Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes

Aapo Varpula, Andrey Timofeev, Andrey Shchepetov, Kestutis Grigoras, Juha Hassel, Jouni Ahopelto, Markku Ylilammi, Mika Prunnila

    Research output: Contribution to conferenceConference articleScientific

    Original languageEnglish
    Publication statusPublished - 2017
    MoE publication typeNot Eligible
    Event2017 E-MRS Spring Meeting and Exhibit - Strasbourg, France
    Duration: 22 May 201726 May 2017

    Conference

    Conference2017 E-MRS Spring Meeting and Exhibit
    CountryFrance
    CityStrasbourg
    Period22/05/1726/05/17

    Keywords

    • OtaNano

    Equipment

  • Cite this

    Varpula, A., Timofeev, A., Shchepetov, A., Grigoras, K., Hassel, J., Ahopelto, J., Ylilammi, M., & Prunnila, M. (2017). Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes. Paper presented at 2017 E-MRS Spring Meeting and Exhibit, Strasbourg, France.