Thin Film Piezomaterials for Bulk Acoustic Wave Technology

Jyrki Molarius, Tommi Riekkinen, Martin Kulawski, Markku Ylilammi

    Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

    2 Citations (Scopus)


    In the first edition of "The Nano-Micro Interface," we discussed the piezoelectric quality of zinc oxide (ZnO) thin films. In this second edition's chapter, we have extended our view and included other piezoelectric materials like AlN, Sc-alloyed AlN, PZT (lead zirconate titanate) {Pb(ZrTi)O3}, and leadfree compounds. The focus of applying these thin piezoelectric films is in BAW (thin film bulk acoustic wave resonator) technology, which is used in all smart mobile devices from phones to tablets for wellness, health, and entertainment. BAW technology is based on the venerable crystal oscillator principle (such as quartz resonator) extended to the GHz frequency range by utilizing thin film technology to shrink the dimensions of the oscillator to the micrometer-scale. The main application of BAW is in telecommunications. The BAW filters show promise to be even smaller and have higher performance than SAW (surface acoustic wave) filters. Two different approaches of BAW filters are reviewed and compared: bridge-type technology and acoustic-mirror-based technology. Piezoelectric materials in thin film form using microelectronics fabrication methods and nanolevel control of piezoelectric film growth will be emphasized.
    Original languageEnglish
    Title of host publicationThe Nano-Micro Interface
    Subtitle of host publicationBridging the Micro and Nano Worlds
    EditorsMarcel Van de Voorde, Matthias Werner, Hans-Jörg Fecht
    ISBN (Electronic)978-3-527-67921-8
    ISBN (Print)978-3-527-33633-3
    Publication statusPublished - 2015
    MoE publication typeD2 Article in professional manuals or guides or professional information systems or text book material


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