Temperature dependence of the mechanical properties of ALD TiO2 from TiCl4 and H2O on silicon

Oili Ylivaara; Xuwen Liu; Lauri Kilpi; Dieter Schneider; Mikko Laitinen; Jaakko Julin; Saima Ali; Sakari Sintonen; Eero Haimi; Timo Sajavaara; Harri Lipsanen; Helena Ronkainen; Simo-Pekka Hannula; Riikka L. Puurunen

Temperature dependence of the mechanical properties of ALD TiO₂ from TiCl₄ and H₂O on silicon

Oili Ylivaara^*, Xuwen Liu, Lauri Kilpi, Dieter Schneider, Mikko Laitinen, Jaakko Julin, Saima Ali, Sakari Sintonen, Eero Haimi, Timo Sajavaara, Harri Lipsanen, Helena Ronkainen, Simo-Pekka Hannula, Riikka L. Puurunen

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	BALD2014 Abstract book
Publication status	Published - 2014
MoE publication type	Not Eligible
Event	12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014 - Helsinki, Finland Duration: 12 May 2014 → 13 May 2014 Conference number: 12 http://www.aldcoe.fi/bald2014/program.pdf (Program) http://www.aldcoe.fi/bald2014/posters.pdf (Posters)

Conference

Conference	12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014
Abbreviated title	Baltic ALD 2014
Country/Territory	Finland
City	Helsinki
Period	12/05/14 → 13/05/14
Other	Abstracts reviewed and published.
Internet address	http://www.aldcoe.fi/bald2014/program.pdf (Program) http://www.aldcoe.fi/bald2014/posters.pdf (Posters)

Cite this

@inbook{3aacea1277f242b784ea533d2da23c40,

title = "Temperature dependence of the mechanical properties of ALD TiO2 from TiCl4 and H2O on silicon",

author = "Oili Ylivaara and Xuwen Liu and Lauri Kilpi and Dieter Schneider and Mikko Laitinen and Jaakko Julin and Saima Ali and Sakari Sintonen and Eero Haimi and Timo Sajavaara and Harri Lipsanen and Helena Ronkainen and Simo-Pekka Hannula and Puurunen, \{Riikka L.\}",

note = "Published abstract of a oral presentation Project 74717 MECHALD; 12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014, Baltic ALD 2014 ; Conference date: 12-05-2014 Through 13-05-2014",

year = "2014",

language = "English",

booktitle = "BALD2014 Abstract book",

url = "http://www.aldcoe.fi/bald2014/program.pdf, http://www.aldcoe.fi/bald2014/posters.pdf",

}

Ylivaara, O, Liu, X, Kilpi, L, Schneider, D, Laitinen, M, Julin, J, Ali, S, Sintonen, S, Haimi, E, Sajavaara, T, Lipsanen, H, Ronkainen, H, Hannula, S-P & Puurunen, RL 2014, Temperature dependence of the mechanical properties of ALD TiO₂ from TiCl₄ and H₂O on silicon. in BALD2014 Abstract book. 12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014, Helsinki, Finland, 12/05/14.

TY - CHAP

T1 - Temperature dependence of the mechanical properties of ALD TiO2 from TiCl4 and H2O on silicon

AU - Ylivaara, Oili

AU - Liu, Xuwen

AU - Kilpi, Lauri

AU - Schneider, Dieter

AU - Laitinen, Mikko

AU - Julin, Jaakko

AU - Ali, Saima

AU - Sintonen, Sakari

AU - Haimi, Eero

AU - Sajavaara, Timo

AU - Lipsanen, Harri

AU - Ronkainen, Helena

AU - Hannula, Simo-Pekka

AU - Puurunen, Riikka L.

N1 - Conference code: 12

PY - 2014

Y1 - 2014

M3 - Conference abstract in proceedings

BT - BALD2014 Abstract book

T2 - 12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014

Y2 - 12 May 2014 through 13 May 2014

ER -