Thermal and electrical properties of ultra-thin highly doped silicon membranes (invited)

A. Shchepetov; A. Varpula; A. Timofeev; B. Grazykowski; C. Sotomayor Torres; M. Prunnila; J. Ahopelto

Thermal and electrical properties of ultra-thin highly doped silicon membranes (invited)

A. Shchepetov
, A. Varpula
, A. Timofeev
, B. Grazykowski
, C. Sotomayor Torres
, M. Prunnila
, J. Ahopelto

VTT Technical Research Centre of Finland

Catalan Institute of Nanoscience and Nanotechnology (ICN2)

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	Abstract book
Subtitle of host publication	International Conference on Phononics and Thermal Energy Science, PTES2016
Publisher	Xi'an Jiaotong University
Publication status	Published - 2016
Event	International Conference on Phononics and Thermal Energy Science, PTES2016 - Xi'an, China Duration: 23 May 2016 → 28 May 2016 Conference number: 3

Conference

Conference	International Conference on Phononics and Thermal Energy Science, PTES2016
Abbreviated title	PTES2016
Country/Territory	China
City	Xi'an
Period	23/05/16 → 28/05/16

Cite this

@inbook{ed674ce6813f4e81b892889998a0e5a8,

title = "Thermal and electrical properties of ultra-thin highly doped silicon membranes (invited)",

author = "A. Shchepetov and A. Varpula and A. Timofeev and B. Grazykowski and \{Sotomayor Torres\}, C. and M. Prunnila and J. Ahopelto",

year = "2016",

language = "English",

booktitle = "Abstract book",

publisher = "Xi'an Jiaotong University",

address = "China",

note = "International Conference on Phononics and Thermal Energy Science, PTES2016, PTES2016 ; Conference date: 23-05-2016 Through 28-05-2016",

}

Shchepetov, A, Varpula, A, Timofeev, A, Grazykowski, B, Sotomayor Torres, C, Prunnila, M & Ahopelto, J 2016, Thermal and electrical properties of ultra-thin highly doped silicon membranes (invited). in Abstract book: International Conference on Phononics and Thermal Energy Science, PTES2016. Xi'an Jiaotong University, International Conference on Phononics and Thermal Energy Science, PTES2016, Xi'an, China, 23/05/16.

Thermal and electrical properties of ultra-thin highly doped silicon membranes (invited). / Shchepetov, A.; Varpula, A.; Timofeev, A. et al.
Abstract book: International Conference on Phononics and Thermal Energy Science, PTES2016. Xi'an Jiaotong University, 2016.

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

TY - CHAP

T1 - Thermal and electrical properties of ultra-thin highly doped silicon membranes (invited)

AU - Shchepetov, A.

AU - Varpula, A.

AU - Timofeev, A.

AU - Grazykowski, B.

AU - Sotomayor Torres, C.

AU - Prunnila, M.

AU - Ahopelto, J.

N1 - Conference code: 3

PY - 2016

Y1 - 2016

M3 - Conference abstract in proceedings

BT - Abstract book

PB - Xi'an Jiaotong University

T2 - International Conference on Phononics and Thermal Energy Science, PTES2016

Y2 - 23 May 2016 through 28 May 2016

ER -