The Effect of Surface Passivation for Sub-THz Silicon Gradient Refractive Index Lens

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

This paper describes a study of impact of different passivation methods on performance of gradient refractive index (GRIN) lenses. Three different passivation layers on top of lenses are studied: PolySi, PolySi and PECVD silicon oxide (PolySi+SiO2), and PECVD silicon oxide (SiO2). Antenna gains and radiation patterns of fabricated lenses are measured. The study shows that passivation methods have strong impact on silicon GRIN lenses performance. A model with a low-resistivity layer on top of high-resistivity Si can explain observed effects.

Original languageEnglish
Title of host publication2021 51st European Microwave Conference, EuMC 2021
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages873-876
Number of pages4
ISBN (Electronic)978-2-87487-063-7
DOIs
Publication statusPublished - 2021
MoE publication typeA4 Article in a conference publication
Event51st European Microwave Conference, EuMC 2021 - London, United Kingdom
Duration: 4 Apr 20226 Apr 2022

Conference

Conference51st European Microwave Conference, EuMC 2021
Country/TerritoryUnited Kingdom
CityLondon
Period4/04/226/04/22

Keywords

  • antenna
  • gradient index
  • lens
  • passivation
  • silicon
  • THz

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