The ultimate depth resolution in SIMS profiling: Low-energy ion beam mixing of Au-Pt interface

Jari Likonen, Mikko Hautala, Ilkka Koponen

    Research output: Contribution to journalArticleScientificpeer-review

    2 Citations (Scopus)

    Abstract

    The ion beam induced mixing of Au/Pt and Pt/Au multilayers in SIMS sputter depth profiling with 2.5, 5 and 8 keV Ar+ and Xe+ ions has been studied. The depth resolution varies linearly as the square root of the bombarding energy and is slightly better for Xe+ than for Ar+ ions. The decay lengths of the trailing edge are 12–30 Å in Pt and 30–90 Å in Au. Experimental profiles are compared with simulations based on a model which describes the atomic transport from the initial collisional phase to the late thermalized stage. Experimentally observed broadening is predicted by the model. The larger decay lengths in Au are attributed to more efficient electron-phonon coupling and thus more rapid quenching of thermal spikes in Pt than in Au.

    Original languageEnglish
    Pages (from-to)151 - 155
    Number of pages5
    JournalNuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Volume80-81
    Issue numberPart 1
    DOIs
    Publication statusPublished - 1993
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    Secondary ion mass spectrometry
    Ion beams
    secondary ion mass spectrometry
    ion beams
    Rapid quenching
    Depth profiling
    trailing edges
    Ions
    decay
    spikes
    Multilayers
    ions
    energy
    Electrons
    profiles
    electrons
    simulation
    Hot Temperature

    Cite this

    @article{730f1aae44af4f659b202041450b1848,
    title = "The ultimate depth resolution in SIMS profiling: Low-energy ion beam mixing of Au-Pt interface",
    abstract = "The ion beam induced mixing of Au/Pt and Pt/Au multilayers in SIMS sputter depth profiling with 2.5, 5 and 8 keV Ar+ and Xe+ ions has been studied. The depth resolution varies linearly as the square root of the bombarding energy and is slightly better for Xe+ than for Ar+ ions. The decay lengths of the trailing edge are 12–30 {\AA} in Pt and 30–90 {\AA} in Au. Experimental profiles are compared with simulations based on a model which describes the atomic transport from the initial collisional phase to the late thermalized stage. Experimentally observed broadening is predicted by the model. The larger decay lengths in Au are attributed to more efficient electron-phonon coupling and thus more rapid quenching of thermal spikes in Pt than in Au.",
    author = "Jari Likonen and Mikko Hautala and Ilkka Koponen",
    note = "Project code: REA1522",
    year = "1993",
    doi = "10.1016/0168-583X(93)96096-U",
    language = "English",
    volume = "80-81",
    pages = "151 -- 155",
    journal = "Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",
    issn = "0168-583X",
    publisher = "Elsevier",
    number = "Part 1",

    }

    The ultimate depth resolution in SIMS profiling : Low-energy ion beam mixing of Au-Pt interface. / Likonen, Jari; Hautala, Mikko; Koponen, Ilkka.

    In: Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vol. 80-81, No. Part 1, 1993, p. 151 - 155.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - The ultimate depth resolution in SIMS profiling

    T2 - Low-energy ion beam mixing of Au-Pt interface

    AU - Likonen, Jari

    AU - Hautala, Mikko

    AU - Koponen, Ilkka

    N1 - Project code: REA1522

    PY - 1993

    Y1 - 1993

    N2 - The ion beam induced mixing of Au/Pt and Pt/Au multilayers in SIMS sputter depth profiling with 2.5, 5 and 8 keV Ar+ and Xe+ ions has been studied. The depth resolution varies linearly as the square root of the bombarding energy and is slightly better for Xe+ than for Ar+ ions. The decay lengths of the trailing edge are 12–30 Å in Pt and 30–90 Å in Au. Experimental profiles are compared with simulations based on a model which describes the atomic transport from the initial collisional phase to the late thermalized stage. Experimentally observed broadening is predicted by the model. The larger decay lengths in Au are attributed to more efficient electron-phonon coupling and thus more rapid quenching of thermal spikes in Pt than in Au.

    AB - The ion beam induced mixing of Au/Pt and Pt/Au multilayers in SIMS sputter depth profiling with 2.5, 5 and 8 keV Ar+ and Xe+ ions has been studied. The depth resolution varies linearly as the square root of the bombarding energy and is slightly better for Xe+ than for Ar+ ions. The decay lengths of the trailing edge are 12–30 Å in Pt and 30–90 Å in Au. Experimental profiles are compared with simulations based on a model which describes the atomic transport from the initial collisional phase to the late thermalized stage. Experimentally observed broadening is predicted by the model. The larger decay lengths in Au are attributed to more efficient electron-phonon coupling and thus more rapid quenching of thermal spikes in Pt than in Au.

    U2 - 10.1016/0168-583X(93)96096-U

    DO - 10.1016/0168-583X(93)96096-U

    M3 - Article

    VL - 80-81

    SP - 151

    EP - 155

    JO - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

    JF - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

    SN - 0168-583X

    IS - Part 1

    ER -