Thin Film Piezomaterials for Bulk Acoustic Wave Technology

Jyrki Molarius, Tommi Riekkinen, Martin Kulawski, Markku Ylilammi

    Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

    2 Citations (Scopus)

    Abstract

    In the first edition of "The Nano-Micro Interface," we discussed the piezoelectric quality of zinc oxide (ZnO) thin films. In this second edition's chapter, we have extended our view and included other piezoelectric materials like AlN, Sc-alloyed AlN, PZT (lead zirconate titanate) {Pb(ZrTi)O3}, and leadfree compounds. The focus of applying these thin piezoelectric films is in BAW (thin film bulk acoustic wave resonator) technology, which is used in all smart mobile devices from phones to tablets for wellness, health, and entertainment. BAW technology is based on the venerable crystal oscillator principle (such as quartz resonator) extended to the GHz frequency range by utilizing thin film technology to shrink the dimensions of the oscillator to the micrometer-scale. The main application of BAW is in telecommunications. The BAW filters show promise to be even smaller and have higher performance than SAW (surface acoustic wave) filters. Two different approaches of BAW filters are reviewed and compared: bridge-type technology and acoustic-mirror-based technology. Piezoelectric materials in thin film form using microelectronics fabrication methods and nanolevel control of piezoelectric film growth will be emphasized.
    Original languageEnglish
    Title of host publicationThe Nano-Micro Interface
    Subtitle of host publicationBridging the Micro and Nano Worlds
    EditorsMarcel Van de Voorde, Matthias Werner, Hans-Jörg Fecht
    PublisherWiley
    Chapter13
    Pages243-270
    Edition2nd
    ISBN (Electronic)978-3-527-67921-8
    ISBN (Print)978-3-527-33633-3
    DOIs
    Publication statusPublished - 2015
    MoE publication typeD2 Article in professional manuals or guides or professional information systems or text book material

    Fingerprint

    acoustics
    thin films
    filters
    resonators
    crystal oscillators
    tablets
    microelectronics
    zinc oxides
    health
    telecommunication
    micrometers
    quartz
    frequency ranges
    oscillators
    mirrors
    fabrication

    Cite this

    Molarius, J., Riekkinen, T., Kulawski, M., & Ylilammi, M. (2015). Thin Film Piezomaterials for Bulk Acoustic Wave Technology. In M. Van de Voorde, M. Werner, & H-J. Fecht (Eds.), The Nano-Micro Interface: Bridging the Micro and Nano Worlds (2nd ed., pp. 243-270). Wiley. https://doi.org/10.1002/9783527679195.ch13
    Molarius, Jyrki ; Riekkinen, Tommi ; Kulawski, Martin ; Ylilammi, Markku. / Thin Film Piezomaterials for Bulk Acoustic Wave Technology. The Nano-Micro Interface: Bridging the Micro and Nano Worlds. editor / Marcel Van de Voorde ; Matthias Werner ; Hans-Jörg Fecht. 2nd. ed. Wiley, 2015. pp. 243-270
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    abstract = "In the first edition of {"}The Nano-Micro Interface,{"} we discussed the piezoelectric quality of zinc oxide (ZnO) thin films. In this second edition's chapter, we have extended our view and included other piezoelectric materials like AlN, Sc-alloyed AlN, PZT (lead zirconate titanate) {Pb(ZrTi)O3}, and leadfree compounds. The focus of applying these thin piezoelectric films is in BAW (thin film bulk acoustic wave resonator) technology, which is used in all smart mobile devices from phones to tablets for wellness, health, and entertainment. BAW technology is based on the venerable crystal oscillator principle (such as quartz resonator) extended to the GHz frequency range by utilizing thin film technology to shrink the dimensions of the oscillator to the micrometer-scale. The main application of BAW is in telecommunications. The BAW filters show promise to be even smaller and have higher performance than SAW (surface acoustic wave) filters. Two different approaches of BAW filters are reviewed and compared: bridge-type technology and acoustic-mirror-based technology. Piezoelectric materials in thin film form using microelectronics fabrication methods and nanolevel control of piezoelectric film growth will be emphasized.",
    author = "Jyrki Molarius and Tommi Riekkinen and Martin Kulawski and Markku Ylilammi",
    year = "2015",
    doi = "10.1002/9783527679195.ch13",
    language = "English",
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    pages = "243--270",
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    Molarius, J, Riekkinen, T, Kulawski, M & Ylilammi, M 2015, Thin Film Piezomaterials for Bulk Acoustic Wave Technology. in M Van de Voorde, M Werner & H-J Fecht (eds), The Nano-Micro Interface: Bridging the Micro and Nano Worlds. 2nd edn, Wiley, pp. 243-270. https://doi.org/10.1002/9783527679195.ch13

