The recovery of critical raw materials in the semiconductor industry and its connection to climate impacts and raw materials criticality

Non-technical Summary
This study explores methods of recovering critical raw materials (CRMs) for recycling in the semiconductor industry. Sustainability reports of global semiconductor manufacturers are reviewed along with the literature regarding methods for recovering CRMs for recycling. Additionally, a case study is conducted to analyse potential impacts of material recovery on the carbon footprint and raw material criticality indicators. The results show that methods of recovering CRMs for recycling are not yet widely implemented in the industry, though they have potential to reduce greenhouse gas (GHG) emissions and improve resilience in the supply chains of the semiconductor industry.
Technical Summary
Climate and environmental crises push the semiconductor industry to reduce its environmental impacts. Simultaneously, the industry aims to mitigate risks related to the supply of CRMs. The circular economy has the potential to address both issues by promoting material efficiency. This study applies a scoping review to assess CRM recovery methods, their industrial implementation, and alignment with the circularity goals of semiconductor manufacturers. The results show that CRM recovery is not yet common in the semiconductor industry, current recovery methods require further development, and explicit recovery targets are largely absent. Complementing the review, a case study evaluates membrane-based recycling of ceria from spent chemical-mechanical polishing (CMP) slurry, assessing its carbon footprint and raw material criticality. Ceria recovery indicates a potential reduction in CMP process-related GHG emissions by approximately 27% at 90% recovery efficiency. Moreover, improved recovery and recycling reduce all studied criticality indicators: supply risk, economic importance, and material criticality. To the authors’ knowledge, this study is the first to assess CRM recovery in semiconductor manufacturing, combining technological, environmental, and raw material criticality perspectives. Together, the findings highlight CRM recovery as a critical yet underutilized means for advancing circularity and reducing dependence on virgin materials in the semiconductor industry.
Social Media Summary
Recovery of CRMs in the semiconductor industry and its impacts on carbon footprint and raw material criticality.