Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates

Research output: Contribution to conferenceConference PosterScientificpeer-review

Original languageEnglish
Publication statusPublished - 15 Oct 2019
MoE publication typeNot Eligible
Event 12th Seminar on Quantitative Microscopy (QM) and 8th Seminar on Nanoscale Calibration, Standards and Methods, NanoScale 2019 - Physikalisch-Technische Bundesanstalt, Braunschweig, Germany
Duration: 15 Oct 201916 Oct 2019
http://www.nanoscale.ptb.de/nanoscale-home.html

Conference

Conference 12th Seminar on Quantitative Microscopy (QM) and 8th Seminar on Nanoscale Calibration, Standards and Methods, NanoScale 2019
Abbreviated titleNanoScale 2019
CountryGermany
CityBraunschweig
Period15/10/1916/10/19
Internet address

Keywords

  • OtaNano

Equipment

  • Cite this

    Korpelainen, V., Ylivaara, O. M. E., Gao, F., Utriainen, M., Ylilammi, M., & Puurunen, R. L. (2019). Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates. Poster session presented at 12th Seminar on Quantitative Microscopy (QM) and 8th Seminar on Nanoscale Calibration, Standards and Methods, NanoScale 2019, Braunschweig, Germany.