Thermal roll-to-roll nanoimprinting using a replica mold without release agent

Noriyuki Unno, Shohei Kakimoto, Tapio Mäkelä, Shin Hiwasa, Jun Taniguchi

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

Thermal roll-to-roll nanoimprint (T-R2RNIL) using a flexible replica mold made of a special UV-curable resin was demonstrated. This UV-curable resin is able to be used for the nanoimprint process without a release agent. In this study, we examined the relationship between the hardness of the UV-curable resin and the transfer performance using flexible replica molds made of three types of UV-curable resins. The experimental result found that the special resin is a good candidate for fabrication of a replica mold for T-R2RNIL because of its high hardness and good release properties.

Original languageEnglish
Title of host publicationProceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017
PublisherJapan Society of Mechanical Engineers
DOIs
Publication statusPublished - 13 Nov 2017
MoE publication typeA4 Article in a conference publication
Event9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 - Hiroshima, Japan
Duration: 13 Nov 201717 Nov 2017

Conference

Conference9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017
Abbreviated titleLEM 2017
CountryJapan
CityHiroshima
Period13/11/1717/11/17

Keywords

  • Release agent-free
  • Replica mold
  • Thermal roll-to-roll nanoimprint
  • UV-curable resin

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  • Cite this

    Unno, N., Kakimoto, S., Mäkelä, T., Hiwasa, S., & Taniguchi, J. (2017). Thermal roll-to-roll nanoimprinting using a replica mold without release agent. In Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 [022] Japan Society of Mechanical Engineers. https://doi.org/10.1299/jsmelem.2017.9.022