    Thin Film Piezomaterials for Bulk Acoustic Wave Technology. / Molarius, Jyrki; Riekkinen, Tommi; Kulawski, Martin; Ylilammi, Markku.

    The Nano-Micro Interface: Bridging the Micro and Nano Worlds. ed. / Marcel Van de Voorde; Matthias Werner; Hans-Jörg Fecht. 2nd. ed. Wiley, 2015. p. 243-270.

    Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

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    T1 - Thin Film Piezomaterials for Bulk Acoustic Wave Technology

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    AU - Riekkinen, Tommi

    AU - Kulawski, Martin

    AU - Ylilammi, Markku

    PY - 2015

    Y1 - 2015

    N2 - In the first edition of "The Nano-Micro Interface," we discussed the piezoelectric quality of zinc oxide (ZnO) thin films. In this second edition's chapter, we have extended our view and included other piezoelectric materials like AlN, Sc-alloyed AlN, PZT (lead zirconate titanate) {Pb(ZrTi)O3}, and leadfree compounds. The focus of applying these thin piezoelectric films is in BAW (thin film bulk acoustic wave resonator) technology, which is used in all smart mobile devices from phones to tablets for wellness, health, and entertainment. BAW technology is based on the venerable crystal oscillator principle (such as quartz resonator) extended to the GHz frequency range by utilizing thin film technology to shrink the dimensions of the oscillator to the micrometer-scale. The main application of BAW is in telecommunications. The BAW filters show promise to be even smaller and have higher performance than SAW (surface acoustic wave) filters. Two different approaches of BAW filters are reviewed and compared: bridge-type technology and acoustic-mirror-based technology. Piezoelectric materials in thin film form using microelectronics fabrication methods and nanolevel control of piezoelectric film growth will be emphasized.

    AB - In the first edition of "The Nano-Micro Interface," we discussed the piezoelectric quality of zinc oxide (ZnO) thin films. In this second edition's chapter, we have extended our view and included other piezoelectric materials like AlN, Sc-alloyed AlN, PZT (lead zirconate titanate) {Pb(ZrTi)O3}, and leadfree compounds. The focus of applying these thin piezoelectric films is in BAW (thin film bulk acoustic wave resonator) technology, which is used in all smart mobile devices from phones to tablets for wellness, health, and entertainment. BAW technology is based on the venerable crystal oscillator principle (such as quartz resonator) extended to the GHz frequency range by utilizing thin film technology to shrink the dimensions of the oscillator to the micrometer-scale. The main application of BAW is in telecommunications. The BAW filters show promise to be even smaller and have higher performance than SAW (surface acoustic wave) filters. Two different approaches of BAW filters are reviewed and compared: bridge-type technology and acoustic-mirror-based technology. Piezoelectric materials in thin film form using microelectronics fabrication methods and nanolevel control of piezoelectric film growth will be emphasized.

    U2 - 10.1002/9783527679195.ch13

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    M3 - Chapter or book article

    SN - 978-3-527-33633-3

    SP - 243

    EP - 270

    BT - The Nano-Micro Interface

    A2 - Van de Voorde, Marcel

    A2 - Werner, Matthias

    A2 - Fecht, Hans-Jörg

    PB - Wiley

    ER -

    Molarius J, Riekkinen T, Kulawski M, Ylilammi M. Thin Film Piezomaterials for Bulk Acoustic Wave Technology. In Van de Voorde M, Werner M, Fecht H-J, editors, The Nano-Micro Interface: Bridging the Micro and Nano Worlds. 2nd ed. Wiley. 2015. p. 243-270 https://doi.org/10.1002/9783527679195.ch13