Thermal properties and applications of ultra-thin highly doped silicon membranes

A. Shchepetov, A. Varpula, A. Timofeev, B. Graczykowski, C. Sotomayor Torres, J. Ahopelto, M. Prunnila

Research output: Contribution to conference › Conference Abstract › Scientific

Original language	English
Publication status	Published - 2016
MoE publication type	Not Eligible
Event	Nanoscale and Microscale Heat Transfer V: Eurotherm Seminar No 108 - Santorini, Greece Duration: 26 Sept 2016 → 30 Sept 2016

Seminar	Nanoscale and Microscale Heat Transfer V
Country/Territory	Greece
City	Santorini
Period	26/09/16 → 30/09/16

Keywords

@conference{261202d29ab84eecb14619ee012f76ce,

title = "Thermal properties and applications of ultra-thin highly doped silicon membranes",

keywords = "OtaNano",

author = "A. Shchepetov and A. Varpula and A. Timofeev and B. Graczykowski and {Sotomayor Torres}, C. and J. Ahopelto and M. Prunnila",

year = "2016",

language = "English",

note = "Nanoscale and Microscale Heat Transfer V : Eurotherm Seminar No 108 ; Conference date: 26-09-2016 Through 30-09-2016",

}

TY - CONF

T1 - Thermal properties and applications of ultra-thin highly doped silicon membranes

AU - Shchepetov, A.

AU - Varpula, A.

AU - Timofeev, A.

AU - Graczykowski, B.

AU - Sotomayor Torres, C.

AU - Ahopelto, J.

AU - Prunnila, M.

PY - 2016

Y1 - 2016

KW - OtaNano

M3 - Conference Abstract

T2 - Nanoscale and Microscale Heat Transfer V

Y2 - 26 September 2016 through 30 September 2016

ER -