The effect of near-surface structure on sputtering of Cu atoms by Ar ions

Mikko Hautala, Jari Likonen

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)

Abstract

Sputtering of Cu targets by 5 keV Ar ions has been studied by the binary collision lattice simulation code COSIPO. The sensitivity of the angular distributions of sputtered atoms on the near-surface structure is demonstrated by having a thin monorandom layer on a random/monocrystalline Cu target. Just two monolayers nearly destroy the angular distributions due to the underlying structure.
Original languageEnglish
Pages (from-to)526-529
JournalNuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume33
Issue number1-4
DOIs
Publication statusPublished - 1988
MoE publication typeA1 Journal article-refereed

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Angular distribution
Surface structure
Sputtering
angular distribution
sputtering
Atoms
Ions
atoms
Monolayers
ions
collisions
sensitivity
simulation

Cite this

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title = "The effect of near-surface structure on sputtering of Cu atoms by Ar ions",
abstract = "Sputtering of Cu targets by 5 keV Ar ions has been studied by the binary collision lattice simulation code COSIPO. The sensitivity of the angular distributions of sputtered atoms on the near-surface structure is demonstrated by having a thin monorandom layer on a random/monocrystalline Cu target. Just two monolayers nearly destroy the angular distributions due to the underlying structure.",
author = "Mikko Hautala and Jari Likonen",
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The effect of near-surface structure on sputtering of Cu atoms by Ar ions. / Hautala, Mikko; Likonen, Jari.

In: Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vol. 33, No. 1-4, 1988, p. 526-529.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - The effect of near-surface structure on sputtering of Cu atoms by Ar ions

AU - Hautala, Mikko

AU - Likonen, Jari

PY - 1988

Y1 - 1988

N2 - Sputtering of Cu targets by 5 keV Ar ions has been studied by the binary collision lattice simulation code COSIPO. The sensitivity of the angular distributions of sputtered atoms on the near-surface structure is demonstrated by having a thin monorandom layer on a random/monocrystalline Cu target. Just two monolayers nearly destroy the angular distributions due to the underlying structure.

AB - Sputtering of Cu targets by 5 keV Ar ions has been studied by the binary collision lattice simulation code COSIPO. The sensitivity of the angular distributions of sputtered atoms on the near-surface structure is demonstrated by having a thin monorandom layer on a random/monocrystalline Cu target. Just two monolayers nearly destroy the angular distributions due to the underlying structure.

U2 - 10.1016/0168-583X(88)90622-2

DO - 10.1016/0168-583X(88)90622-2

M3 - Article

VL - 33

SP - 526

EP - 529

JO - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

IS - 1-4

ER -