Thin Si layers transferred on glass

Kimmo Henttinen, Tommi Suni, Arto Nurmela, Hannu Luoto, Jyrki Kiihamäki, Ilkka Suni, M. Cai, S.S. Lau

Research output: Contribution to conferenceConference articleScientificpeer-review

Original languageEnglish
Publication statusPublished - 2002
MoE publication typeNot Eligible
EventSeSiBon workshop on wafer bonding - Barcelona, Spain
Duration: 30 Sep 20021 Oct 2002

Workshop

WorkshopSeSiBon workshop on wafer bonding
CountrySpain
CityBarcelona
Period30/09/021/10/02

Keywords

  • wafer bonding
  • thin film transfer
  • silicon on glass (SOG)

Cite this

Henttinen, K., Suni, T., Nurmela, A., Luoto, H., Kiihamäki, J., Suni, I., Cai, M., & Lau, S. S. (2002). Thin Si layers transferred on glass. Paper presented at SeSiBon workshop on wafer bonding, Barcelona, Spain.