Thermal roll-to-roll nanoimprinting using a replica mold without release agent

Noriyuki Unno; Shohei Kakimoto; Tapio Mäkelä; Shin Hiwasa; Jun Taniguchi

doi:10.1299/jsmelem.2017.9.022

Thermal roll-to-roll nanoimprinting using a replica mold without release agent

Noriyuki Unno, Shohei Kakimoto, Tapio Mäkelä, Shin Hiwasa, Jun Taniguchi

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

Thermal roll-to-roll nanoimprint (T-R2RNIL) using a flexible replica mold made of a special UV-curable resin was demonstrated. This UV-curable resin is able to be used for the nanoimprint process without a release agent. In this study, we examined the relationship between the hardness of the UV-curable resin and the transfer performance using flexible replica molds made of three types of UV-curable resins. The experimental result found that the special resin is a good candidate for fabrication of a replica mold for T-R2RNIL because of its high hardness and good release properties.

Original language	English
Title of host publication	Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017
Publisher	Japan Society of Mechanical Engineers
DOIs	https://doi.org/10.1299/jsmelem.2017.9.022
Publication status	Published - 13 Nov 2017
MoE publication type	A4 Article in a conference publication
Event	9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 - Hiroshima, Japan Duration: 13 Nov 2017 → 17 Nov 2017

Conference

Conference	9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017
Abbreviated title	LEM 2017
Country/Territory	Japan
City	Hiroshima
Period	13/11/17 → 17/11/17

Keywords

Release agent-free
Replica mold
Thermal roll-to-roll nanoimprint
UV-curable resin

Access to Document

10.1299/jsmelem.2017.9.022

Cite this

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title = "Thermal roll-to-roll nanoimprinting using a replica mold without release agent",

abstract = "Thermal roll-to-roll nanoimprint (T-R2RNIL) using a flexible replica mold made of a special UV-curable resin was demonstrated. This UV-curable resin is able to be used for the nanoimprint process without a release agent. In this study, we examined the relationship between the hardness of the UV-curable resin and the transfer performance using flexible replica molds made of three types of UV-curable resins. The experimental result found that the special resin is a good candidate for fabrication of a replica mold for T-R2RNIL because of its high hardness and good release properties.",

keywords = "Release agent-free, Replica mold, Thermal roll-to-roll nanoimprint, UV-curable resin",

author = "Noriyuki Unno and Shohei Kakimoto and Tapio M{\"a}kel{\"a} and Shin Hiwasa and Jun Taniguchi",

note = "Proceedings not available...; 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017, LEM 2017 ; Conference date: 13-11-2017 Through 17-11-2017",

year = "2017",

month = nov,

day = "13",

doi = "10.1299/jsmelem.2017.9.022",

language = "English",

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Unno, N, Kakimoto, S, Mäkelä, T, Hiwasa, S & Taniguchi, J 2017, Thermal roll-to-roll nanoimprinting using a replica mold without release agent. in Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017., 022, Japan Society of Mechanical Engineers, 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017, Hiroshima, Japan, 13/11/17. https://doi.org/10.1299/jsmelem.2017.9.022

Thermal roll-to-roll nanoimprinting using a replica mold without release agent. / Unno, Noriyuki; Kakimoto, Shohei; Mäkelä, Tapio et al.
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017. Japan Society of Mechanical Engineers, 2017. 022.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

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T1 - Thermal roll-to-roll nanoimprinting using a replica mold without release agent

AU - Unno, Noriyuki

AU - Kakimoto, Shohei

AU - Mäkelä, Tapio

AU - Hiwasa, Shin

AU - Taniguchi, Jun

N1 - Proceedings not available...

PY - 2017/11/13

Y1 - 2017/11/13

N2 - Thermal roll-to-roll nanoimprint (T-R2RNIL) using a flexible replica mold made of a special UV-curable resin was demonstrated. This UV-curable resin is able to be used for the nanoimprint process without a release agent. In this study, we examined the relationship between the hardness of the UV-curable resin and the transfer performance using flexible replica molds made of three types of UV-curable resins. The experimental result found that the special resin is a good candidate for fabrication of a replica mold for T-R2RNIL because of its high hardness and good release properties.

AB - Thermal roll-to-roll nanoimprint (T-R2RNIL) using a flexible replica mold made of a special UV-curable resin was demonstrated. This UV-curable resin is able to be used for the nanoimprint process without a release agent. In this study, we examined the relationship between the hardness of the UV-curable resin and the transfer performance using flexible replica molds made of three types of UV-curable resins. The experimental result found that the special resin is a good candidate for fabrication of a replica mold for T-R2RNIL because of its high hardness and good release properties.

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KW - Replica mold

KW - Thermal roll-to-roll nanoimprint

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M3 - Conference article in proceedings

AN - SCOPUS:85041343717

BT - Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017

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ER -

Thermal roll-to-roll nanoimprinting using a replica mold without release agent

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Keywords

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