanical properties of ALD TiO2 from TiCl4 and H2O on silicon. In BALD2014 Abstract book
Ylivaara, Oili ; Liu, Xuwen ; Kilpi, Lauri ; Schneider, Dieter ; Laitinen, Mikko ; Julin, Jaakko ; Ali, Saima ; Sintonen, Sakari ; Haimi, Eero ; Sajavaara, Timo ; Lipsanen, Harri ; Ronkainen, Helena ; Hannula, Simo-Pekka ; Puurunen, Riikka L. / Temperature dependence of the mechanical properties of ALD TiO2 from TiCl4 and H2O on silicon. BALD2014 Abstract book. 2014.
@inbook{3aacea1277f242b784ea533d2da23c40,
title = "Temperature dependence of the mechanical properties of ALD TiO2 from TiCl4 and H2O on silicon",
author = "Oili Ylivaara and Xuwen Liu and Lauri Kilpi and Dieter Schneider and Mikko Laitinen and Jaakko Julin and Saima Ali and Sakari Sintonen and Eero Haimi and Timo Sajavaara and Harri Lipsanen and Helena Ronkainen and Simo-Pekka Hannula and Puurunen, {Riikka L.}",
note = "Published abstract of a oral presentation Project 74717 MECHALD",
year = "2014",
language = "English",
booktitle = "BALD2014 Abstract book",

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Ylivaara, O, Liu, X, Kilpi, L, Schneider, D, Laitinen, M, Julin, J, Ali, S, Sintonen, S, Haimi, E, Sajavaara, T, Lipsanen, H, Ronkainen, H, Hannula, S-P & Puurunen, RL 2014, Temperature dependence of the mechanical properties of ALD TiO2 from TiCl4 and H2O on silicon. in BALD2014 Abstract book. 12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014, Helsinki, Finland, 12/05/14.

Temperature dependence of the mechanical properties of ALD TiO2 from TiCl4 and H2O on silicon. / Ylivaara, Oili (Corresponding author); Liu, Xuwen; Kilpi, Lauri; Schneider, Dieter; Laitinen, Mikko; Julin, Jaakko; Ali, Saima; Sintonen, Sakari; Haimi, Eero; Sajavaara, Timo; Lipsanen, Harri; Ronkainen, Helena; Hannula, Simo-Pekka; Puurunen, Riikka L.

BALD2014 Abstract book. 2014.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

TY - CHAP

T1 - Temperature dependence of the mechanical properties of ALD TiO2 from TiCl4 and H2O on silicon

AU - Ylivaara, Oili

AU - Liu, Xuwen

AU - Kilpi, Lauri

AU - Schneider, Dieter

AU - Laitinen, Mikko

AU - Julin, Jaakko

AU - Ali, Saima

AU - Sintonen, Sakari

AU - Haimi, Eero

AU - Sajavaara, Timo

AU - Lipsanen, Harri

AU - Ronkainen, Helena

AU - Hannula, Simo-Pekka

AU - Puurunen, Riikka L.

N1 - Published abstract of a oral presentation Project 74717 MECHALD

PY - 2014

Y1 - 2014

M3 - Conference abstract in proceedings

BT - BALD2014 Abstract book

ER -

Ylivaara O, Liu X, Kilpi L, Schneider D, Laitinen M, Julin J et al. Temperature dependence of the mechanical properties of ALD TiO2 from TiCl4 and H2O on silicon. In BALD2014 Abstract book. 2014