Abstract
A temperature controlled integrated optical ring resonator processed on a silicon substrate is studied using integrated polysilicon heater and thermistor elements. The response speed of the optical 2/spl pi/ phase shift is evaluated as the surface temperature of the device is measured with the thermistor. The effect of an applied heat sink on the device operation is studied.
| Original language | English |
|---|---|
| Pages (from-to) | 1005-1006 |
| Number of pages | 2 |
| Journal | Electronics Letters |
| Volume | 32 |
| Issue number | 11 |
| DOIs | |
| Publication status | Published - 1996 |
| MoE publication type | A1 Journal article-refereed |