Original language | English |
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Publication status | Published - 2017 |
Event | Joint EuroCVD 21 - Baltic ALD 15 Conference - Linköping, Sweden Duration: 11 Jun 2017 → 14 Jun 2017 |
Conference
Conference | Joint EuroCVD 21 - Baltic ALD 15 Conference |
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Country/Territory | Sweden |
City | Linköping |
Period | 11/06/17 → 14/06/17 |
Keywords
- ALD
- atomic layer deposition
- conformality analysis
- LHAR
- lateral high aspect ratio structures