Thin Film Piezomaterials for Bulk Acoustic Wave Technology

Jyrki Molarius, Tommi Riekkinen, Martin Kulawski, Markku Ylilammi

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

2 Citations (Scopus)

Abstract

In the first edition of "The Nano-Micro Interface," we discussed the piezoelectric quality of zinc oxide (ZnO) thin films. In this second edition's chapter, we have extended our view and included other piezoelectric materials like AlN, Sc-alloyed AlN, PZT (lead zirconate titanate) {Pb(ZrTi)O3}, and leadfree compounds. The focus of applying these thin piezoelectric films is in BAW (thin film bulk acoustic wave resonator) technology, which is used in all smart mobile devices from phones to tablets for wellness, health, and entertainment. BAW technology is based on the venerable crystal oscillator principle (such as quartz resonator) extended to the GHz frequency range by utilizing thin film technology to shrink the dimensions of the oscillator to the micrometer-scale. The main application of BAW is in telecommunications. The BAW filters show promise to be even smaller and have higher performance than SAW (surface acoustic wave) filters. Two different approaches of BAW filters are reviewed and compared: bridge-type technology and acoustic-mirror-based technology. Piezoelectric materials in thin film form using microelectronics fabrication methods and nanolevel control of piezoelectric film growth will be emphasized.
Original languageEnglish
Title of host publicationThe Nano-Micro Interface
Subtitle of host publicationBridging the Micro and Nano Worlds
EditorsMarcel Van de Voorde, Matthias Werner, Hans-Jörg Fecht
PublisherWiley
Chapter13
Pages243-270
Edition2nd
ISBN (Electronic)978-3-527-67921-8
ISBN (Print)978-3-527-33633-3
DOIs
Publication statusPublished - 2015
MoE publication typeD2 Article in professional manuals or guides or professional information systems or text book material

Fingerprint

acoustics
thin films
filters
resonators
crystal oscillators
tablets
microelectronics
zinc oxides
health
telecommunication
micrometers
quartz
frequency ranges
oscillators
mirrors
fabrication

Cite this

Molarius, J., Riekkinen, T., Kulawski, M., & Ylilammi, M. (2015). Thin Film Piezomaterials for Bulk Acoustic Wave Technology. In M. Van de Voorde, M. Werner, & H-J. Fecht (Eds.), The Nano-Micro Interface: Bridging the Micro and Nano Worlds (2nd ed., pp. 243-270). Wiley. https://doi.org/10.1002/9783527679195.ch13
Molarius, Jyrki ; Riekkinen, Tommi ; Kulawski, Martin ; Ylilammi, Markku. / Thin Film Piezomaterials for Bulk Acoustic Wave Technology. The Nano-Micro Interface: Bridging the Micro and Nano Worlds. editor / Marcel Van de Voorde ; Matthias Werner ; Hans-Jörg Fecht. 2nd. ed. Wiley, 2015. pp. 243-270
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Molarius, J, Riekkinen, T, Kulawski, M & Ylilammi, M 2015, Thin Film Piezomaterials for Bulk Acoustic Wave Technology. in M Van de Voorde, M Werner & H-J Fecht (eds), The Nano-Micro Interface: Bridging the Micro and Nano Worlds. 2nd edn, Wiley, pp. 243-270. https://doi.org/10.1002/9783527679195.ch13

Thin Film Piezomaterials for Bulk Acoustic Wave Technology. / Molarius, Jyrki; Riekkinen, Tommi; Kulawski, Martin; Ylilammi, Markku.

The Nano-Micro Interface: Bridging the Micro and Nano Worlds. ed. / Marcel Van de Voorde; Matthias Werner; Hans-Jörg Fecht. 2nd. ed. Wiley, 2015. p. 243-270.

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

TY - CHAP

T1 - Thin Film Piezomaterials for Bulk Acoustic Wave Technology

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AU - Riekkinen, Tommi

AU - Kulawski, Martin

AU - Ylilammi, Markku

PY - 2015

Y1 - 2015

N2 - In the first edition of "The Nano-Micro Interface," we discussed the piezoelectric quality of zinc oxide (ZnO) thin films. In this second edition's chapter, we have extended our view and included other piezoelectric materials like AlN, Sc-alloyed AlN, PZT (lead zirconate titanate) {Pb(ZrTi)O3}, and leadfree compounds. The focus of applying these thin piezoelectric films is in BAW (thin film bulk acoustic wave resonator) technology, which is used in all smart mobile devices from phones to tablets for wellness, health, and entertainment. BAW technology is based on the venerable crystal oscillator principle (such as quartz resonator) extended to the GHz frequency range by utilizing thin film technology to shrink the dimensions of the oscillator to the micrometer-scale. The main application of BAW is in telecommunications. The BAW filters show promise to be even smaller and have higher performance than SAW (surface acoustic wave) filters. Two different approaches of BAW filters are reviewed and compared: bridge-type technology and acoustic-mirror-based technology. Piezoelectric materials in thin film form using microelectronics fabrication methods and nanolevel control of piezoelectric film growth will be emphasized.

AB - In the first edition of "The Nano-Micro Interface," we discussed the piezoelectric quality of zinc oxide (ZnO) thin films. In this second edition's chapter, we have extended our view and included other piezoelectric materials like AlN, Sc-alloyed AlN, PZT (lead zirconate titanate) {Pb(ZrTi)O3}, and leadfree compounds. The focus of applying these thin piezoelectric films is in BAW (thin film bulk acoustic wave resonator) technology, which is used in all smart mobile devices from phones to tablets for wellness, health, and entertainment. BAW technology is based on the venerable crystal oscillator principle (such as quartz resonator) extended to the GHz frequency range by utilizing thin film technology to shrink the dimensions of the oscillator to the micrometer-scale. The main application of BAW is in telecommunications. The BAW filters show promise to be even smaller and have higher performance than SAW (surface acoustic wave) filters. Two different approaches of BAW filters are reviewed and compared: bridge-type technology and acoustic-mirror-based technology. Piezoelectric materials in thin film form using microelectronics fabrication methods and nanolevel control of piezoelectric film growth will be emphasized.

U2 - 10.1002/9783527679195.ch13

DO - 10.1002/9783527679195.ch13

M3 - Chapter or book article

SN - 978-3-527-33633-3

SP - 243

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BT - The Nano-Micro Interface

A2 - Van de Voorde, Marcel

A2 - Werner, Matthias

A2 - Fecht, Hans-Jörg

PB - Wiley

ER -

Molarius J, Riekkinen T, Kulawski M, Ylilammi M. Thin Film Piezomaterials for Bulk Acoustic Wave Technology. In Van de Voorde M, Werner M, Fecht H-J, editors, The Nano-Micro Interface: Bridging the Micro and Nano Worlds. 2nd ed. Wiley. 2015. p. 243-270 https://doi.org/10.1002/9783527679195.ch13