Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes

Aapo Varpula, Andrey Timofeev, Andrey Shchepetov, Kestutis Grigoras, Juha Hassel, Jouni Ahopelto, Markku Ylilammi, Mika Prunnila

Research output: Contribution to conferenceConference articleScientific

Original languageEnglish
Publication statusPublished - 2017
Event2017 E-MRS Spring Meeting and Exhibit - Strasbourg, France
Duration: 22 May 201726 May 2017

Conference

Conference2017 E-MRS Spring Meeting and Exhibit
CountryFrance
CityStrasbourg
Period22/05/1726/05/17

Cite this

Varpula, A., Timofeev, A., Shchepetov, A., Grigoras, K., Hassel, J., Ahopelto, J., ... Prunnila, M. (2017). Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes. Paper presented at 2017 E-MRS Spring Meeting and Exhibit, Strasbourg, France.
Varpula, Aapo ; Timofeev, Andrey ; Shchepetov, Andrey ; Grigoras, Kestutis ; Hassel, Juha ; Ahopelto, Jouni ; Ylilammi, Markku ; Prunnila, Mika. / Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes. Paper presented at 2017 E-MRS Spring Meeting and Exhibit, Strasbourg, France.
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title = "Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes",
author = "Aapo Varpula and Andrey Timofeev and Andrey Shchepetov and Kestutis Grigoras and Juha Hassel and Jouni Ahopelto and Markku Ylilammi and Mika Prunnila",
note = "Project code: 108104; 2017 E-MRS Spring Meeting and Exhibit ; Conference date: 22-05-2017 Through 26-05-2017",
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Varpula, A, Timofeev, A, Shchepetov, A, Grigoras, K, Hassel, J, Ahopelto, J, Ylilammi, M & Prunnila, M 2017, 'Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes' Paper presented at 2017 E-MRS Spring Meeting and Exhibit, Strasbourg, France, 22/05/17 - 26/05/17, .

Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes. / Varpula, Aapo; Timofeev, Andrey; Shchepetov, Andrey; Grigoras, Kestutis; Hassel, Juha; Ahopelto, Jouni; Ylilammi, Markku; Prunnila, Mika.

2017. Paper presented at 2017 E-MRS Spring Meeting and Exhibit, Strasbourg, France.

Research output: Contribution to conferenceConference articleScientific

TY - CONF

T1 - Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes

AU - Varpula, Aapo

AU - Timofeev, Andrey

AU - Shchepetov, Andrey

AU - Grigoras, Kestutis

AU - Hassel, Juha

AU - Ahopelto, Jouni

AU - Ylilammi, Markku

AU - Prunnila, Mika

N1 - Project code: 108104

PY - 2017

Y1 - 2017

M3 - Conference article

ER -

Varpula A, Timofeev A, Shchepetov A, Grigoras K, Hassel J, Ahopelto J et al. Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes. 2017. Paper presented at 2017 E-MRS Spring Meeting and Exhibit, Strasbourg, France.