@inproceedings{1d1101fc057b4372ad05c48128ebfec2,
title = "Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra",
keywords = "Absorber, infrared, ALD, Mo-Si-N, refractive index, MEMS",
author = "Mari Laamanen and Martti Blomberg and Riikka Puurunen and Akseli Miranto and Hannu Kattelus",
year = "2009",
doi = "10.1016/j.proche.2009.07.098",
language = "English",
series = "Procedia Chemistry",
publisher = "Elsevier",
number = "1",
pages = "393--396",
booktitle = "Proceedings of the Eurosensors XXIII conference",
note = "23rd Conference EUROSENSORS 2009, Eurosensors XXIII ; Conference date: 06-09-2009 Through 09-09-2009",
}