Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator

M. Koskenvuori, Ville Kaajakari, Tomi Mattila, I. Tittonen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

20 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings of the IEEE 21st International Conference on Micro Electro Mechanical Systems, MEMSYS 2008
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages78-81
ISBN (Print)978-1-4244-1792-6, 978-1-4244-1793-3
DOIs
Publication statusPublished - 2008
MoE publication typeA4 Article in a conference publication
EventIEEE 21st International Conference on Micro Electro Mechanical Systems, MEMSYS 2008 - Wuhan, China
Duration: 13 Jan 200817 Jan 2008

Conference

ConferenceIEEE 21st International Conference on Micro Electro Mechanical Systems, MEMSYS 2008
Abbreviated titleMEMSYS 2008
CountryChina
CityWuhan
Period13/01/0817/01/08

Cite this

Koskenvuori, M., Kaajakari, V., Mattila, T., & Tittonen, I. (2008). Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator. In Proceedings of the IEEE 21st International Conference on Micro Electro Mechanical Systems, MEMSYS 2008 (pp. 78-81). IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/MEMSYS.2008.4443597