Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates

Virpi Korpelainen; Oili M.E. Ylivaara; Feng Gao; Mikko Utriainen; Markku Ylilammi; Riikka, L. Puurunen

Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates

Virpi Korpelainen
, Oili M.E. Ylivaara
, Feng Gao
, Mikko Utriainen
, Markku Ylilammi
, Riikka, L. Puurunen

Aalto University

Research output: Contribution to conference › Conference Poster › Scientific › peer-review

Original language	English
Publication status	Published - 15 Oct 2019
MoE publication type	Not Eligible
Event	12th Seminar on Quantitative Microscopy (QM) and 8th Seminar on Nanoscale Calibration, Standards and Methods, NanoScale 2019 - Physikalisch-Technische Bundesanstalt, Braunschweig, Germany Duration: 15 Oct 2019 → 16 Oct 2019 http://www.nanoscale.ptb.de/nanoscale-home.html

Conference

Conference	12th Seminar on Quantitative Microscopy (QM) and 8th Seminar on Nanoscale Calibration, Standards and Methods, NanoScale 2019
Abbreviated title	NanoScale 2019
Country/Territory	Germany
City	Braunschweig
Period	15/10/19 → 16/10/19
Internet address	http://www.nanoscale.ptb.de/nanoscale-home.html

Keywords

OtaNano

OtaNano
VTT Technical Research Centre of Finland
Facility/equipment: Facility

Cite this

Korpelainen, V., Ylivaara, O. M. E., Gao, F., Utriainen, M., Ylilammi, M., & Puurunen, R. L. (2019). Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates. Poster session presented at 12th Seminar on Quantitative Microscopy (QM) and 8th Seminar on Nanoscale Calibration, Standards and Methods, NanoScale 2019, Braunschweig, Germany.

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title = "Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates",

keywords = "OtaNano",

author = "Virpi Korpelainen and Ylivaara, \{Oili M.E.\} and Feng Gao and Mikko Utriainen and Markku Ylilammi and Puurunen, \{Riikka, L.\}",

year = "2019",

month = oct,

day = "15",

language = "English",

note = " 12th Seminar on Quantitative Microscopy (QM) and 8th Seminar on Nanoscale Calibration, Standards and Methods, NanoScale 2019, NanoScale 2019 ; Conference date: 15-10-2019 Through 16-10-2019",

url = "http://www.nanoscale.ptb.de/nanoscale-home.html",

}

Korpelainen, V , Ylivaara, OME, Gao, F, Utriainen, M, Ylilammi, M & Puurunen, RL 2019, 'Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates', 12th Seminar on Quantitative Microscopy (QM) and 8th Seminar on Nanoscale Calibration, Standards and Methods, NanoScale 2019, Braunschweig, Germany, 15/10/19 - 16/10/19.

Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates. / Korpelainen, Virpi ; Ylivaara, Oili M.E.; Gao, Feng et al.
2019. Poster session presented at 12th Seminar on Quantitative Microscopy (QM) and 8th Seminar on Nanoscale Calibration, Standards and Methods, NanoScale 2019, Braunschweig, Germany.

Research output: Contribution to conference › Conference Poster › Scientific › peer-review

TY - CONF

T1 - Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures

T2 - 12th Seminar on Quantitative Microscopy (QM) and 8th Seminar on Nanoscale Calibration, Standards and Methods, NanoScale 2019

AU - Korpelainen, Virpi

AU - Ylivaara, Oili M.E.

AU - Gao, Feng

AU - Utriainen, Mikko

AU - Ylilammi, Markku

AU - Puurunen, Riikka, L.

PY - 2019/10/15

Y1 - 2019/10/15

KW - OtaNano

M3 - Conference Poster

Y2 - 15 October 2019 through 16 October 2019

ER -

Korpelainen V , Ylivaara OME, Gao F, Utriainen M, Ylilammi M, Puurunen RL. Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates. 2019. Poster session presented at 12th Seminar on Quantitative Microscopy (QM) and 8th Seminar on Nanoscale Calibration, Standards and Methods, NanoScale 2019, Braunschweig, Germany.

Thin film conformality analysis with microscopic PillarHall lateral high aspect ratio structures: uncertainty estimates

Conference

Keywords

Equipment

OtaNano

Cite this