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Thermal detector and thermal detector array
Aapo Varpula
(Inventor), Bin Guo (Inventor)
Research output
:
Patent
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Patent
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Dive into the research topics of 'Thermal detector and thermal detector array'. Together they form a unique fingerprint.
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Keyphrases
Thermal Detector
100%
Detector Array
100%
Sealed Cavity
100%
Wafer
66%
Active Elements
66%
Support Layer
50%
Sacrificial Layer
50%
Dielectric
16%
Electrical Connection
16%
Optics
16%
Patent Family
16%
Reflector
16%
Dielectric Substrate
16%
Readout Circuit
16%
Semiconducting Substrate
16%
Wafer Level
16%
INIS
layers
100%
cavities
100%
substrates
50%
radiations
33%
dielectrics
33%
element 108
33%
levels
16%
patents
16%
connections
16%
readout systems
16%
optics
16%
Engineering
Active Element
100%
Detector Array
100%
Support Layer
75%
Dielectrics
50%
Electrical Connection
25%
Patent Family
25%
Opposite Side
25%
Readout Circuit
25%
Earth and Planetary Sciences
Dielectric Material
100%
Readout
50%
Material Science
Dielectric Material
100%
Electronic Circuit
50%
Medicine and Dentistry
Hassium
100%