Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates

Virpi Korpelainen, Oili M.E. Ylivaara, Feng Gao, Mikko Utriainen, Markku Ylilammi, Riikka, L. Puurunen

    Research output: Contribution to conferenceConference PosterScientificpeer-review

    Original languageEnglish
    Publication statusPublished - 15 Oct 2019
    MoE publication typeNot Eligible
    Event 12th Seminar on Quantitative Microscopy (QM) and 8th Seminar on Nanoscale Calibration, Standards and Methods, NanoScale 2019 - Physikalisch-Technische Bundesanstalt, Braunschweig, Germany
    Duration: 15 Oct 201916 Oct 2019
    http://www.nanoscale.ptb.de/nanoscale-home.html

    Conference

    Conference 12th Seminar on Quantitative Microscopy (QM) and 8th Seminar on Nanoscale Calibration, Standards and Methods, NanoScale 2019
    Abbreviated titleNanoScale 2019
    Country/TerritoryGermany
    CityBraunschweig
    Period15/10/1916/10/19
    Internet address

    Keywords

    • OtaNano

    Cite this