Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra

Mari Laamanen; Martti Blomberg; Riikka Puurunen; Akseli Miranto; Hannu Kattelus

doi:10.1016/j.sna.2010.02.015

Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra

Mari Laamanen (Corresponding Author), Martti Blomberg, Riikka Puurunen, Akseli Miranto, Hannu Kattelus

Research output: Contribution to journal › Article › Scientific › peer-review

8 Citations (Scopus)

Abstract

Two thin film absorbers are presented in this paper: one for the visible (VIS) and the near-infrared (NIR) spectra in the wavelength range of 350…1000 nm, the other for the short-wavelength infrared (SWIR) spectrum in the wavelength range of 1200…2000 nm. First, the refractive indices were determined for Al₂O₃ films prepared with atomic layer deposition (ALD), and amorphous Mo–Si–N films prepared with reactive sputter deposition. The measurements were made by spectroscopic reflectometry, ellipsometry, gonioreflectometry, and double-beam transfer standard spectrometry. The results were utilised in the design of the absorbers. The absorbers were manufactured as well, and they proved to have high absorption over their whole working spectra varying from 93.4% at the minimum to 99.9% at the maximum. The absorbers are applicable, e.g. to MEMS thermopile detectors.

Original language	English
Pages (from-to)	210-214
Number of pages	5
Journal	Sensors and Actuators A: Physical
Volume	162
Issue number	2
DOIs	https://doi.org/10.1016/j.sna.2010.02.015
Publication status	Published - 2010
MoE publication type	A1 Journal article-refereed
Event	23rd Conference EUROSENSORS 2009 - Lausanne, Switzerland Duration: 6 Sept 2009 → 9 Sept 2009

Keywords

Absorber
Infrared
MEMS
Mo-Si-N
Refractive index
Visible light

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10.1016/j.sna.2010.02.015

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title = "Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra",

abstract = "Two thin film absorbers are presented in this paper: one for the visible (VIS) and the near-infrared (NIR) spectra in the wavelength range of 350…1000 nm, the other for the short-wavelength infrared (SWIR) spectrum in the wavelength range of 1200…2000 nm. First, the refractive indices were determined for Al2O3 films prepared with atomic layer deposition (ALD), and amorphous Mo–Si–N films prepared with reactive sputter deposition. The measurements were made by spectroscopic reflectometry, ellipsometry, gonioreflectometry, and double-beam transfer standard spectrometry. The results were utilised in the design of the absorbers. The absorbers were manufactured as well, and they proved to have high absorption over their whole working spectra varying from 93.4% at the minimum to 99.9% at the maximum. The absorbers are applicable, e.g. to MEMS thermopile detectors.",

keywords = "Absorber, Infrared, MEMS, Mo-Si-N, Refractive index, Visible light",

author = "Mari Laamanen and Martti Blomberg and Riikka Puurunen and Akseli Miranto and Hannu Kattelus",

year = "2010",

doi = "10.1016/j.sna.2010.02.015",

language = "English",

volume = "162",

pages = "210--214",

journal = "Sensors and Actuators A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

number = "2",

note = "23rd Conference EUROSENSORS 2009, Eurosensors XXIII ; Conference date: 06-09-2009 Through 09-09-2009",

}

TY - JOUR

T1 - Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra

AU - Laamanen, Mari

AU - Blomberg, Martti

AU - Puurunen, Riikka

AU - Miranto, Akseli

AU - Kattelus, Hannu

PY - 2010

Y1 - 2010

N2 - Two thin film absorbers are presented in this paper: one for the visible (VIS) and the near-infrared (NIR) spectra in the wavelength range of 350…1000 nm, the other for the short-wavelength infrared (SWIR) spectrum in the wavelength range of 1200…2000 nm. First, the refractive indices were determined for Al2O3 films prepared with atomic layer deposition (ALD), and amorphous Mo–Si–N films prepared with reactive sputter deposition. The measurements were made by spectroscopic reflectometry, ellipsometry, gonioreflectometry, and double-beam transfer standard spectrometry. The results were utilised in the design of the absorbers. The absorbers were manufactured as well, and they proved to have high absorption over their whole working spectra varying from 93.4% at the minimum to 99.9% at the maximum. The absorbers are applicable, e.g. to MEMS thermopile detectors.

AB - Two thin film absorbers are presented in this paper: one for the visible (VIS) and the near-infrared (NIR) spectra in the wavelength range of 350…1000 nm, the other for the short-wavelength infrared (SWIR) spectrum in the wavelength range of 1200…2000 nm. First, the refractive indices were determined for Al2O3 films prepared with atomic layer deposition (ALD), and amorphous Mo–Si–N films prepared with reactive sputter deposition. The measurements were made by spectroscopic reflectometry, ellipsometry, gonioreflectometry, and double-beam transfer standard spectrometry. The results were utilised in the design of the absorbers. The absorbers were manufactured as well, and they proved to have high absorption over their whole working spectra varying from 93.4% at the minimum to 99.9% at the maximum. The absorbers are applicable, e.g. to MEMS thermopile detectors.

KW - Absorber

KW - Infrared

KW - MEMS

KW - Mo-Si-N

KW - Refractive index

KW - Visible light

U2 - 10.1016/j.sna.2010.02.015

DO - 10.1016/j.sna.2010.02.015

M3 - Article

SN - 0924-4247

VL - 162

SP - 210

EP - 214

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 2

T2 - 23rd Conference EUROSENSORS 2009

Y2 - 6 September 2009 through 9 September 2009

ER -

Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra

Abstract

Keywords

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