Abstract
| Original language | English |
|---|---|
| Title of host publication | Smart Sensors, Actuators, and MEMS VIII |
| Editors | Mika Prunnila, Luis Fonseca, Erwin Peiner |
| Publisher | International Society for Optics and Photonics SPIE |
| Volume | 10246 |
| ISBN (Electronic) | 9781510609938 |
| ISBN (Print) | 9781510609938 |
| DOIs | |
| Publication status | Published - 1 Jan 2017 |
| MoE publication type | A4 Article in a conference publication |
| Event | Smart Sensors, Actuators, and MEMS VIII - Barcelona, Spain Duration: 8 May 2017 → 11 May 2017 |
Publication series
| Name | Proceedings of SPIE |
|---|---|
| Publisher | SPIE |
| Volume | 10246 |
| ISSN (Print) | 0277-786X |
Conference
| Conference | Smart Sensors, Actuators, and MEMS VIII |
|---|---|
| Country | Spain |
| City | Barcelona |
| Period | 8/05/17 → 11/05/17 |
Fingerprint
Keywords
- bolometers
- silicon
- thermoelectric materials
- long wavelength infrared
- sensors
- photodetectors
- doping
- imaging systems
- infrared detection
- membrane
- thermal detector
- long-wave infrared
- thermocouple
- thermoelectric
Cite this
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Thermoelectric bolometers based on silicon membranes. / Varpula, Aapo; Timofeev, Andrey V.; Shchepetov, Andrey; Grigoras, Kestutis; Ahopelto, Jouni; Prunnila, Mika.
Smart Sensors, Actuators, and MEMS VIII. ed. / Mika Prunnila; Luis Fonseca; Erwin Peiner. Vol. 10246 International Society for Optics and Photonics SPIE, 2017. 102460L (Proceedings of SPIE, Vol. 10246).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
TY - GEN
T1 - Thermoelectric bolometers based on silicon membranes
AU - Varpula, Aapo
AU - Timofeev, Andrey V.
AU - Shchepetov, Andrey
AU - Grigoras, Kestutis
AU - Ahopelto, Jouni
AU - Prunnila, Mika
N1 - Project code: 108104
PY - 2017/1/1
Y1 - 2017/1/1
N2 - State-of-the-art high performance IR sensing and imaging systems utilize highly expensive photodetector technology, which requires exotic and toxic materials and cooling. Cost-effective alternatives, uncooled bolometer detectors, are widely used in commercial long-wave IR (LWIR) systems. Compared to the cooled detectors they are much slower and have approximately an order of magnitude lower detectivity in the LWIR. We present uncooled bolometer technology which is foreseen to be capable of narrowing the gap between the cooled and uncooled technologies. The proposed technology is based on ultra-thin silicon membranes, the thermal conductivity and electrical properties of which can be controlled by membrane thickness and doping, respectively. The thermal signal is transduced into electric voltage using thermocouple consisting of highly-doped n and p type Si beams. Reducing the thickness of the Si membrane improves the performance (i.e. sensitivity and speed) as thermal conductivity and thermal mass of Si membrane decreases with decreasing thickness. Based on experimental data we estimate the performance of these uncooled thermoelectric bolometers.
AB - State-of-the-art high performance IR sensing and imaging systems utilize highly expensive photodetector technology, which requires exotic and toxic materials and cooling. Cost-effective alternatives, uncooled bolometer detectors, are widely used in commercial long-wave IR (LWIR) systems. Compared to the cooled detectors they are much slower and have approximately an order of magnitude lower detectivity in the LWIR. We present uncooled bolometer technology which is foreseen to be capable of narrowing the gap between the cooled and uncooled technologies. The proposed technology is based on ultra-thin silicon membranes, the thermal conductivity and electrical properties of which can be controlled by membrane thickness and doping, respectively. The thermal signal is transduced into electric voltage using thermocouple consisting of highly-doped n and p type Si beams. Reducing the thickness of the Si membrane improves the performance (i.e. sensitivity and speed) as thermal conductivity and thermal mass of Si membrane decreases with decreasing thickness. Based on experimental data we estimate the performance of these uncooled thermoelectric bolometers.
KW - bolometers
KW - silicon
KW - thermoelectric materials
KW - long wavelength infrared
KW - sensors
KW - photodetectors
KW - doping
KW - imaging systems
KW - infrared detection
KW - membrane
KW - thermal detector
KW - long-wave infrared
KW - thermocouple
KW - thermoelectric
UR - http://www.scopus.com/inward/record.url?scp=85025804412&partnerID=8YFLogxK
U2 - 10.1117/12.2266554
DO - 10.1117/12.2266554
M3 - Conference article in proceedings
SN - 9781510609938
VL - 10246
T3 - Proceedings of SPIE
BT - Smart Sensors, Actuators, and MEMS VIII
A2 - Prunnila, Mika
A2 - Fonseca, Luis
A2 - Peiner, Erwin
PB - International Society for Optics and Photonics SPIE
ER -