Thin Si layers transferred on glass

Kimmo Henttinen; Tommi Suni; Arto Nurmela; Hannu Luoto; Jyrki Kiihamäki; Ilkka Suni; M. Cai; S.S. Lau

Thin Si layers transferred on glass

Kimmo Henttinen
, Tommi Suni
, Arto Nurmela
, Hannu Luoto
, Jyrki Kiihamäki
, Ilkka Suni
, M. Cai
, S.S. Lau

Research output: Contribution to conference › Conference article › Scientific › peer-review

Original language	English
Publication status	Published - 2002
MoE publication type	Not Eligible
Event	SeSiBon workshop on wafer bonding - Barcelona, Spain Duration: 30 Sept 2002 → 1 Oct 2002

Workshop

Workshop	SeSiBon workshop on wafer bonding
Country/Territory	Spain
City	Barcelona
Period	30/09/02 → 1/10/02

Keywords

wafer bonding
thin film transfer
silicon on glass (SOG)

Cite this

@conference{a9c827c064464002b0de37bea2eba701,

title = "Thin Si layers transferred on glass",

keywords = "wafer bonding, thin film transfer, silicon on glass (SOG)",

author = "Kimmo Henttinen and Tommi Suni and Arto Nurmela and Hannu Luoto and Jyrki Kiiham{\"a}ki and Ilkka Suni and M. Cai and S.S. Lau",

note = "Project code: T2Su00141 No bibliographic info about proceedings publication found; SeSiBon workshop on wafer bonding ; Conference date: 30-09-2002 Through 01-10-2002",

year = "2002",

language = "English",

}

TY - CONF

T1 - Thin Si layers transferred on glass

AU - Henttinen, Kimmo

AU - Suni, Tommi

AU - Nurmela, Arto

AU - Luoto, Hannu

AU - Kiihamäki, Jyrki

AU - Suni, Ilkka

AU - Cai, M.

AU - Lau, S.S.

N1 - Project code: T2Su00141 No bibliographic info about proceedings publication found

PY - 2002

Y1 - 2002

KW - wafer bonding

KW - thin film transfer

KW - silicon on glass (SOG)

M3 - Conference article

T2 - SeSiBon workshop on wafer bonding

Y2 - 30 September 2002 through 1 October 2002

ER -