Thermal stability and nitrogen redistribution in the 〈Si〉/Ti/W–N/Al metallization scheme
- Frank So
- , Elzbieta Kolawa
- , Hannu Kattelus
- , Xin-An Zhao
- , Marc Nicolet
- , Chuen-Der Lien
Research output: Contribution to journal › Article › Scientific › peer-review
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(Scopus)