The effect of ion beam mixing on SIMS depth resolution

Jari Likonen, Mikko Hautala, Ilkka Koponen

    Research output: Contribution to journalArticleScientificpeer-review

    12 Citations (Scopus)

    Abstract

    We have studied the mixing of a bilayer sample interface. The AuPt bilayer was sectioned in a SIMS apparatus in order to gain information on the influence of atomic mixing on depth resolution. Experiments were performed with Ar+ sputter ions at energy 5 keV, bombarding at an angle of 48°.
    The experimental decay length which characterizes the exponential falloff is 21 A. Collisional mixing and thermal spike mixing have been calculated with no free parameters. The decay lengths from collisional and spike mixing in this case study are 9.5 and 25 Å, respectively.
    Collisional mixing thus gives a lower and the simple thermal spike model an upper limit for the broadening.
    Original languageEnglish
    Pages (from-to)149-152
    JournalNuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Volume64
    Issue number1-4
    DOIs
    Publication statusPublished - 1992
    MoE publication typeA1 Journal article-refereed

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    Secondary ion mass spectrometry
    Ion beams
    secondary ion mass spectrometry
    ion beams
    spikes
    decay
    Ions
    ions
    Experiments

    Cite this

    @article{528e252716e4485c9fc171cbb44326ab,
    title = "The effect of ion beam mixing on SIMS depth resolution",
    abstract = "We have studied the mixing of a bilayer sample interface. The AuPt bilayer was sectioned in a SIMS apparatus in order to gain information on the influence of atomic mixing on depth resolution. Experiments were performed with Ar+ sputter ions at energy 5 keV, bombarding at an angle of 48°. The experimental decay length which characterizes the exponential falloff is 21 A. Collisional mixing and thermal spike mixing have been calculated with no free parameters. The decay lengths from collisional and spike mixing in this case study are 9.5 and 25 {\AA}, respectively. Collisional mixing thus gives a lower and the simple thermal spike model an upper limit for the broadening.",
    author = "Jari Likonen and Mikko Hautala and Ilkka Koponen",
    note = "Project code: REA2522",
    year = "1992",
    doi = "10.1016/0168-583X(92)95455-Z",
    language = "English",
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    pages = "149--152",
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    publisher = "Elsevier",
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    The effect of ion beam mixing on SIMS depth resolution. / Likonen, Jari; Hautala, Mikko; Koponen, Ilkka.

    In: Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vol. 64, No. 1-4, 1992, p. 149-152.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - The effect of ion beam mixing on SIMS depth resolution

    AU - Likonen, Jari

    AU - Hautala, Mikko

    AU - Koponen, Ilkka

    N1 - Project code: REA2522

    PY - 1992

    Y1 - 1992

    N2 - We have studied the mixing of a bilayer sample interface. The AuPt bilayer was sectioned in a SIMS apparatus in order to gain information on the influence of atomic mixing on depth resolution. Experiments were performed with Ar+ sputter ions at energy 5 keV, bombarding at an angle of 48°. The experimental decay length which characterizes the exponential falloff is 21 A. Collisional mixing and thermal spike mixing have been calculated with no free parameters. The decay lengths from collisional and spike mixing in this case study are 9.5 and 25 Å, respectively. Collisional mixing thus gives a lower and the simple thermal spike model an upper limit for the broadening.

    AB - We have studied the mixing of a bilayer sample interface. The AuPt bilayer was sectioned in a SIMS apparatus in order to gain information on the influence of atomic mixing on depth resolution. Experiments were performed with Ar+ sputter ions at energy 5 keV, bombarding at an angle of 48°. The experimental decay length which characterizes the exponential falloff is 21 A. Collisional mixing and thermal spike mixing have been calculated with no free parameters. The decay lengths from collisional and spike mixing in this case study are 9.5 and 25 Å, respectively. Collisional mixing thus gives a lower and the simple thermal spike model an upper limit for the broadening.

    U2 - 10.1016/0168-583X(92)95455-Z

    DO - 10.1016/0168-583X(92)95455-Z

    M3 - Article

    VL - 64

    SP - 149

    EP - 152

    JO - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

    JF - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

    SN - 0168-583X

    IS - 1-4

    ER -