Thermal roll-to-roll nanoimprinting using a replica mold without release agent

Noriyuki Unno, Shohei Kakimoto, Tapio Mäkelä, Shin Hiwasa, Jun Taniguchi

    Research output: Contribution to journalArticleScientificpeer-review

    3 Citations (Scopus)


    Thermal roll-to-roll nanoimprint (T-R2RNIL) using a flexible replica mold made of a special UV-curable resin was demonstrated. This UV-curable resin is able to be used for the nanoimprint process without a release agent. In this study, we examined the relationship between the hardness of the UV-curable resin and the transfer performance using flexible replica molds made of three types of UV-curable resins. The experimental result found that one special resin is a good candidate for fabrication of a replica mold for T-R2RNIL because of its high hardness and good release properties.
    Original languageEnglish
    Article numberJAMDSM0101
    Number of pages11
    JournalJournal of Advanced Mechanical Design, Systems and Manufacturing
    Issue number5
    Publication statusPublished - 19 Oct 2018
    MoE publication typeNot Eligible


    • Release agent-free
    • Replica mold
    • Thermal roll-to-roll nanoimprint
    • Thermoplastic pattern
    • UV-curable resin
    • OtaNano


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