The effect of ion beam mixing on SIMS depth resolution

Jari Likonen, Mikko Hautala, Ilkka Koponen

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12 Citations (Scopus)

Abstract

We have studied the mixing of a bilayer sample interface. The AuPt bilayer was sectioned in a SIMS apparatus in order to gain information on the influence of atomic mixing on depth resolution. Experiments were performed with Ar+ sputter ions at energy 5 keV, bombarding at an angle of 48°.
The experimental decay length which characterizes the exponential falloff is 21 A. Collisional mixing and thermal spike mixing have been calculated with no free parameters. The decay lengths from collisional and spike mixing in this case study are 9.5 and 25 Å, respectively.
Collisional mixing thus gives a lower and the simple thermal spike model an upper limit for the broadening.
Original languageEnglish
Pages (from-to)149-152
JournalNuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume64
Issue number1-4
DOIs
Publication statusPublished - 1992
MoE publication typeA1 Journal article-refereed

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Secondary ion mass spectrometry
Ion beams
secondary ion mass spectrometry
ion beams
spikes
decay
Ions
ions
Experiments

Cite this

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title = "The effect of ion beam mixing on SIMS depth resolution",
abstract = "We have studied the mixing of a bilayer sample interface. The AuPt bilayer was sectioned in a SIMS apparatus in order to gain information on the influence of atomic mixing on depth resolution. Experiments were performed with Ar+ sputter ions at energy 5 keV, bombarding at an angle of 48°. The experimental decay length which characterizes the exponential falloff is 21 A. Collisional mixing and thermal spike mixing have been calculated with no free parameters. The decay lengths from collisional and spike mixing in this case study are 9.5 and 25 {\AA}, respectively. Collisional mixing thus gives a lower and the simple thermal spike model an upper limit for the broadening.",
author = "Jari Likonen and Mikko Hautala and Ilkka Koponen",
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The effect of ion beam mixing on SIMS depth resolution. / Likonen, Jari; Hautala, Mikko; Koponen, Ilkka.

In: Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vol. 64, No. 1-4, 1992, p. 149-152.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - The effect of ion beam mixing on SIMS depth resolution

AU - Likonen, Jari

AU - Hautala, Mikko

AU - Koponen, Ilkka

N1 - Project code: REA2522

PY - 1992

Y1 - 1992

N2 - We have studied the mixing of a bilayer sample interface. The AuPt bilayer was sectioned in a SIMS apparatus in order to gain information on the influence of atomic mixing on depth resolution. Experiments were performed with Ar+ sputter ions at energy 5 keV, bombarding at an angle of 48°. The experimental decay length which characterizes the exponential falloff is 21 A. Collisional mixing and thermal spike mixing have been calculated with no free parameters. The decay lengths from collisional and spike mixing in this case study are 9.5 and 25 Å, respectively. Collisional mixing thus gives a lower and the simple thermal spike model an upper limit for the broadening.

AB - We have studied the mixing of a bilayer sample interface. The AuPt bilayer was sectioned in a SIMS apparatus in order to gain information on the influence of atomic mixing on depth resolution. Experiments were performed with Ar+ sputter ions at energy 5 keV, bombarding at an angle of 48°. The experimental decay length which characterizes the exponential falloff is 21 A. Collisional mixing and thermal spike mixing have been calculated with no free parameters. The decay lengths from collisional and spike mixing in this case study are 9.5 and 25 Å, respectively. Collisional mixing thus gives a lower and the simple thermal spike model an upper limit for the broadening.

U2 - 10.1016/0168-583X(92)95455-Z

DO - 10.1016/0168-583X(92)95455-Z

M3 - Article

VL - 64

SP - 149

EP - 152

JO - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

IS - 1-4

ER -