Sputtering of Cu targets by 5 keV Ar ions has been studied by the binary collision lattice simulation code COSIPO. The sensitivity of the angular distributions of sputtered atoms on the near-surface structure is demonstrated by having a thin monorandom layer on a random/monocrystalline Cu target. Just two monolayers nearly destroy the angular distributions due to the underlying structure.
|Journal||Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms|
|Publication status||Published - 1988|
|MoE publication type||A1 Journal article-refereed|