Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates

Virpi Korpelainen, Oili M.E. Ylivaara, Feng Gao, Mikko Utriainen, Markku Ylilammi, Riikka, L. Puurunen

Research output: Contribution to conferenceConference PosterScientificpeer-review

Original languageEnglish
Publication statusPublished - 15 Oct 2019
MoE publication typeNot Eligible
Event 12th Seminar on Quantitative Microscopy (QM) and 8th Seminar on Nanoscale Calibration, Standards and Methods, NanoScale 2019 - Physikalisch-Technische Bundesanstalt, Braunschweig, Germany
Duration: 15 Oct 201916 Oct 2019
http://www.nanoscale.ptb.de/nanoscale-home.html

Conference

Conference 12th Seminar on Quantitative Microscopy (QM) and 8th Seminar on Nanoscale Calibration, Standards and Methods, NanoScale 2019
Abbreviated titleNanoScale 2019
CountryGermany
CityBraunschweig
Period15/10/1916/10/19
Internet address

Cite this

Korpelainen, V., Ylivaara, O. M. E., Gao, F., Utriainen, M., Ylilammi, M., & Puurunen, R. L. (2019). Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates. Poster session presented at 12th Seminar on Quantitative Microscopy (QM) and 8th Seminar on Nanoscale Calibration, Standards and Methods, NanoScale 2019, Braunschweig, Germany.
Korpelainen, Virpi ; Ylivaara, Oili M.E. ; Gao, Feng ; Utriainen, Mikko ; Ylilammi, Markku ; Puurunen, Riikka, L. / Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures : uncertainty estimates. Poster session presented at 12th Seminar on Quantitative Microscopy (QM) and 8th Seminar on Nanoscale Calibration, Standards and Methods, NanoScale 2019, Braunschweig, Germany.
@conference{db99ed21a6504e12a5dc1239e5514e2f,
title = "Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates",
author = "Virpi Korpelainen and Ylivaara, {Oili M.E.} and Feng Gao and Mikko Utriainen and Markku Ylilammi and Puurunen, {Riikka, L.}",
year = "2019",
month = "10",
day = "15",
language = "English",
note = "12th Seminar on Quantitative Microscopy (QM) and 8th Seminar on Nanoscale Calibration, Standards and Methods, NanoScale 2019, NanoScale 2019 ; Conference date: 15-10-2019 Through 16-10-2019",
url = "http://www.nanoscale.ptb.de/nanoscale-home.html",

}

Korpelainen, V, Ylivaara, OME, Gao, F, Utriainen, M, Ylilammi, M & Puurunen, RL 2019, 'Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates' 12th Seminar on Quantitative Microscopy (QM) and 8th Seminar on Nanoscale Calibration, Standards and Methods, NanoScale 2019, Braunschweig, Germany, 15/10/19 - 16/10/19, .

Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures : uncertainty estimates. / Korpelainen, Virpi; Ylivaara, Oili M.E.; Gao, Feng; Utriainen, Mikko; Ylilammi, Markku; Puurunen, Riikka, L.

2019. Poster session presented at 12th Seminar on Quantitative Microscopy (QM) and 8th Seminar on Nanoscale Calibration, Standards and Methods, NanoScale 2019, Braunschweig, Germany.

Research output: Contribution to conferenceConference PosterScientificpeer-review

TY - CONF

T1 - Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures

T2 - uncertainty estimates

AU - Korpelainen, Virpi

AU - Ylivaara, Oili M.E.

AU - Gao, Feng

AU - Utriainen, Mikko

AU - Ylilammi, Markku

AU - Puurunen, Riikka, L.

PY - 2019/10/15

Y1 - 2019/10/15

M3 - Conference Poster

ER -

Korpelainen V, Ylivaara OME, Gao F, Utriainen M, Ylilammi M, Puurunen RL. Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates. 2019. Poster session presented at 12th Seminar on Quantitative Microscopy (QM) and 8th Seminar on Nanoscale Calibration, Standards and Methods, NanoScale 2019, Braunschweig, Germany.