Thermal and electrical properties of ultra-thin highly doped silicon membranes (invited)

A. Shchepetov; A. Varpula; A. Timofeev; B. Grazykowski; C. Sotomayor Torres; M. Prunnila; J. Ahopelto

Thermal and electrical properties of ultra-thin highly doped silicon membranes (invited)

A. Shchepetov, A. Varpula, A. Timofeev, B. Grazykowski, C. Sotomayor Torres, M. Prunnila, J. Ahopelto

VTT Technical Research Centre of Finland

Catalan Institute of Nanoscience and Nanotechnology (ICN2)

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	Abstract book
Subtitle of host publication	International Conference on Phononics and Thermal Energy Science, PTES2016
Publisher	Xi'an Jiaotong University
Publication status	Published - 2016
Event	International Conference on Phononics and Thermal Energy Science, PTES2016 - Xi'an, China Duration: 23 May 2016 → 28 May 2016 Conference number: 3

Conference

Conference	International Conference on Phononics and Thermal Energy Science, PTES2016
Abbreviated title	PTES2016
Country/Territory	China
City	Xi'an
Period	23/05/16 → 28/05/16

Cite this

@inbook{ed674ce6813f4e81b892889998a0e5a8,

title = "Thermal and electrical properties of ultra-thin highly doped silicon membranes (invited)",

author = "A. Shchepetov and A. Varpula and A. Timofeev and B. Grazykowski and \{Sotomayor Torres\}, C. and M. Prunnila and J. Ahopelto",

year = "2016",

language = "English",

booktitle = "Abstract book",

publisher = "Xi'an Jiaotong University",

address = "China",

note = "International Conference on Phononics and Thermal Energy Science, PTES2016, PTES2016 ; Conference date: 23-05-2016 Through 28-05-2016",

}

Shchepetov, A, Varpula, A, Timofeev, A, Grazykowski, B, Sotomayor Torres, C, Prunnila, M & Ahopelto, J 2016, Thermal and electrical properties of ultra-thin highly doped silicon membranes (invited). in Abstract book: International Conference on Phononics and Thermal Energy Science, PTES2016. Xi'an Jiaotong University, International Conference on Phononics and Thermal Energy Science, PTES2016, Xi'an, China, 23/05/16.

Thermal and electrical properties of ultra-thin highly doped silicon membranes (invited). / Shchepetov, A.; Varpula, A.; Timofeev, A. et al.
Abstract book: International Conference on Phononics and Thermal Energy Science, PTES2016. Xi'an Jiaotong University, 2016.

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

TY - CHAP

T1 - Thermal and electrical properties of ultra-thin highly doped silicon membranes (invited)

AU - Shchepetov, A.

AU - Varpula, A.

AU - Timofeev, A.

AU - Grazykowski, B.

AU - Sotomayor Torres, C.

AU - Prunnila, M.

AU - Ahopelto, J.

N1 - Conference code: 3

PY - 2016

Y1 - 2016

M3 - Conference abstract in proceedings

BT - Abstract book

PB - Xi'an Jiaotong University

T2 - International Conference on Phononics and Thermal Energy Science, PTES2016

Y2 - 23 May 2016 through 28 May 2016

ER -