Thermal properties and applications of ultra-thin highly doped silicon membranes

A. Shchepetov, A. Varpula, A. Timofeev, B. Graczykowski, C. Sotomayor Torres, J. Ahopelto, M. Prunnila

Research output: Contribution to conferenceConference AbstractScientific

Original languageEnglish
Publication statusPublished - 2016
MoE publication typeNot Eligible
EventNanoscale and Microscale Heat Transfer V: Eurotherm Seminar No 108 - Santorini, Greece
Duration: 26 Sep 201630 Sep 2016

Seminar

SeminarNanoscale and Microscale Heat Transfer V
CountryGreece
CitySantorini
Period26/09/1630/09/16

Keywords

  • OtaNano

Equipment

  • Cite this

    Shchepetov, A., Varpula, A., Timofeev, A., Graczykowski, B., Sotomayor Torres, C., Ahopelto, J., & Prunnila, M. (2016). Thermal properties and applications of ultra-thin highly doped silicon membranes. Abstract from Nanoscale and Microscale Heat Transfer V, Santorini, Greece.