The effect of target structure on sputtering of Cu atoms by Ar ions

Matti Hautala, Jari Likonen

Research output: Contribution to journalArticleScientificpeer-review

Abstract

Sputtering of Cu single-crystal, polycrystal and amorphous targets by 5 keV Ar ions has been studied by the binary collision lattice simulation code Cosipo. The sputtering yields, angular distributions and the space distributions of the original positions of the sputtered Cu atoms have been calculated. The results are discussed within the framework of cascade generations.
Original languageEnglish
Pages (from-to)383-387
JournalPhysics Letters A
Volume124
Issue number6-7
DOIs
Publication statusPublished - 1987
MoE publication typeA1 Journal article-refereed

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sputtering
polycrystals
atoms
cascades
ions
angular distribution
collisions
single crystals
simulation

Cite this

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title = "The effect of target structure on sputtering of Cu atoms by Ar ions",
abstract = "Sputtering of Cu single-crystal, polycrystal and amorphous targets by 5 keV Ar ions has been studied by the binary collision lattice simulation code Cosipo. The sputtering yields, angular distributions and the space distributions of the original positions of the sputtered Cu atoms have been calculated. The results are discussed within the framework of cascade generations.",
author = "Matti Hautala and Jari Likonen",
year = "1987",
doi = "10.1016/0375-9601(87)90033-8",
language = "English",
volume = "124",
pages = "383--387",
journal = "Physics Letters A",
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publisher = "Elsevier",
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}

The effect of target structure on sputtering of Cu atoms by Ar ions. / Hautala, Matti; Likonen, Jari.

In: Physics Letters A, Vol. 124, No. 6-7, 1987, p. 383-387.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - The effect of target structure on sputtering of Cu atoms by Ar ions

AU - Hautala, Matti

AU - Likonen, Jari

PY - 1987

Y1 - 1987

N2 - Sputtering of Cu single-crystal, polycrystal and amorphous targets by 5 keV Ar ions has been studied by the binary collision lattice simulation code Cosipo. The sputtering yields, angular distributions and the space distributions of the original positions of the sputtered Cu atoms have been calculated. The results are discussed within the framework of cascade generations.

AB - Sputtering of Cu single-crystal, polycrystal and amorphous targets by 5 keV Ar ions has been studied by the binary collision lattice simulation code Cosipo. The sputtering yields, angular distributions and the space distributions of the original positions of the sputtered Cu atoms have been calculated. The results are discussed within the framework of cascade generations.

U2 - 10.1016/0375-9601(87)90033-8

DO - 10.1016/0375-9601(87)90033-8

M3 - Article

VL - 124

SP - 383

EP - 387

JO - Physics Letters A

JF - Physics Letters A

SN - 0375-9601

IS - 6-7

ER -