Thin film process for Nb/NbOx/(Pb-In-Au) Josephson junction devices

Jorma Salmi, Jukka Knuutila, Heikki Seppä, Pekka Immonen

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)


A thin film process for the fabrication of Nb/NbOx/(Pb-In-Au) Josephson junctions has been developed. This process is primarily based on the lift-off of photoresist treated with toluene, ion beam etching of junction areas, d.c. plasma oxidation and thin film vacuum deposition techniques. The device characteristics are described in terms of the processing parameters.

Original languageEnglish
Pages (from-to)77 - 81
Number of pages5
JournalThin Solid Films
Issue number1-2
Publication statusPublished - 1985
MoE publication typeNot Eligible


  • Josephson junction
  • devices

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