The ultimate depth resolution in SIMS profiling: Low-energy ion beam mixing of Au-Pt interface

Jari Likonen; Mikko Hautala; Ilkka Koponen

doi:10.1016/0168-583X(93)96096-U

The ultimate depth resolution in SIMS profiling: Low-energy ion beam mixing of Au-Pt interface

Jari Likonen, Mikko Hautala, Ilkka Koponen

University of Helsinki

Research output: Contribution to journal › Article › Scientific › peer-review

2 Citations (Scopus)

Abstract

The ion beam induced mixing of Au/Pt and Pt/Au multilayers in SIMS sputter depth profiling with 2.5, 5 and 8 keV Ar⁺ and Xe⁺ ions has been studied. The depth resolution varies linearly as the square root of the bombarding energy and is slightly better for Xe⁺ than for Ar⁺ ions. The decay lengths of the trailing edge are 12–30 Å in Pt and 30–90 Å in Au. Experimental profiles are compared with simulations based on a model which describes the atomic transport from the initial collisional phase to the late thermalized stage. Experimentally observed broadening is predicted by the model. The larger decay lengths in Au are attributed to more efficient electron-phonon coupling and thus more rapid quenching of thermal spikes in Pt than in Au.

Original language	English
Pages (from-to)	151 - 155
Number of pages	5
Journal	Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	80-81
Issue number	Part 1
DOIs	https://doi.org/10.1016/0168-583X(93)96096-U
Publication status	Published - 1993
MoE publication type	A1 Journal article-refereed

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Cite this

@article{730f1aae44af4f659b202041450b1848,

title = "The ultimate depth resolution in SIMS profiling: Low-energy ion beam mixing of Au-Pt interface",

abstract = "The ion beam induced mixing of Au/Pt and Pt/Au multilayers in SIMS sputter depth profiling with 2.5, 5 and 8 keV Ar+ and Xe+ ions has been studied. The depth resolution varies linearly as the square root of the bombarding energy and is slightly better for Xe+ than for Ar+ ions. The decay lengths of the trailing edge are 12–30 {\AA} in Pt and 30–90 {\AA} in Au. Experimental profiles are compared with simulations based on a model which describes the atomic transport from the initial collisional phase to the late thermalized stage. Experimentally observed broadening is predicted by the model. The larger decay lengths in Au are attributed to more efficient electron-phonon coupling and thus more rapid quenching of thermal spikes in Pt than in Au.",

author = "Jari Likonen and Mikko Hautala and Ilkka Koponen",

note = "Project code: REA1522",

year = "1993",

doi = "10.1016/0168-583X(93)96096-U",

language = "English",

volume = "80-81",

pages = "151 -- 155",

journal = "Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

number = "Part 1",

}

The ultimate depth resolution in SIMS profiling: Low-energy ion beam mixing of Au-Pt interface. / Likonen, Jari; Hautala, Mikko; Koponen, Ilkka.
In: Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vol. 80-81, No. Part 1, 1993, p. 151 - 155.

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - The ultimate depth resolution in SIMS profiling

T2 - Low-energy ion beam mixing of Au-Pt interface

AU - Likonen, Jari

AU - Hautala, Mikko

AU - Koponen, Ilkka

N1 - Project code: REA1522

PY - 1993

Y1 - 1993

N2 - The ion beam induced mixing of Au/Pt and Pt/Au multilayers in SIMS sputter depth profiling with 2.5, 5 and 8 keV Ar+ and Xe+ ions has been studied. The depth resolution varies linearly as the square root of the bombarding energy and is slightly better for Xe+ than for Ar+ ions. The decay lengths of the trailing edge are 12–30 Å in Pt and 30–90 Å in Au. Experimental profiles are compared with simulations based on a model which describes the atomic transport from the initial collisional phase to the late thermalized stage. Experimentally observed broadening is predicted by the model. The larger decay lengths in Au are attributed to more efficient electron-phonon coupling and thus more rapid quenching of thermal spikes in Pt than in Au.

AB - The ion beam induced mixing of Au/Pt and Pt/Au multilayers in SIMS sputter depth profiling with 2.5, 5 and 8 keV Ar+ and Xe+ ions has been studied. The depth resolution varies linearly as the square root of the bombarding energy and is slightly better for Xe+ than for Ar+ ions. The decay lengths of the trailing edge are 12–30 Å in Pt and 30–90 Å in Au. Experimental profiles are compared with simulations based on a model which describes the atomic transport from the initial collisional phase to the late thermalized stage. Experimentally observed broadening is predicted by the model. The larger decay lengths in Au are attributed to more efficient electron-phonon coupling and thus more rapid quenching of thermal spikes in Pt than in Au.

U2 - 10.1016/0168-583X(93)96096-U

DO - 10.1016/0168-583X(93)96096-U

M3 - Article

SN - 0168-583X

VL - 80-81

SP - 151

EP - 155

JO - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

IS - Part 1

ER -

The ultimate depth resolution in SIMS profiling: Low-energy ion beam mixing of Au-Pt interface

Abstract

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