The Effect of Surface Passivation for Sub-THz Silicon Gradient Refractive Index Lens

Antti Lamminen; Aleksi Tamminen; Jaakko Saarilahti; Vladimir Ermolov; Pekka Pursula

doi:10.23919/EuMC50147.2022.9784285

The Effect of Surface Passivation for Sub-THz Silicon Gradient Refractive Index Lens

Antti Lamminen^*
, Aleksi Tamminen
, Jaakko Saarilahti
, Vladimir Ermolov
, Pekka Pursula

^*Corresponding author for this work

Aalto University

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

5 Citations (Scopus)

Abstract

This paper describes a study of impact of different passivation methods on performance of gradient refractive index (GRIN) lenses. Three different passivation layers on top of lenses are studied: PolySi, PolySi and PECVD silicon oxide (PolySi+SiO2), and PECVD silicon oxide (SiO2). Antenna gains and radiation patterns of fabricated lenses are measured. The study shows that passivation methods have strong impact on silicon GRIN lenses performance. A model with a low-resistivity layer on top of high-resistivity Si can explain observed effects.

Original language	English
Title of host publication	2021 51st European Microwave Conference, EuMC 2021
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	873-876
Number of pages	4
ISBN (Electronic)	978-2-87487-063-7
DOIs	https://doi.org/10.23919/EuMC50147.2022.9784285
Publication status	Published - 2021
MoE publication type	A4 Article in a conference publication
Event	51st European Microwave Conference, EuMC 2021 - London, United Kingdom Duration: 4 Apr 2022 → 6 Apr 2022

Conference

Conference	51st European Microwave Conference, EuMC 2021
Country/Territory	United Kingdom
City	London
Period	4/04/22 → 6/04/22

Funding

ACKNOWLEDGMENT This work was financially supported by the Academy of Finland under grant MilliRAD, number 314541. The authors would like to thank I. Huhtinen for the RF measurements.

Keywords

antenna
gradient index
lens
passivation
silicon
THz

Access to Document

10.23919/EuMC50147.2022.9784285

Cite this

@inproceedings{2cc6e9d267a2478fb3dd894d59575312,

title = "The Effect of Surface Passivation for Sub-THz Silicon Gradient Refractive Index Lens",

abstract = "This paper describes a study of impact of different passivation methods on performance of gradient refractive index (GRIN) lenses. Three different passivation layers on top of lenses are studied: PolySi, PolySi and PECVD silicon oxide (PolySi+SiO2), and PECVD silicon oxide (SiO2). Antenna gains and radiation patterns of fabricated lenses are measured. The study shows that passivation methods have strong impact on silicon GRIN lenses performance. A model with a low-resistivity layer on top of high-resistivity Si can explain observed effects.",

keywords = "antenna, gradient index, lens, passivation, silicon, THz",

author = "Antti Lamminen and Aleksi Tamminen and Jaakko Saarilahti and Vladimir Ermolov and Pekka Pursula",

note = "Funding Information: ACKNOWLEDGMENT This work was financially supported by the Academy of Finland under grant MilliRAD, number 314541. The authors would like to thank I. Huhtinen for the RF measurements. ; 51st European Microwave Conference, EuMC 2021 ; Conference date: 04-04-2022 Through 06-04-2022",

year = "2021",

doi = "10.23919/EuMC50147.2022.9784285",

language = "English",

pages = "873--876",

booktitle = "2021 51st European Microwave Conference, EuMC 2021",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

}

Lamminen, A, Tamminen, A, Saarilahti, J, Ermolov, V & Pursula, P 2021, The Effect of Surface Passivation for Sub-THz Silicon Gradient Refractive Index Lens. in 2021 51st European Microwave Conference, EuMC 2021. IEEE Institute of Electrical and Electronic Engineers, pp. 873-876, 51st European Microwave Conference, EuMC 2021, London, United Kingdom, 4/04/22. https://doi.org/10.23919/EuMC50147.2022.9784285

The Effect of Surface Passivation for Sub-THz Silicon Gradient Refractive Index Lens. / Lamminen, Antti; Tamminen, Aleksi; Saarilahti, Jaakko et al.
2021 51st European Microwave Conference, EuMC 2021. IEEE Institute of Electrical and Electronic Engineers, 2021. p. 873-876.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - The Effect of Surface Passivation for Sub-THz Silicon Gradient Refractive Index Lens

AU - Lamminen, Antti

AU - Tamminen, Aleksi

AU - Saarilahti, Jaakko

AU - Ermolov, Vladimir

AU - Pursula, Pekka

N1 - Funding Information: ACKNOWLEDGMENT This work was financially supported by the Academy of Finland under grant MilliRAD, number 314541. The authors would like to thank I. Huhtinen for the RF measurements.

PY - 2021

Y1 - 2021

N2 - This paper describes a study of impact of different passivation methods on performance of gradient refractive index (GRIN) lenses. Three different passivation layers on top of lenses are studied: PolySi, PolySi and PECVD silicon oxide (PolySi+SiO2), and PECVD silicon oxide (SiO2). Antenna gains and radiation patterns of fabricated lenses are measured. The study shows that passivation methods have strong impact on silicon GRIN lenses performance. A model with a low-resistivity layer on top of high-resistivity Si can explain observed effects.

AB - This paper describes a study of impact of different passivation methods on performance of gradient refractive index (GRIN) lenses. Three different passivation layers on top of lenses are studied: PolySi, PolySi and PECVD silicon oxide (PolySi+SiO2), and PECVD silicon oxide (SiO2). Antenna gains and radiation patterns of fabricated lenses are measured. The study shows that passivation methods have strong impact on silicon GRIN lenses performance. A model with a low-resistivity layer on top of high-resistivity Si can explain observed effects.

KW - antenna

KW - gradient index

KW - lens

KW - passivation

KW - silicon

KW - THz

UR - https://www.scopus.com/pages/publications/85132997879

U2 - 10.23919/EuMC50147.2022.9784285

DO - 10.23919/EuMC50147.2022.9784285

M3 - Conference article in proceedings

AN - SCOPUS:85132997879

SP - 873

EP - 876

BT - 2021 51st European Microwave Conference, EuMC 2021

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - 51st European Microwave Conference, EuMC 2021

Y2 - 4 April 2022 through 6 April 2022

ER -

The Effect of Surface Passivation for Sub-THz Silicon Gradient Refractive Index Lens

Abstract

Conference

Funding

Keywords

Access to Document

Other files and links

Fingerprint

Cite this