The Effect of Surface Passivation for Sub-THz Silicon Gradient Refractive Index Lens

Antti Lamminen; Aleksi Tamminen; Jaakko Saarilahti; Vladimir Ermolov; Pekka Pursula

doi:10.23919/EuMC50147.2022.9784285

The Effect of Surface Passivation for Sub-THz Silicon Gradient Refractive Index Lens

Antti Lamminen^*, Aleksi Tamminen, Jaakko Saarilahti, Vladimir Ermolov, Pekka Pursula

^*Corresponding author for this work

Aalto University

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

4 Citations (Scopus)

Abstract

This paper describes a study of impact of different passivation methods on performance of gradient refractive index (GRIN) lenses. Three different passivation layers on top of lenses are studied: PolySi, PolySi and PECVD silicon oxide (PolySi+SiO2), and PECVD silicon oxide (SiO2). Antenna gains and radiation patterns of fabricated lenses are measured. The study shows that passivation methods have strong impact on silicon GRIN lenses performance. A model with a low-resistivity layer on top of high-resistivity Si can explain observed effects.

Original language	English
Title of host publication	2021 51st European Microwave Conference, EuMC 2021
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	873-876
Number of pages	4
ISBN (Electronic)	978-2-87487-063-7
DOIs	https://doi.org/10.23919/EuMC50147.2022.9784285
Publication status	Published - 2021
MoE publication type	A4 Article in a conference publication
Event	51st European Microwave Conference, EuMC 2021 - London, United Kingdom Duration: 4 Apr 2022 → 6 Apr 2022

Conference

Conference	51st European Microwave Conference, EuMC 2021
Country/Territory	United Kingdom
City	London
Period	4/04/22 → 6/04/22

Keywords

antenna
gradient index
lens
passivation
silicon
THz

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10.23919/EuMC50147.2022.9784285

Cite this

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title = "The Effect of Surface Passivation for Sub-THz Silicon Gradient Refractive Index Lens",

abstract = "This paper describes a study of impact of different passivation methods on performance of gradient refractive index (GRIN) lenses. Three different passivation layers on top of lenses are studied: PolySi, PolySi and PECVD silicon oxide (PolySi+SiO2), and PECVD silicon oxide (SiO2). Antenna gains and radiation patterns of fabricated lenses are measured. The study shows that passivation methods have strong impact on silicon GRIN lenses performance. A model with a low-resistivity layer on top of high-resistivity Si can explain observed effects.",

keywords = "antenna, gradient index, lens, passivation, silicon, THz",

author = "Antti Lamminen and Aleksi Tamminen and Jaakko Saarilahti and Vladimir Ermolov and Pekka Pursula",

note = "Funding Information: ACKNOWLEDGMENT This work was financially supported by the Academy of Finland under grant MilliRAD, number 314541. The authors would like to thank I. Huhtinen for the RF measurements. ; 51st European Microwave Conference, EuMC 2021 ; Conference date: 04-04-2022 Through 06-04-2022",

year = "2021",

doi = "10.23919/EuMC50147.2022.9784285",

language = "English",

pages = "873--876",

booktitle = "2021 51st European Microwave Conference, EuMC 2021",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

}

Lamminen, A, Tamminen, A, Saarilahti, J, Ermolov, V & Pursula, P 2021, The Effect of Surface Passivation for Sub-THz Silicon Gradient Refractive Index Lens. in 2021 51st European Microwave Conference, EuMC 2021. IEEE Institute of Electrical and Electronic Engineers, pp. 873-876, 51st European Microwave Conference, EuMC 2021, London, United Kingdom, 4/04/22. https://doi.org/10.23919/EuMC50147.2022.9784285

The Effect of Surface Passivation for Sub-THz Silicon Gradient Refractive Index Lens. / Lamminen, Antti; Tamminen, Aleksi; Saarilahti, Jaakko et al.
2021 51st European Microwave Conference, EuMC 2021. IEEE Institute of Electrical and Electronic Engineers, 2021. p. 873-876.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - The Effect of Surface Passivation for Sub-THz Silicon Gradient Refractive Index Lens

AU - Lamminen, Antti

AU - Tamminen, Aleksi

AU - Saarilahti, Jaakko

AU - Ermolov, Vladimir

AU - Pursula, Pekka

N1 - Funding Information: ACKNOWLEDGMENT This work was financially supported by the Academy of Finland under grant MilliRAD, number 314541. The authors would like to thank I. Huhtinen for the RF measurements.

PY - 2021

Y1 - 2021

N2 - This paper describes a study of impact of different passivation methods on performance of gradient refractive index (GRIN) lenses. Three different passivation layers on top of lenses are studied: PolySi, PolySi and PECVD silicon oxide (PolySi+SiO2), and PECVD silicon oxide (SiO2). Antenna gains and radiation patterns of fabricated lenses are measured. The study shows that passivation methods have strong impact on silicon GRIN lenses performance. A model with a low-resistivity layer on top of high-resistivity Si can explain observed effects.

AB - This paper describes a study of impact of different passivation methods on performance of gradient refractive index (GRIN) lenses. Three different passivation layers on top of lenses are studied: PolySi, PolySi and PECVD silicon oxide (PolySi+SiO2), and PECVD silicon oxide (SiO2). Antenna gains and radiation patterns of fabricated lenses are measured. The study shows that passivation methods have strong impact on silicon GRIN lenses performance. A model with a low-resistivity layer on top of high-resistivity Si can explain observed effects.

KW - antenna

KW - gradient index

KW - lens

KW - passivation

KW - silicon

KW - THz

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U2 - 10.23919/EuMC50147.2022.9784285

DO - 10.23919/EuMC50147.2022.9784285

M3 - Conference article in proceedings

AN - SCOPUS:85132997879

SP - 873

EP - 876

BT - 2021 51st European Microwave Conference, EuMC 2021

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - 51st European Microwave Conference, EuMC 2021

Y2 - 4 April 2022 through 6 April 2022

ER -

The Effect of Surface Passivation for Sub-THz Silicon Gradient Refractive Index Lens

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Keywords

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