Thermal roll-to-roll nanoimprinting using a replica mold without release agent

Noriyuki Unno; Shohei Kakimoto; Tapio Mäkelä; Shin Hiwasa; Jun Taniguchi

doi:10.1299/jamdsm.2018jamdsm0101

Thermal roll-to-roll nanoimprinting using a replica mold without release agent

Noriyuki Unno^*, Shohei Kakimoto, Tapio Mäkelä, Shin Hiwasa, Jun Taniguchi

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

3 Citations (Scopus)

Abstract

Thermal roll-to-roll nanoimprint (T-R2RNIL) using a flexible replica mold made of a special UV-curable resin was demonstrated. This UV-curable resin is able to be used for the nanoimprint process without a release agent. In this study, we examined the relationship between the hardness of the UV-curable resin and the transfer performance using flexible replica molds made of three types of UV-curable resins. The experimental result found that one special resin is a good candidate for fabrication of a replica mold for T-R2RNIL because of its high hardness and good release properties.

Original language	English
Article number	JAMDSM0101
Number of pages	11
Journal	Journal of Advanced Mechanical Design, Systems and Manufacturing
Volume	12
Issue number	5
DOIs	https://doi.org/10.1299/jamdsm.2018jamdsm0101
Publication status	Published - 19 Oct 2018
MoE publication type	Not Eligible

Keywords

Release agent-free
Replica mold
Thermal roll-to-roll nanoimprint
Thermoplastic pattern
UV-curable resin
OtaNano

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10.1299/jamdsm.2018jamdsm0101

Cite this

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title = "Thermal roll-to-roll nanoimprinting using a replica mold without release agent",

abstract = "Thermal roll-to-roll nanoimprint (T-R2RNIL) using a flexible replica mold made of a special UV-curable resin was demonstrated. This UV-curable resin is able to be used for the nanoimprint process without a release agent. In this study, we examined the relationship between the hardness of the UV-curable resin and the transfer performance using flexible replica molds made of three types of UV-curable resins. The experimental result found that one special resin is a good candidate for fabrication of a replica mold for T-R2RNIL because of its high hardness and good release properties.",

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AU - Unno, Noriyuki

AU - Kakimoto, Shohei

AU - Mäkelä, Tapio

AU - Hiwasa, Shin

AU - Taniguchi, Jun

PY - 2018/10/19

Y1 - 2018/10/19

N2 - Thermal roll-to-roll nanoimprint (T-R2RNIL) using a flexible replica mold made of a special UV-curable resin was demonstrated. This UV-curable resin is able to be used for the nanoimprint process without a release agent. In this study, we examined the relationship between the hardness of the UV-curable resin and the transfer performance using flexible replica molds made of three types of UV-curable resins. The experimental result found that one special resin is a good candidate for fabrication of a replica mold for T-R2RNIL because of its high hardness and good release properties.

AB - Thermal roll-to-roll nanoimprint (T-R2RNIL) using a flexible replica mold made of a special UV-curable resin was demonstrated. This UV-curable resin is able to be used for the nanoimprint process without a release agent. In this study, we examined the relationship between the hardness of the UV-curable resin and the transfer performance using flexible replica molds made of three types of UV-curable resins. The experimental result found that one special resin is a good candidate for fabrication of a replica mold for T-R2RNIL because of its high hardness and good release properties.

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KW - Thermoplastic pattern

KW - UV-curable resin

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JO - Journal of Advanced Mechanical Design, Systems and Manufacturing

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Thermal roll-to-roll nanoimprinting using a replica mold without release agent

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Thermal roll-to-roll nanoimprinting using a replica mold without release agent

Abstract

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OtaNano

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