Thermoelectric thermal detectors based on ultra-thin heavily doped single-crystal silicon membranes

Aapo Varpula, Andrey Timofeev, Andrey Shchepetov, Kestutis Grigoras, Juha; Hassel, Jouni Ahopelto, Markku Ylilammi, Mika Prunnila

    Research output: Contribution to journalArticleScientificpeer-review

    14 Citations (Scopus)

    Abstract

    We present thermal detectors based on 40?nm-thick strain tuned single crystalline silicon membranes shaped into a heater area supported by narrow n- and p-doped beams, which also operate as a thermocouple. The electro-thermal characterization of the devices reveals a noise equivalent power of 13 pW/Hz1/2 and a thermal time constant of 2.5?ms. The high sensitivity of the devices is due to the high Seebeck coefficient of 0.39?mV/K and reduction of thermal conductivity of the Si beams from the bulk value. The performance enables fast and sensitive detection of low levels of thermal power and infrared radiation at room temperature. The devices operate in the Johnson-Nyquist noise limit of the thermocouple, and the performance improvement towards the operation close to the temperature fluctuation limit is discussed.
    Original languageEnglish
    Article number262101
    JournalApplied Physics Letters
    Volume110
    Issue number26
    DOIs
    Publication statusPublished - 26 Jun 2017
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    doped crystals
    thermocouples
    membranes
    detectors
    single crystals
    silicon
    turbogenerators
    infrared radiation
    Seebeck effect
    heaters
    time constant
    thermal conductivity
    sensitivity
    room temperature
    radiation
    temperature

    Keywords

    • thermocouples
    • silicon
    • thermal noise
    • thermoelectric devices
    • nanomembrane

    Cite this

    @article{ab748aac42ff49a2a756d0f7d019602e,
    title = "Thermoelectric thermal detectors based on ultra-thin heavily doped single-crystal silicon membranes",
    abstract = "We present thermal detectors based on 40?nm-thick strain tuned single crystalline silicon membranes shaped into a heater area supported by narrow n- and p-doped beams, which also operate as a thermocouple. The electro-thermal characterization of the devices reveals a noise equivalent power of 13 pW/Hz1/2 and a thermal time constant of 2.5?ms. The high sensitivity of the devices is due to the high Seebeck coefficient of 0.39?mV/K and reduction of thermal conductivity of the Si beams from the bulk value. The performance enables fast and sensitive detection of low levels of thermal power and infrared radiation at room temperature. The devices operate in the Johnson-Nyquist noise limit of the thermocouple, and the performance improvement towards the operation close to the temperature fluctuation limit is discussed.",
    keywords = "thermocouples, silicon, thermal noise, thermoelectric devices, nanomembrane",
    author = "Aapo Varpula and Andrey Timofeev and Andrey Shchepetov and Kestutis Grigoras and Juha; Hassel and Jouni Ahopelto and Markku Ylilammi and Mika Prunnila",
    year = "2017",
    month = "6",
    day = "26",
    doi = "10.1063/1.4989683",
    language = "English",
    volume = "110",
    journal = "Applied Physics Letters",
    issn = "0003-6951",
    number = "26",

    }

    Thermoelectric thermal detectors based on ultra-thin heavily doped single-crystal silicon membranes. / Varpula, Aapo; Timofeev, Andrey; Shchepetov, Andrey; Grigoras, Kestutis; Hassel, Juha; Ahopelto, Jouni; Ylilammi, Markku; Prunnila, Mika.

    In: Applied Physics Letters, Vol. 110, No. 26, 262101, 26.06.2017.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Thermoelectric thermal detectors based on ultra-thin heavily doped single-crystal silicon membranes

    AU - Varpula, Aapo

    AU - Timofeev, Andrey

    AU - Shchepetov, Andrey

    AU - Grigoras, Kestutis

    AU - Hassel, Juha;

    AU - Ahopelto, Jouni

    AU - Ylilammi, Markku

    AU - Prunnila, Mika

    PY - 2017/6/26

    Y1 - 2017/6/26

    N2 - We present thermal detectors based on 40?nm-thick strain tuned single crystalline silicon membranes shaped into a heater area supported by narrow n- and p-doped beams, which also operate as a thermocouple. The electro-thermal characterization of the devices reveals a noise equivalent power of 13 pW/Hz1/2 and a thermal time constant of 2.5?ms. The high sensitivity of the devices is due to the high Seebeck coefficient of 0.39?mV/K and reduction of thermal conductivity of the Si beams from the bulk value. The performance enables fast and sensitive detection of low levels of thermal power and infrared radiation at room temperature. The devices operate in the Johnson-Nyquist noise limit of the thermocouple, and the performance improvement towards the operation close to the temperature fluctuation limit is discussed.

    AB - We present thermal detectors based on 40?nm-thick strain tuned single crystalline silicon membranes shaped into a heater area supported by narrow n- and p-doped beams, which also operate as a thermocouple. The electro-thermal characterization of the devices reveals a noise equivalent power of 13 pW/Hz1/2 and a thermal time constant of 2.5?ms. The high sensitivity of the devices is due to the high Seebeck coefficient of 0.39?mV/K and reduction of thermal conductivity of the Si beams from the bulk value. The performance enables fast and sensitive detection of low levels of thermal power and infrared radiation at room temperature. The devices operate in the Johnson-Nyquist noise limit of the thermocouple, and the performance improvement towards the operation close to the temperature fluctuation limit is discussed.

    KW - thermocouples

    KW - silicon

    KW - thermal noise

    KW - thermoelectric devices

    KW - nanomembrane

    UR - http://www.scopus.com/inward/record.url?scp=85021427033&partnerID=8YFLogxK

    U2 - 10.1063/1.4989683

    DO - 10.1063/1.4989683

    M3 - Article

    VL - 110

    JO - Applied Physics Letters

    JF - Applied Physics Letters

    SN - 0003-6951

    IS - 26

    M1 - 262101

    ER -