Thin film process for Nb/NbOx/(Pb-In-Au) Josephson junction devices

Jorma Salmi, Jukka Knuutila, Heikki Seppä, Pekka Immonen

    Research output: Contribution to journalArticleScientificpeer-review

    2 Citations (Scopus)

    Abstract

    A thin film process for the fabrication of Nb/NbOx/(Pb-In-Au) Josephson junctions has been developed. This process is primarily based on the lift-off of photoresist treated with toluene, ion beam etching of junction areas, d.c. plasma oxidation and thin film vacuum deposition techniques. The device characteristics are described in terms of the processing parameters.

    Original languageEnglish
    Pages (from-to)77-81
    JournalThin Solid Films
    Volume126
    Issue number1-2
    DOIs
    Publication statusPublished - 1985
    MoE publication typeA1 Journal article-refereed

    Keywords

    • Josephson junction
    • devices

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