@conference{a9c827c064464002b0de37bea2eba701,
title = "Thin Si layers transferred on glass",
keywords = "wafer bonding, thin film transfer, silicon on glass (SOG)",
author = "Kimmo Henttinen and Tommi Suni and Arto Nurmela and Hannu Luoto and Jyrki Kiiham{\"a}ki and Ilkka Suni and M. Cai and S.S. Lau",
note = "Project code: T2Su00141 No bibliographic info about proceedings publication found; SeSiBon workshop on wafer bonding ; Conference date: 30-09-2002 Through 01-10-2002",
year = "2002",
language = "English",
}