The effect of near-surface structure on sputtering of Cu atoms by Ar ions

Mikko Hautala; Jari Likonen

doi:10.1016/0168-583X(88)90622-2

The effect of near-surface structure on sputtering of Cu atoms by Ar ions

Mikko Hautala
, Jari Likonen

University of Helsinki

Research output: Contribution to journal › Article › Scientific › peer-review

4 Citations (Scopus)

Abstract

Sputtering of Cu targets by 5 keV Ar ions has been studied by the binary collision lattice simulation code COSIPO. The sensitivity of the angular distributions of sputtered atoms on the near-surface structure is demonstrated by having a thin monorandom layer on a random/monocrystalline Cu target. Just two monolayers nearly destroy the angular distributions due to the underlying structure.

Original language	English
Pages (from-to)	526-529
Journal	Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	33
Issue number	1-4
DOIs	https://doi.org/10.1016/0168-583X(88)90622-2
Publication status	Published - 1988
MoE publication type	A1 Journal article-refereed

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10.1016/0168-583X(88)90622-2

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title = "The effect of near-surface structure on sputtering of Cu atoms by Ar ions",

abstract = "Sputtering of Cu targets by 5 keV Ar ions has been studied by the binary collision lattice simulation code COSIPO. The sensitivity of the angular distributions of sputtered atoms on the near-surface structure is demonstrated by having a thin monorandom layer on a random/monocrystalline Cu target. Just two monolayers nearly destroy the angular distributions due to the underlying structure.",

author = "Mikko Hautala and Jari Likonen",

year = "1988",

doi = "10.1016/0168-583X(88)90622-2",

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pages = "526--529",

journal = "Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",

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number = "1-4",

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T1 - The effect of near-surface structure on sputtering of Cu atoms by Ar ions

AU - Hautala, Mikko

AU - Likonen, Jari

PY - 1988

Y1 - 1988

N2 - Sputtering of Cu targets by 5 keV Ar ions has been studied by the binary collision lattice simulation code COSIPO. The sensitivity of the angular distributions of sputtered atoms on the near-surface structure is demonstrated by having a thin monorandom layer on a random/monocrystalline Cu target. Just two monolayers nearly destroy the angular distributions due to the underlying structure.

AB - Sputtering of Cu targets by 5 keV Ar ions has been studied by the binary collision lattice simulation code COSIPO. The sensitivity of the angular distributions of sputtered atoms on the near-surface structure is demonstrated by having a thin monorandom layer on a random/monocrystalline Cu target. Just two monolayers nearly destroy the angular distributions due to the underlying structure.

U2 - 10.1016/0168-583X(88)90622-2

DO - 10.1016/0168-583X(88)90622-2

M3 - Article

SN - 0168-583X

VL - 33

SP - 526

EP - 529

JO - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

IS - 1-4

ER -

The effect of near-surface structure on sputtering of Cu atoms by Ar ions

Abstract

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