The effect of near-surface structure on sputtering of Cu atoms by Ar ions

Mikko Hautala, Jari Likonen

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    Sputtering of Cu targets by 5 keV Ar ions has been studied by the binary collision lattice simulation code COSIPO. The sensitivity of the angular distributions of sputtered atoms on the near-surface structure is demonstrated by having a thin monorandom layer on a random/monocrystalline Cu target. Just two monolayers nearly destroy the angular distributions due to the underlying structure.
    Original languageEnglish
    Pages (from-to)526-529
    JournalNuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Issue number1-4
    Publication statusPublished - 1988
    MoE publication typeA1 Journal article-refereed


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