Thermally tunable integrated optical ring resonator with poly-Si thermistor

Päivi Heimala; Pekka Katila; Jaakko Aarnio; Arja Heinämäki

doi:10.1109/50.541217

Thermally tunable integrated optical ring resonator with poly-Si thermistor

Päivi Heimala, Pekka Katila, Jaakko Aarnio, Arja Heinämäki

Research output: Contribution to journal › Article › Scientific › peer-review

30 Citations (Scopus)

Abstract

Doped polysilicon is applied as a thermo-optic heating element to temperature tune the ring resonator based on silicon nitride rib waveguides on silicon. The ring diameter is 2 mm allowing a large free spectral range of 26 GHz. For the first time, a poly-Si resistor is used as a thermistor to measure waveguide temperature. The temperature coefficient of the poly-Si thermistor is 9.5/spl times/10/sup -4///spl deg/C. The reproducibility of the temperature measurement is 0.3/spl deg/C. The finesse of the ring resonator is 77. The propagation loss of silicon nitride rib waveguide is 0.5 dB/cm at the wavelength of 1.312 /spl mu/m. The temperature tuning of the ring resonator and the in situ supervision of the temperature on chip based on the same poly-Si fabrication process may find use especially in optical sensor applications.

Original language	English
Pages (from-to)	2260-2267
Number of pages	8
Journal	Journal of Lightwave Technology
Volume	14
Issue number	10
DOIs	https://doi.org/10.1109/50.541217
Publication status	Published - 1996
MoE publication type	Not Eligible

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10.1109/50.541217

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title = "Thermally tunable integrated optical ring resonator with poly-Si thermistor",

abstract = "Doped polysilicon is applied as a thermo-optic heating element to temperature tune the ring resonator based on silicon nitride rib waveguides on silicon. The ring diameter is 2 mm allowing a large free spectral range of 26 GHz. For the first time, a poly-Si resistor is used as a thermistor to measure waveguide temperature. The temperature coefficient of the poly-Si thermistor is 9.5/spl times/10/sup -4///spl deg/C. The reproducibility of the temperature measurement is 0.3/spl deg/C. The finesse of the ring resonator is 77. The propagation loss of silicon nitride rib waveguide is 0.5 dB/cm at the wavelength of 1.312 /spl mu/m. The temperature tuning of the ring resonator and the in situ supervision of the temperature on chip based on the same poly-Si fabrication process may find use especially in optical sensor applications.",

author = "P{\"a}ivi Heimala and Pekka Katila and Jaakko Aarnio and Arja Hein{\"a}m{\"a}ki",

note = "Project code: ELE40023",

year = "1996",

doi = "10.1109/50.541217",

language = "English",

volume = "14",

pages = "2260--2267",

journal = "Journal of Lightwave Technology",

issn = "0733-8724",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

number = "10",

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TY - JOUR

T1 - Thermally tunable integrated optical ring resonator with poly-Si thermistor

AU - Heimala, Päivi

AU - Katila, Pekka

AU - Aarnio, Jaakko

AU - Heinämäki, Arja

N1 - Project code: ELE40023

PY - 1996

Y1 - 1996

N2 - Doped polysilicon is applied as a thermo-optic heating element to temperature tune the ring resonator based on silicon nitride rib waveguides on silicon. The ring diameter is 2 mm allowing a large free spectral range of 26 GHz. For the first time, a poly-Si resistor is used as a thermistor to measure waveguide temperature. The temperature coefficient of the poly-Si thermistor is 9.5/spl times/10/sup -4///spl deg/C. The reproducibility of the temperature measurement is 0.3/spl deg/C. The finesse of the ring resonator is 77. The propagation loss of silicon nitride rib waveguide is 0.5 dB/cm at the wavelength of 1.312 /spl mu/m. The temperature tuning of the ring resonator and the in situ supervision of the temperature on chip based on the same poly-Si fabrication process may find use especially in optical sensor applications.

AB - Doped polysilicon is applied as a thermo-optic heating element to temperature tune the ring resonator based on silicon nitride rib waveguides on silicon. The ring diameter is 2 mm allowing a large free spectral range of 26 GHz. For the first time, a poly-Si resistor is used as a thermistor to measure waveguide temperature. The temperature coefficient of the poly-Si thermistor is 9.5/spl times/10/sup -4///spl deg/C. The reproducibility of the temperature measurement is 0.3/spl deg/C. The finesse of the ring resonator is 77. The propagation loss of silicon nitride rib waveguide is 0.5 dB/cm at the wavelength of 1.312 /spl mu/m. The temperature tuning of the ring resonator and the in situ supervision of the temperature on chip based on the same poly-Si fabrication process may find use especially in optical sensor applications.

U2 - 10.1109/50.541217

DO - 10.1109/50.541217

M3 - Article

SN - 0733-8724

VL - 14

SP - 2260

EP - 2267

JO - Journal of Lightwave Technology

JF - Journal of Lightwave Technology

IS - 10

ER -

Thermally tunable integrated optical ring resonator with poly-Si thermistor

Abstract

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