Thermal roll-to-roll nanoimprinting using a replica mold without release agent

Noriyuki Unno, Shohei Kakimoto, Tapio Mäkelä, Shin Hiwasa, Jun Taniguchi

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)


Thermal roll-to-roll nanoimprint (T-R2RNIL) using a flexible replica mold made of a special UV-curable resin was demonstrated. This UV-curable resin is able to be used for the nanoimprint process without a release agent. In this study, we examined the relationship between the hardness of the UV-curable resin and the transfer performance using flexible replica molds made of three types of UV-curable resins. The experimental result found that one special resin is a good candidate for fabrication of a replica mold for T-R2RNIL because of its high hardness and good release properties.
Original languageEnglish
Article numberJAMDSM0101
Number of pages11
JournalJournal of Advanced Mechanical Design, Systems and Manufacturing
Issue number5
Publication statusPublished - 19 Oct 2018
MoE publication typeNot Eligible


  • Release agent-free
  • Replica mold
  • Thermal roll-to-roll nanoimprint
  • Thermoplastic pattern
  • UV-curable resin
  • OtaNano

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