Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra

Mari Laamanen (Corresponding Author), Martti Blomberg, Riikka Puurunen, Akseli Miranto, Hannu Kattelus

    Research output: Contribution to journalArticleScientificpeer-review

    6 Citations (Scopus)

    Abstract

    Two thin film absorbers are presented in this paper: one for the visible (VIS) and the near-infrared (NIR) spectra in the wavelength range of 350…1000 nm, the other for the short-wavelength infrared (SWIR) spectrum in the wavelength range of 1200…2000 nm. First, the refractive indices were determined for Al2O3 films prepared with atomic layer deposition (ALD), and amorphous Mo–Si–N films prepared with reactive sputter deposition. The measurements were made by spectroscopic reflectometry, ellipsometry, gonioreflectometry, and double-beam transfer standard spectrometry. The results were utilised in the design of the absorbers. The absorbers were manufactured as well, and they proved to have high absorption over their whole working spectra varying from 93.4% at the minimum to 99.9% at the maximum. The absorbers are applicable, e.g. to MEMS thermopile detectors.
    Original languageEnglish
    Pages (from-to)210-214
    Number of pages5
    JournalSensors and Actuators A: Physical
    Volume162
    Issue number2
    DOIs
    Publication statusPublished - 2010
    MoE publication typeA1 Journal article-refereed
    Event23rd Conference EUROSENSORS 2009 - Lausanne, Switzerland
    Duration: 6 Sep 20099 Sep 2009

    Fingerprint

    absorbers
    infrared spectra
    Infrared radiation
    Thin films
    Wavelength
    thin films
    wavelengths
    Thermopiles
    Sputter deposition
    Spectroscopic ellipsometry
    Atomic layer deposition
    Amorphous films
    thermopiles
    Spectrometry
    MEMS
    Refractive index
    atomic layer epitaxy
    ellipsometry
    microelectromechanical systems
    Detectors

    Keywords

    • Absorber
    • Infrared
    • MEMS
    • Mo-Si-N
    • Refractive index
    • Visible light

    Cite this

    Laamanen, Mari ; Blomberg, Martti ; Puurunen, Riikka ; Miranto, Akseli ; Kattelus, Hannu. / Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra. In: Sensors and Actuators A: Physical. 2010 ; Vol. 162, No. 2. pp. 210-214.
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    abstract = "Two thin film absorbers are presented in this paper: one for the visible (VIS) and the near-infrared (NIR) spectra in the wavelength range of 350…1000 nm, the other for the short-wavelength infrared (SWIR) spectrum in the wavelength range of 1200…2000 nm. First, the refractive indices were determined for Al2O3 films prepared with atomic layer deposition (ALD), and amorphous Mo–Si–N films prepared with reactive sputter deposition. The measurements were made by spectroscopic reflectometry, ellipsometry, gonioreflectometry, and double-beam transfer standard spectrometry. The results were utilised in the design of the absorbers. The absorbers were manufactured as well, and they proved to have high absorption over their whole working spectra varying from 93.4{\%} at the minimum to 99.9{\%} at the maximum. The absorbers are applicable, e.g. to MEMS thermopile detectors.",
    keywords = "Absorber, Infrared, MEMS, Mo-Si-N, Refractive index, Visible light",
    author = "Mari Laamanen and Martti Blomberg and Riikka Puurunen and Akseli Miranto and Hannu Kattelus",
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    doi = "10.1016/j.sna.2010.02.015",
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    Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra. / Laamanen, Mari (Corresponding Author); Blomberg, Martti; Puurunen, Riikka; Miranto, Akseli; Kattelus, Hannu.

    In: Sensors and Actuators A: Physical, Vol. 162, No. 2, 2010, p. 210-214.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra

    AU - Laamanen, Mari

    AU - Blomberg, Martti

    AU - Puurunen, Riikka

    AU - Miranto, Akseli

    AU - Kattelus, Hannu

    PY - 2010

    Y1 - 2010

    N2 - Two thin film absorbers are presented in this paper: one for the visible (VIS) and the near-infrared (NIR) spectra in the wavelength range of 350…1000 nm, the other for the short-wavelength infrared (SWIR) spectrum in the wavelength range of 1200…2000 nm. First, the refractive indices were determined for Al2O3 films prepared with atomic layer deposition (ALD), and amorphous Mo–Si–N films prepared with reactive sputter deposition. The measurements were made by spectroscopic reflectometry, ellipsometry, gonioreflectometry, and double-beam transfer standard spectrometry. The results were utilised in the design of the absorbers. The absorbers were manufactured as well, and they proved to have high absorption over their whole working spectra varying from 93.4% at the minimum to 99.9% at the maximum. The absorbers are applicable, e.g. to MEMS thermopile detectors.

    AB - Two thin film absorbers are presented in this paper: one for the visible (VIS) and the near-infrared (NIR) spectra in the wavelength range of 350…1000 nm, the other for the short-wavelength infrared (SWIR) spectrum in the wavelength range of 1200…2000 nm. First, the refractive indices were determined for Al2O3 films prepared with atomic layer deposition (ALD), and amorphous Mo–Si–N films prepared with reactive sputter deposition. The measurements were made by spectroscopic reflectometry, ellipsometry, gonioreflectometry, and double-beam transfer standard spectrometry. The results were utilised in the design of the absorbers. The absorbers were manufactured as well, and they proved to have high absorption over their whole working spectra varying from 93.4% at the minimum to 99.9% at the maximum. The absorbers are applicable, e.g. to MEMS thermopile detectors.

    KW - Absorber

    KW - Infrared

    KW - MEMS

    KW - Mo-Si-N

    KW - Refractive index

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