Thermoelectric bolometers based on silicon membranes

Aapo Varpula, Andrey V. Timofeev, Andrey Shchepetov, Kestutis Grigoras, Jouni Ahopelto, Mika Prunnila

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

State-of-the-art high performance IR sensing and imaging systems utilize highly expensive photodetector technology, which requires exotic and toxic materials and cooling. Cost-effective alternatives, uncooled bolometer detectors, are widely used in commercial long-wave IR (LWIR) systems. Compared to the cooled detectors they are much slower and have approximately an order of magnitude lower detectivity in the LWIR. We present uncooled bolometer technology which is foreseen to be capable of narrowing the gap between the cooled and uncooled technologies. The proposed technology is based on ultra-thin silicon membranes, the thermal conductivity and electrical properties of which can be controlled by membrane thickness and doping, respectively. The thermal signal is transduced into electric voltage using thermocouple consisting of highly-doped n and p type Si beams. Reducing the thickness of the Si membrane improves the performance (i.e. sensitivity and speed) as thermal conductivity and thermal mass of Si membrane decreases with decreasing thickness. Based on experimental data we estimate the performance of these uncooled thermoelectric bolometers.
Original languageEnglish
Title of host publicationSmart Sensors, Actuators, and MEMS VIII
EditorsMika Prunnila, Luis Fonseca, Erwin Peiner
PublisherInternational Society for Optics and Photonics SPIE
Volume10246
ISBN (Electronic)9781510609938
ISBN (Print)9781510609938
DOIs
Publication statusPublished - 1 Jan 2017
MoE publication typeA4 Article in a conference publication
EventSmart Sensors, Actuators, and MEMS VIII - Barcelona, Spain
Duration: 8 May 201711 May 2017

Publication series

SeriesProceedings of SPIE
Volume10246
ISSN0277-786X

Conference

ConferenceSmart Sensors, Actuators, and MEMS VIII
CountrySpain
CityBarcelona
Period8/05/1711/05/17

Fingerprint

Bolometer
Bolometers
bolometers
Silicon
Membrane
membranes
Membranes
silicon
Thermal Conductivity
planetary waves
Thermal conductivity
thermal conductivity
Detector
Detectors
Toxic materials
detectors
Electrical Properties
Photodetector
thermocouples
Thermocouples

Keywords

  • bolometers
  • silicon
  • thermoelectric materials
  • long wavelength infrared
  • sensors
  • photodetectors
  • doping
  • imaging systems
  • infrared detection
  • membrane
  • thermal detector
  • long-wave infrared
  • thermocouple
  • thermoelectric

Cite this

Varpula, A., Timofeev, A. V., Shchepetov, A., Grigoras, K., Ahopelto, J., & Prunnila, M. (2017). Thermoelectric bolometers based on silicon membranes. In M. Prunnila, L. Fonseca, & E. Peiner (Eds.), Smart Sensors, Actuators, and MEMS VIII (Vol. 10246). [102460L] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 10246 https://doi.org/10.1117/12.2266554
Varpula, Aapo ; Timofeev, Andrey V. ; Shchepetov, Andrey ; Grigoras, Kestutis ; Ahopelto, Jouni ; Prunnila, Mika. / Thermoelectric bolometers based on silicon membranes. Smart Sensors, Actuators, and MEMS VIII. editor / Mika Prunnila ; Luis Fonseca ; Erwin Peiner. Vol. 10246 International Society for Optics and Photonics SPIE, 2017. (Proceedings of SPIE, Vol. 10246).
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abstract = "State-of-the-art high performance IR sensing and imaging systems utilize highly expensive photodetector technology, which requires exotic and toxic materials and cooling. Cost-effective alternatives, uncooled bolometer detectors, are widely used in commercial long-wave IR (LWIR) systems. Compared to the cooled detectors they are much slower and have approximately an order of magnitude lower detectivity in the LWIR. We present uncooled bolometer technology which is foreseen to be capable of narrowing the gap between the cooled and uncooled technologies. The proposed technology is based on ultra-thin silicon membranes, the thermal conductivity and electrical properties of which can be controlled by membrane thickness and doping, respectively. The thermal signal is transduced into electric voltage using thermocouple consisting of highly-doped n and p type Si beams. Reducing the thickness of the Si membrane improves the performance (i.e. sensitivity and speed) as thermal conductivity and thermal mass of Si membrane decreases with decreasing thickness. Based on experimental data we estimate the performance of these uncooled thermoelectric bolometers.",
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author = "Aapo Varpula and Timofeev, {Andrey V.} and Andrey Shchepetov and Kestutis Grigoras and Jouni Ahopelto and Mika Prunnila",
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Varpula, A, Timofeev, AV, Shchepetov, A, Grigoras, K, Ahopelto, J & Prunnila, M 2017, Thermoelectric bolometers based on silicon membranes. in M Prunnila, L Fonseca & E Peiner (eds), Smart Sensors, Actuators, and MEMS VIII. vol. 10246, 102460L, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 10246, Smart Sensors, Actuators, and MEMS VIII, Barcelona, Spain, 8/05/17. https://doi.org/10.1117/12.2266554

Thermoelectric bolometers based on silicon membranes. / Varpula, Aapo; Timofeev, Andrey V.; Shchepetov, Andrey; Grigoras, Kestutis; Ahopelto, Jouni; Prunnila, Mika.

Smart Sensors, Actuators, and MEMS VIII. ed. / Mika Prunnila; Luis Fonseca; Erwin Peiner. Vol. 10246 International Society for Optics and Photonics SPIE, 2017. 102460L (Proceedings of SPIE, Vol. 10246).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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Varpula A, Timofeev AV, Shchepetov A, Grigoras K, Ahopelto J, Prunnila M. Thermoelectric bolometers based on silicon membranes. In Prunnila M, Fonseca L, Peiner E, editors, Smart Sensors, Actuators, and MEMS VIII. Vol. 10246. International Society for Optics and Photonics SPIE. 2017. 102460L. (Proceedings of SPIE, Vol. 10246). https://doi.org/10.1117/12.2266554