Thermal roll-to-roll nanoimprinting using a replica mold without release agent

Noriyuki Unno, Shohei Kakimoto, Tapio Mäkelä, Shin Hiwasa, Jun Taniguchi

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)

Abstract

Thermal roll-to-roll nanoimprint (T-R2RNIL) using a flexible replica mold made of a special UV-curable resin was demonstrated. This UV-curable resin is able to be used for the nanoimprint process without a release agent. In this study, we examined the relationship between the hardness of the UV-curable resin and the transfer performance using flexible replica molds made of three types of UV-curable resins. The experimental result found that one special resin is a good candidate for fabrication of a replica mold for T-R2RNIL because of its high hardness and good release properties.
Original languageEnglish
Article numberJAMDSM0101
Number of pages11
JournalJournal of Advanced Mechanical Design, Systems and Manufacturing
Volume12
Issue number5
DOIs
Publication statusPublished - 19 Oct 2018
MoE publication typeNot Eligible

Keywords

  • Release agent-free
  • Replica mold
  • Thermal roll-to-roll nanoimprint
  • Thermoplastic pattern
  • UV-curable resin
  • OtaNano

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