@inbook{7eafe12d203a4b81b1769439c53ed216,
title = "Thin film stress measurement and error determination: ALD Al2O3 films with different wafer sizes",
author = "Hannele Heikkinen and Oili Ylivaara and Leif Gr{\"o}nberg and Puurunen, \{Riikka L.\}",
note = "Published abstract of a poster presentation Project 74717 MECHALD and 102086 ALDCoE; 13th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2015, Baltic ALD 2015 ; Conference date: 28-09-2015 Through 29-09-2015",
year = "2015",
language = "English",
booktitle = "Technical Program \& Abstracts",
publisher = "American Vacuum Society (AVS)",
address = "United States",
}