Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator

M. Koskenvuori, Ville Kaajakari, Tomi Mattila, I. Tittonen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    20 Citations (Scopus)
    Original languageEnglish
    Title of host publicationProceedings of the IEEE 21st International Conference on Micro Electro Mechanical Systems, MEMSYS 2008
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages78-81
    ISBN (Print)978-1-4244-1792-6, 978-1-4244-1793-3
    DOIs
    Publication statusPublished - 2008
    MoE publication typeA4 Article in a conference publication
    EventIEEE 21st International Conference on Micro Electro Mechanical Systems, MEMSYS 2008 - Wuhan, China
    Duration: 13 Jan 200817 Jan 2008

    Conference

    ConferenceIEEE 21st International Conference on Micro Electro Mechanical Systems, MEMSYS 2008
    Abbreviated titleMEMSYS 2008
    Country/TerritoryChina
    CityWuhan
    Period13/01/0817/01/08

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