Thermal conductivity reduction in Si free-standing membranes investigated using Raman thermometry

J S Reparaz, E Chavez-Angel, J Gomis-Bresco, M R Wagner, Andrey Shchepetov, Mika Prunnila, Jouni Ahopelto, F Alzina, C M Sotomayor Torres

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    We report on the reduction of the thermal conductivity in ultra-thin suspended Si membranes with high crystalline quality at room temperature. A series of membranes with thicknesses ranging from 9 nm to 1.5 µm was investigated using Raman thermometry, a novel contactless optical technique for thermal conductivity determination. The temperature rise of a laser spot focused on the membranes was monitored as a function of the absorbed power. For this purpose, the absorption coefficient of the membranes was experimentally determined and also theoretically modelled. A systematic decrease in the thermal conductivity was observed as reducing the thickness of the membranes which is explained using the Fuchs-Sondheimer model through the influence of phonon boundary scattering at the surfaces of the membranes. The thermal conductivity of the thinnest membrane with d= 9 nm resulted in (9±2)W/mK, thus approaching the amorphous limit but still maintaining a high crystalline quality
    Original languageEnglish
    Title of host publicationProceedings
    Subtitle of host publication19th International Workshop on Thermal Investigations of ICs and Systems, THERMINIC 2013
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages95-96
    ISBN (Electronic)978-1-4799-2272-7
    ISBN (Print)978-1-4799-2271-0
    DOIs
    Publication statusPublished - 2013
    MoE publication typeNot Eligible
    Event19th International Workshop on Thermal Investigations of ICs and Systems, THERMINIC 2013 - Berlin, Germany
    Duration: 25 Sep 201327 Sep 2013
    Conference number: 19

    Conference

    Conference19th International Workshop on Thermal Investigations of ICs and Systems, THERMINIC 2013
    Abbreviated titleTHERMINIC 2013
    CountryGermany
    CityBerlin
    Period25/09/1327/09/13

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  • Cite this

    Reparaz, J. S., Chavez-Angel, E., Gomis-Bresco, J., Wagner, M. R., Shchepetov, A., Prunnila, M., Ahopelto, J., Alzina, F., & Sotomayor Torres, C. M. (2013). Thermal conductivity reduction in Si free-standing membranes investigated using Raman thermometry. In Proceedings: 19th International Workshop on Thermal Investigations of ICs and Systems, THERMINIC 2013 (pp. 95-96). IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/THERMINIC.2013.6675244