Abstract
In the first edition of "The Nano-Micro Interface," we
discussed the piezoelectric quality of zinc oxide (ZnO)
thin films. In this second edition's chapter, we have
extended our view and included other piezoelectric
materials like AlN, Sc-alloyed AlN, PZT (lead zirconate
titanate) {Pb(ZrTi)O3}, and leadfree compounds. The focus
of applying these thin piezoelectric films is in BAW
(thin film bulk acoustic wave resonator) technology,
which is used in all smart mobile devices from phones to
tablets for wellness, health, and entertainment.
BAW technology is based on the venerable crystal
oscillator principle (such as quartz resonator) extended
to the GHz frequency range by utilizing thin film
technology to shrink the dimensions of the oscillator to
the micrometer-scale. The main application of BAW is in
telecommunications. The BAW filters show promise to be
even smaller and have higher performance than SAW
(surface acoustic wave) filters. Two different approaches
of BAW filters are reviewed and compared: bridge-type
technology and acoustic-mirror-based technology.
Piezoelectric materials in thin film form using
microelectronics fabrication methods and nanolevel
control of piezoelectric film growth will be emphasized.
| Original language | English |
|---|---|
| Title of host publication | The Nano-Micro Interface |
| Subtitle of host publication | Bridging the Micro and Nano Worlds |
| Editors | Marcel Van de Voorde, Matthias Werner, Hans-Jörg Fecht |
| Publisher | Wiley |
| Chapter | 13 |
| Pages | 243-270 |
| Edition | 2nd |
| ISBN (Electronic) | 978-3-527-67921-8 |
| ISBN (Print) | 978-3-527-33633-3 |
| DOIs | |
| Publication status | Published - 2015 |
| MoE publication type | D2 Article in professional manuals or guides or professional information systems or text book material |