Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra

Mari Laamanen, Martti Blomberg, Riikka Puurunen, Akseli Miranto, Hannu Kattelus

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings of the Eurosensors XXIII conference
Pages393-396
DOIs
Publication statusPublished - 2009
MoE publication typeA4 Article in a conference publication
Event23rd Conference EUROSENSORS 2009 - Lausanne, Switzerland
Duration: 6 Sep 20099 Sep 2009

Publication series

SeriesProcedia Chemistry
Number1
Volume1
ISSN1876-6196

Conference

Conference23rd Conference EUROSENSORS 2009
Abbreviated titleEurosensors XXIII
CountrySwitzerland
CityLausanne
Period6/09/099/09/09

Keywords

  • Absorber
  • infrared
  • ALD
  • Mo-Si-N
  • refractive index
  • MEMS

Cite this

Laamanen, M., Blomberg, M., Puurunen, R., Miranto, A., & Kattelus, H. (2009). Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra. In Proceedings of the Eurosensors XXIII conference (pp. 393-396). Procedia Chemistry, No. 1, Vol.. 1 https://doi.org/10.1016/j.proche.2009.07.098
Laamanen, Mari ; Blomberg, Martti ; Puurunen, Riikka ; Miranto, Akseli ; Kattelus, Hannu. / Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra. Proceedings of the Eurosensors XXIII conference. 2009. pp. 393-396 (Procedia Chemistry; No. 1, Vol. 1).
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title = "Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra",
keywords = "Absorber, infrared, ALD, Mo-Si-N, refractive index, MEMS",
author = "Mari Laamanen and Martti Blomberg and Riikka Puurunen and Akseli Miranto and Hannu Kattelus",
year = "2009",
doi = "10.1016/j.proche.2009.07.098",
language = "English",
series = "Procedia Chemistry",
number = "1",
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booktitle = "Proceedings of the Eurosensors XXIII conference",

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Laamanen, M, Blomberg, M, Puurunen, R, Miranto, A & Kattelus, H 2009, Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra. in Proceedings of the Eurosensors XXIII conference. Procedia Chemistry, no. 1, vol. 1, pp. 393-396, 23rd Conference EUROSENSORS 2009, Lausanne, Switzerland, 6/09/09. https://doi.org/10.1016/j.proche.2009.07.098

Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra. / Laamanen, Mari; Blomberg, Martti; Puurunen, Riikka; Miranto, Akseli; Kattelus, Hannu.

Proceedings of the Eurosensors XXIII conference. 2009. p. 393-396 (Procedia Chemistry; No. 1, Vol. 1).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra

AU - Laamanen, Mari

AU - Blomberg, Martti

AU - Puurunen, Riikka

AU - Miranto, Akseli

AU - Kattelus, Hannu

PY - 2009

Y1 - 2009

KW - Absorber

KW - infrared

KW - ALD

KW - Mo-Si-N

KW - refractive index

KW - MEMS

U2 - 10.1016/j.proche.2009.07.098

DO - 10.1016/j.proche.2009.07.098

M3 - Conference article in proceedings

T3 - Procedia Chemistry

SP - 393

EP - 396

BT - Proceedings of the Eurosensors XXIII conference

ER -

Laamanen M, Blomberg M, Puurunen R, Miranto A, Kattelus H. Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra. In Proceedings of the Eurosensors XXIII conference. 2009. p. 393-396. (Procedia Chemistry; No. 1, Vol. 1). https://doi.org/10.1016/j.proche.2009.07.098