Abstract
A temperature controlled integrated optical ring resonator processed on a silicon substrate is studied using integrated polysilicon heater and thermistor elements. The response speed of the optical 2/spl pi/ phase shift is evaluated as the surface temperature of the device is measured with the thermistor. The effect of an applied heat sink on the device operation is studied.
Original language | English |
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Pages (from-to) | 1005-1006 |
Number of pages | 2 |
Journal | Electronics Letters |
Volume | 32 |
Issue number | 11 |
DOIs | |
Publication status | Published - 1996 |
MoE publication type | A1 Journal article-refereed |