Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes

Aapo Varpula; Andrey Timofeev; Andrey Shchepetov; Kestutis Grigoras; Juha Hassel; Jouni Ahopelto; Markku Ylilammi; Mika Prunnila

Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes

Aapo Varpula
, Andrey Timofeev
, Andrey Shchepetov
, Kestutis Grigoras
, Juha Hassel
, Jouni Ahopelto
, Markku Ylilammi
, Mika Prunnila

Research output: Contribution to conference › Conference article › Scientific

Original language	English
Publication status	Published - 2017
MoE publication type	Not Eligible
Event	2017 E-MRS Spring Meeting and Exhibit - Strasbourg, France Duration: 22 May 2017 → 26 May 2017

Conference

Conference	2017 E-MRS Spring Meeting and Exhibit
Country/Territory	France
City	Strasbourg
Period	22/05/17 → 26/05/17

Keywords

OtaNano

OtaNano
VTT Technical Research Centre of Finland
Facility/equipment: Facility

Cite this

@conference{acbe9be84b6c4c22a437a01a0f3a6297,

title = "Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes",

keywords = "OtaNano",

author = "Aapo Varpula and Andrey Timofeev and Andrey Shchepetov and Kestutis Grigoras and Juha Hassel and Jouni Ahopelto and Markku Ylilammi and Mika Prunnila",

note = "Project code: 108104; 2017 E-MRS Spring Meeting and Exhibit ; Conference date: 22-05-2017 Through 26-05-2017",

year = "2017",

language = "English",

}

TY - CONF

T1 - Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes

AU - Varpula, Aapo

AU - Timofeev, Andrey

AU - Shchepetov, Andrey

AU - Grigoras, Kestutis

AU - Hassel, Juha

AU - Ahopelto, Jouni

AU - Ylilammi, Markku

AU - Prunnila, Mika

N1 - Project code: 108104

PY - 2017

Y1 - 2017

KW - OtaNano

M3 - Conference article

T2 - 2017 E-MRS Spring Meeting and Exhibit

Y2 - 22 May 2017 through 26 May 2017

ER -

Thermoelectric bolometers based on heavily doped ultra-thin silicon membranes

Conference

Keywords

Equipment

OtaNano

Cite this