This paper describes the design, fabrication and characterisation of fast thermo-optical switches on silicon-on-insulator (SOI) substrates with 4 and 9 µm SOI layer thicknesses. Thinner silicon waveguides provide faster switching and lower power consumption, while 9 µm thick waveguides enable better coupling to standard single-mode (SM) fibers. All devices are based on SM operation. The basic switching element is a Mach-Zehnder interferometer consisting of two successive 2x2 couplers and thin-film metallic heaters in both interferometer arms. Some preliminary results are given also for a compact 3x3 switch matrix on 4 µm SOI.
|Title of host publication||Book of abstracts. Topical Meeting on Optical Microsystems, OMS'05|
|Publisher||European Optical Society (EOS)|
|Publication status||Published - 2005|
|MoE publication type||Not Eligible|