Thin Si layers transferred on glass

Kimmo Henttinen, Tommi Suni, Arto Nurmela, Hannu Luoto, Jyrki Kiihamäki, Ilkka Suni, M. Cai, S.S. Lau

    Research output: Contribution to conferenceConference articleScientificpeer-review

    Original languageEnglish
    Publication statusPublished - 2002
    MoE publication typeNot Eligible
    EventSeSiBon workshop on wafer bonding - Barcelona, Spain
    Duration: 30 Sep 20021 Oct 2002

    Workshop

    WorkshopSeSiBon workshop on wafer bonding
    Country/TerritorySpain
    CityBarcelona
    Period30/09/021/10/02

    Keywords

    • wafer bonding
    • thin film transfer
    • silicon on glass (SOG)

    Cite this