Thin-film capacitors with Tantalum-Hafnium Oxide Nanolamite insulator

Hannu Kattelus, Hannu Ronkainen, T. Kanninen, J. Skarp

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

Original language	English
Title of host publication	ESSDERC '98
Subtitle of host publication	Proceedings of the 28th European Solid-State Device Research Conference
Place of Publication	Paris
Publisher	Editions Frontières
Pages	444-446
ISBN (Print)	978-2-86332-234-5
Publication status	Published - 1998
MoE publication type	B3 Non-refereed article in conference proceedings
Event	28th European Solid-State Device Research Conference, ESSDERC '98 - Bordeaux, France Duration: 8 Sept 1998 → 10 Sept 1998

Conference	28th European Solid-State Device Research Conference, ESSDERC '98
Country/Territory	France
City	Bordeaux
Period	8/09/98 → 10/09/98

Cite this

@inproceedings{fcf204e86b864ddd92d33f2af74273fd,

title = "Thin-film capacitors with Tantalum-Hafnium Oxide Nanolamite insulator",

author = "Hannu Kattelus and Hannu Ronkainen and T. Kanninen and J. Skarp",

year = "1998",

language = "English",

isbn = "978-2-86332-234-5",

pages = "444--446",

booktitle = "ESSDERC '98",

publisher = "Editions Fronti{\`e}res",

address = "France",

note = "28th European Solid-State Device Research Conference, ESSDERC '98 ; Conference date: 08-09-1998 Through 10-09-1998",

}

Thin-film capacitors with Tantalum-Hafnium Oxide Nanolamite insulator. / Kattelus, Hannu; Ronkainen, Hannu; Kanninen, T. et al.
ESSDERC '98: Proceedings of the 28th European Solid-State Device Research Conference. Paris: Editions Frontières, 1998. p. 444-446.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

TY - GEN

T1 - Thin-film capacitors with Tantalum-Hafnium Oxide Nanolamite insulator

AU - Kattelus, Hannu

AU - Ronkainen, Hannu

AU - Kanninen, T.

AU - Skarp, J.

PY - 1998

Y1 - 1998

M3 - Conference article in proceedings

SN - 978-2-86332-234-5

SP - 444

EP - 446

BT - ESSDERC '98

PB - Editions Frontières

CY - Paris

T2 - 28th European Solid-State Device Research Conference, ESSDERC '98

Y2 - 8 September 1998 through 10 September 1998

ER -