Thermally tunable integrated optical ring resonator with poly-Si thermistor

Päivi Heimala, Pekka Katila, Jaakko Aarnio, Arja Heinämäki

Research output: Contribution to journalArticleScientificpeer-review

25 Citations (Scopus)

Abstract

Doped polysilicon is applied as a thermo-optic heating element to temperature tune the ring resonator based on silicon nitride rib waveguides on silicon. The ring diameter is 2 mm allowing a large free spectral range of 26 GHz. For the first time, a poly-Si resistor is used as a thermistor to measure waveguide temperature. The temperature coefficient of the poly-Si thermistor is 9.5/spl times/10/sup -4///spl deg/C. The reproducibility of the temperature measurement is 0.3/spl deg/C. The finesse of the ring resonator is 77. The propagation loss of silicon nitride rib waveguide is 0.5 dB/cm at the wavelength of 1.312 /spl mu/m. The temperature tuning of the ring resonator and the in situ supervision of the temperature on chip based on the same poly-Si fabrication process may find use especially in optical sensor applications.
Original languageEnglish
Pages (from-to)2260-2267
Number of pages8
JournalJournal of Lightwave Technology
Volume14
Issue number10
DOIs
Publication statusPublished - 1996
MoE publication typeNot Eligible

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thermistors
resonators
rings
waveguides
silicon nitrides
temperature
optical measuring instruments
resistors
temperature measurement
chips
tuning
optics
fabrication
heating
propagation
silicon
coefficients
wavelengths

Cite this

Heimala, Päivi ; Katila, Pekka ; Aarnio, Jaakko ; Heinämäki, Arja. / Thermally tunable integrated optical ring resonator with poly-Si thermistor. In: Journal of Lightwave Technology. 1996 ; Vol. 14, No. 10. pp. 2260-2267.
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abstract = "Doped polysilicon is applied as a thermo-optic heating element to temperature tune the ring resonator based on silicon nitride rib waveguides on silicon. The ring diameter is 2 mm allowing a large free spectral range of 26 GHz. For the first time, a poly-Si resistor is used as a thermistor to measure waveguide temperature. The temperature coefficient of the poly-Si thermistor is 9.5/spl times/10/sup -4///spl deg/C. The reproducibility of the temperature measurement is 0.3/spl deg/C. The finesse of the ring resonator is 77. The propagation loss of silicon nitride rib waveguide is 0.5 dB/cm at the wavelength of 1.312 /spl mu/m. The temperature tuning of the ring resonator and the in situ supervision of the temperature on chip based on the same poly-Si fabrication process may find use especially in optical sensor applications.",
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Thermally tunable integrated optical ring resonator with poly-Si thermistor. / Heimala, Päivi; Katila, Pekka; Aarnio, Jaakko; Heinämäki, Arja.

In: Journal of Lightwave Technology, Vol. 14, No. 10, 1996, p. 2260-2267.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Thermally tunable integrated optical ring resonator with poly-Si thermistor

AU - Heimala, Päivi

AU - Katila, Pekka

AU - Aarnio, Jaakko

AU - Heinämäki, Arja

N1 - Project code: ELE40023

PY - 1996

Y1 - 1996

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AB - Doped polysilicon is applied as a thermo-optic heating element to temperature tune the ring resonator based on silicon nitride rib waveguides on silicon. The ring diameter is 2 mm allowing a large free spectral range of 26 GHz. For the first time, a poly-Si resistor is used as a thermistor to measure waveguide temperature. The temperature coefficient of the poly-Si thermistor is 9.5/spl times/10/sup -4///spl deg/C. The reproducibility of the temperature measurement is 0.3/spl deg/C. The finesse of the ring resonator is 77. The propagation loss of silicon nitride rib waveguide is 0.5 dB/cm at the wavelength of 1.312 /spl mu/m. The temperature tuning of the ring resonator and the in situ supervision of the temperature on chip based on the same poly-Si fabrication process may find use especially in optical sensor applications.

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