Thickness measurement of thin polymer films by total internal reflection Raman and attenuated total reflection infrared spectroscopy

Antti O. Kivioja, Anna-Stiina Jääskeläinen (Corresponding Author), Ville Ahtee, Tapani Vuorinen

    Research output: Contribution to journalArticleScientificpeer-review

    10 Citations (Scopus)

    Abstract

    For the first time total internal reflection (TIR) Raman spectroscopy was utilized for thickness measurements of thin isotropic polystyrene films on polypropylene substrate. In the presented method, the band intensity ratios of polystyrene to polypropylene were defined from the spectra, and the film thicknesses in a range from 50 nm to 350 nm were calculated mathematically from these ratios. The quantitativeness of the method was validated by applying the same principle to attenuated total reflection infrared (ATR-IR) spectroscopy and comparing the results to values obtained by ellipsometry and a spin-coating model. The results showed that the novel and non-invasive TIR Raman method reveals the film thickness quantitatively, and the method is applicable for thin films on soft substrates with similar refractive indices.
    Original languageEnglish
    Pages (from-to)1-9
    Number of pages9
    JournalVibrational Spectroscopy
    Volume61
    Issue number1
    DOIs
    Publication statusPublished - 2012
    MoE publication typeA1 Journal article-refereed

    Keywords

    • Total internal reflection Raman spectroscopy
    • thin film
    • attenuated total reflection infrared spectroscopy
    • ellipsometry
    • thickness
    • ultra-thin film

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