Thermo-optical switching at >100 khz frequency based on 4 and 9 µm thick silicon waveguides

Timo Aalto; Mikko Harjanne; Markku Kapulainen; Kimmo Solehmainen; Päivi Heimala

Thermo-optical switching at >100 khz frequency based on 4 and 9 µm thick silicon waveguides

Timo Aalto, Mikko Harjanne, Markku Kapulainen, Kimmo Solehmainen, Päivi Heimala

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Abstract

This paper describes the design, fabrication and characterisation of fast thermo-optical switches on silicon-on-insulator (SOI) substrates with 4 and 9 µm SOI layer thicknesses. Thinner silicon waveguides provide faster switching and lower power consumption, while 9 µm thick waveguides enable better coupling to standard single-mode (SM) fibers. All devices are based on SM operation. The basic switching element is a Mach-Zehnder interferometer consisting of two successive 2x2 couplers and thin-film metallic heaters in both interferometer arms. Some preliminary results are given also for a compact 3x3 switch matrix on 4 µm SOI.

Original language	English
Title of host publication	Book of abstracts. Topical Meeting on Optical Microsystems, OMS'05
Publisher	European Optical Society (EOS)
Publication status	Published - 2005
MoE publication type	Not Eligible

Cite this

@inbook{f36b996778114feabeac1122acafe474,

title = "Thermo-optical switching at >100 khz frequency based on 4 and 9 µm thick silicon waveguides",

abstract = "This paper describes the design, fabrication and characterisation of fast thermo-optical switches on silicon-on-insulator (SOI) substrates with 4 and 9 µm SOI layer thicknesses. Thinner silicon waveguides provide faster switching and lower power consumption, while 9 µm thick waveguides enable better coupling to standard single-mode (SM) fibers. All devices are based on SM operation. The basic switching element is a Mach-Zehnder interferometer consisting of two successive 2x2 couplers and thin-film metallic heaters in both interferometer arms. Some preliminary results are given also for a compact 3x3 switch matrix on 4 µm SOI.",

author = "Timo Aalto and Mikko Harjanne and Markku Kapulainen and Kimmo Solehmainen and P{\"a}ivi Heimala",

note = "Project code: T3SU00354",

year = "2005",

language = "English",

booktitle = "Book of abstracts. Topical Meeting on Optical Microsystems, OMS'05",

publisher = "European Optical Society (EOS)",

address = "Germany",

}

Thermo-optical switching at >100 khz frequency based on 4 and 9 µm thick silicon waveguides. / Aalto, Timo ; Harjanne, Mikko ; Kapulainen, Markku et al.
Book of abstracts. Topical Meeting on Optical Microsystems, OMS'05. European Optical Society (EOS), 2005. 68.

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

TY - CHAP

T1 - Thermo-optical switching at >100 khz frequency based on 4 and 9 µm thick silicon waveguides

AU - Aalto, Timo

AU - Harjanne, Mikko

AU - Kapulainen, Markku

AU - Solehmainen, Kimmo

AU - Heimala, Päivi

N1 - Project code: T3SU00354

PY - 2005

Y1 - 2005

N2 - This paper describes the design, fabrication and characterisation of fast thermo-optical switches on silicon-on-insulator (SOI) substrates with 4 and 9 µm SOI layer thicknesses. Thinner silicon waveguides provide faster switching and lower power consumption, while 9 µm thick waveguides enable better coupling to standard single-mode (SM) fibers. All devices are based on SM operation. The basic switching element is a Mach-Zehnder interferometer consisting of two successive 2x2 couplers and thin-film metallic heaters in both interferometer arms. Some preliminary results are given also for a compact 3x3 switch matrix on 4 µm SOI.

AB - This paper describes the design, fabrication and characterisation of fast thermo-optical switches on silicon-on-insulator (SOI) substrates with 4 and 9 µm SOI layer thicknesses. Thinner silicon waveguides provide faster switching and lower power consumption, while 9 µm thick waveguides enable better coupling to standard single-mode (SM) fibers. All devices are based on SM operation. The basic switching element is a Mach-Zehnder interferometer consisting of two successive 2x2 couplers and thin-film metallic heaters in both interferometer arms. Some preliminary results are given also for a compact 3x3 switch matrix on 4 µm SOI.

M3 - Conference abstract in proceedings

BT - Book of abstracts. Topical Meeting on Optical Microsystems, OMS'05

PB - European Optical Society (EOS)

ER -

Thermo-optical switching at >100 khz frequency based on 4 and 9 µm thick silicon waveguides

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