Temperature Stability of Electrode/AlScN Multilayer Systems for pMUT Process Integration

Kristina Bespalova, Glenn Ross, Mervi Paulasto-Kröckel, T.S. Abhilash, Cyril Karuthedath, Stefan Mertin, Tuomas Pensala

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Temperature Stability of Electrode/AlScN Multilayer Systems for pMUT Process Integration'. Together they form a unique fingerprint.

Keyphrases

INIS

Engineering

Material Science