Thermoelectric thermal detectors based on ultra-thin heavily doped single-crystal silicon membranes

Aapo Varpula, Andrey Timofeev, Andrey Shchepetov, Kestutis Grigoras, Juha; Hassel, Jouni Ahopelto, Markku Ylilammi, Mika Prunnila

Research output: Contribution to journalArticleScientificpeer-review

13 Citations (Scopus)

Abstract

We present thermal detectors based on 40?nm-thick strain tuned single crystalline silicon membranes shaped into a heater area supported by narrow n- and p-doped beams, which also operate as a thermocouple. The electro-thermal characterization of the devices reveals a noise equivalent power of 13 pW/Hz1/2 and a thermal time constant of 2.5?ms. The high sensitivity of the devices is due to the high Seebeck coefficient of 0.39?mV/K and reduction of thermal conductivity of the Si beams from the bulk value. The performance enables fast and sensitive detection of low levels of thermal power and infrared radiation at room temperature. The devices operate in the Johnson-Nyquist noise limit of the thermocouple, and the performance improvement towards the operation close to the temperature fluctuation limit is discussed.
Original languageEnglish
Article number262101
JournalApplied Physics Letters
Volume110
Issue number26
DOIs
Publication statusPublished - 26 Jun 2017
MoE publication typeA1 Journal article-refereed

Fingerprint

doped crystals
thermocouples
membranes
detectors
single crystals
silicon
turbogenerators
infrared radiation
Seebeck effect
heaters
time constant
thermal conductivity
sensitivity
room temperature
radiation
temperature

Keywords

  • thermocouples
  • silicon
  • thermal noise
  • thermoelectric devices
  • nanomembrane

Cite this

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title = "Thermoelectric thermal detectors based on ultra-thin heavily doped single-crystal silicon membranes",
abstract = "We present thermal detectors based on 40?nm-thick strain tuned single crystalline silicon membranes shaped into a heater area supported by narrow n- and p-doped beams, which also operate as a thermocouple. The electro-thermal characterization of the devices reveals a noise equivalent power of 13 pW/Hz1/2 and a thermal time constant of 2.5?ms. The high sensitivity of the devices is due to the high Seebeck coefficient of 0.39?mV/K and reduction of thermal conductivity of the Si beams from the bulk value. The performance enables fast and sensitive detection of low levels of thermal power and infrared radiation at room temperature. The devices operate in the Johnson-Nyquist noise limit of the thermocouple, and the performance improvement towards the operation close to the temperature fluctuation limit is discussed.",
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Thermoelectric thermal detectors based on ultra-thin heavily doped single-crystal silicon membranes. / Varpula, Aapo; Timofeev, Andrey; Shchepetov, Andrey; Grigoras, Kestutis; Hassel, Juha; Ahopelto, Jouni; Ylilammi, Markku; Prunnila, Mika.

In: Applied Physics Letters, Vol. 110, No. 26, 262101, 26.06.2017.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Thermoelectric thermal detectors based on ultra-thin heavily doped single-crystal silicon membranes

AU - Varpula, Aapo

AU - Timofeev, Andrey

AU - Shchepetov, Andrey

AU - Grigoras, Kestutis

AU - Hassel, Juha;

AU - Ahopelto, Jouni

AU - Ylilammi, Markku

AU - Prunnila, Mika

PY - 2017/6/26

Y1 - 2017/6/26

N2 - We present thermal detectors based on 40?nm-thick strain tuned single crystalline silicon membranes shaped into a heater area supported by narrow n- and p-doped beams, which also operate as a thermocouple. The electro-thermal characterization of the devices reveals a noise equivalent power of 13 pW/Hz1/2 and a thermal time constant of 2.5?ms. The high sensitivity of the devices is due to the high Seebeck coefficient of 0.39?mV/K and reduction of thermal conductivity of the Si beams from the bulk value. The performance enables fast and sensitive detection of low levels of thermal power and infrared radiation at room temperature. The devices operate in the Johnson-Nyquist noise limit of the thermocouple, and the performance improvement towards the operation close to the temperature fluctuation limit is discussed.

AB - We present thermal detectors based on 40?nm-thick strain tuned single crystalline silicon membranes shaped into a heater area supported by narrow n- and p-doped beams, which also operate as a thermocouple. The electro-thermal characterization of the devices reveals a noise equivalent power of 13 pW/Hz1/2 and a thermal time constant of 2.5?ms. The high sensitivity of the devices is due to the high Seebeck coefficient of 0.39?mV/K and reduction of thermal conductivity of the Si beams from the bulk value. The performance enables fast and sensitive detection of low levels of thermal power and infrared radiation at room temperature. The devices operate in the Johnson-Nyquist noise limit of the thermocouple, and the performance improvement towards the operation close to the temperature fluctuation limit is discussed.

KW - thermocouples

KW - silicon

KW - thermal noise

KW - thermoelectric devices

KW - nanomembrane

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JO - Applied Physics Letters

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