Abstract
We have studied the mixing of a bilayer sample interface. The AuPt bilayer was sectioned in a SIMS apparatus in order to gain information on the influence of atomic mixing on depth resolution. Experiments were performed with Ar+ sputter ions at energy 5 keV, bombarding at an angle of 48°.
The experimental decay length which characterizes the exponential falloff is 21 A. Collisional mixing and thermal spike mixing have been calculated with no free parameters. The decay lengths from collisional and spike mixing in this case study are 9.5 and 25 Å, respectively.
Collisional mixing thus gives a lower and the simple thermal spike model an upper limit for the broadening.
The experimental decay length which characterizes the exponential falloff is 21 A. Collisional mixing and thermal spike mixing have been calculated with no free parameters. The decay lengths from collisional and spike mixing in this case study are 9.5 and 25 Å, respectively.
Collisional mixing thus gives a lower and the simple thermal spike model an upper limit for the broadening.
| Original language | English |
|---|---|
| Pages (from-to) | 149-152 |
| Journal | Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms |
| Volume | 64 |
| Issue number | 1-4 |
| DOIs | |
| Publication status | Published - 1992 |
| MoE publication type | A1 Journal article-refereed |