Three different setups for automatic demolding in nanoimprint, including air induced demolding and fast and slow demolding, are studied for different stamps designs, and compared with standard manual demolding. A comparison between the setups shows differences in quality between polymers of different molecular weight, and of different grating periods.
|Publication status||Published - 2006|
|MoE publication type||A4 Article in a conference publication|
|Event||32nd International Conference on Micro- and Nano- Engineering, MNE 2006 - Barcelona, Spain|
Duration: 17 Sep 2006 → 20 Sep 2006