Keyphrases
Sub-terahertz (sub-THz)
100%
Surface Passivation
100%
Poly-Si
100%
Gradient Refractive Index Lens
100%
Silica
66%
Silicon Oxide
66%
Plasma-enhanced Chemical Vapor Deposition (PECVD)
66%
Passivation Effect
66%
Strong Impact
33%
Passivation Layer
33%
Antenna Radiation Patterns
33%
Lens Performance
33%
Low-resistivity Layer
33%
Antenna Gain Pattern
33%
High Resistivity Si
33%
Observed Effects
33%
INIS
surfaces
100%
silicon
100%
refractive index
100%
lenses
100%
passivation
100%
layers
40%
performance
40%
chemical vapor deposition
40%
silicon oxides
40%
gain
20%
radiations
20%
antennas
20%
Material Science
Surface Passivation
100%
Refractive Index
100%
Silicon
100%
Electrical Resistivity
50%
Oxide Compound
50%
Engineering
Passivation
100%
Refractive Index
100%
Silicon Oxide
66%
Passivation Layer
33%
Radiation Pattern
33%
Antenna Gain
33%